The microstructures found in specimens of single crystal MgO after irradiation with 2 MeV oxygen or 4 MeV iron ions were examined by transmission electron microscopy of cross-sectional specimens. The observed damage consisted primarily of dislocations. The end of the damage occurred at a depth of 2.4 μm for the oxygen irradiation and 2.8 μm for the iron irradiation. For both irradiations, the damage appeared to have two bands where the density peaked. Between these bands, the dislocation density was suppressed as compared to the balance of the profile. Measurements of the implanted iron concentration profile by energy dispersive X-ray spectroscopy demonstrated that the peak in the iron concentration was located at 2.2 μm, approximately the center of the low dislocation region. Surprisingly, electron energy loss spectroscopy of the damaged region from the oxygen irradiation demonstrated no measurable variations in the nominal 50 at.% oxygen concentration. With simultaneous implantation of helium ions, an additional region with low dislocation density was observed at 0.9 to 1.1 μm, the calculated location of the implanted helium. The observations suggest that the charge associated with the deposited ions may have an influence on the resulting damage. In addition, the experimental profiles indicate damage and ion ranges well beyond the calculated values.