Ion-induced Secondary Electron Emission Research Articles

Nonlinear change of ion-induced secondary electron emission in the κ-Al2O3 surface charging from first-principle modelling

Abstract Secondary electron emission (SEE) induced by the positive ion is an essential physical process to influence the dynamics of gas discharge which relies on the specific surface material. Surface charging has a significant impact on the material properties, thereby affecting the SEE in the plasma-surface interactions. However, it does not attract enough attention in the previous studies. In this paper, SEE dependent on the charged surface of specific materials is described with the computational method combining a density functional theory (DFT) model from the first-principle theory and the theory of Auger neutralization. The effect of κ-Al2O3 surface charge, as an example, on the ion-induced secondary electron emission coefficient (SEEC) is investigated by analysing the defect energy level and band structure on the charged surface. Simulation results indicate that, with the surface charge from negative to positive, the SEEC of a part of low ionization energy ions (such as Ei = 12.6 eV) increases first and then decreases, exhibiting a nonlinear changing trend. This is quite different from the monotonic decreasing tendency observed in the previous model which simplifies the electronic structure. This irregular increase of the SEEC can be attributed to the lower escaped probability of orbital energy. The results further illustrate that the excessive charge could cause the bottom of the conduction band close to the valence band, thus leading to the decrease of the orbital energy occupied by the excited electrons. The nonlinear change of SEEC demonstrates a more realistic situation of how the electronic structure of material surface influences the SEE process. This work provides an accurate method of calculating SEEC from specific materials, which is urgent in widespread physical scenarios sensitive to surface materials, such as increasingly growing practical applications concerning plasma-surface interactions.

An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes

The ignition process of a pulse modulated capacitively coupled argon discharge driven simultaneously by two radio frequency voltages [12.5 MHz (high frequency) and 2.5 MHz (low frequency, LF)] is investigated by multifold experimental diagnostics and particle in cell / Monte Carlo collision simulations. In particular, (i) the effects of the LF voltage amplitude measured at the end of the pulse-on period, VL,end , on the spatiotemporal distribution of the electron impact excitation rate determined by phase resolved optical emission spectroscopy, and (ii) the electrical parameters acquired by analyzing the measured waveforms of the plasma current and voltage, are studied. Computed electrical parameters and spatio-temporal excitation maps show a good qualitative agreement with the experimental results. Especially, various breakdown mechanisms are found at different VL,end . At low values of VL,end , the ‘RF-avalanche’ mode (volume process) dominates the electron multiplication process. By increasing VL,end , the ionization caused by the volume electrons is suppressed and the electron loss at the electrodes is enhanced, leading to a delayed ignition. At higher values of VL,end , the avalanche ionization is significantly enhanced by ion-induced secondary electron emission at the electrodes, so that the ignition is significantly advanced.

Cylindrical hot cathode ionisation gauge – The concept and simulations

A novel design of an ionisation vacuum gauge is presented, aiming to achieve predictable sensitivity and high accuracy in high and the ultra-high vacuum range. The proposed design features a belt-like electron beam emitted from a linear filament, following a circular trajectory between two cylindrical electrodes, resembling a cylindrical analyser. The proposed design offers several key upsides: a precisely defined electron beam trajectory with reduced susceptibility to path variations, effective electron collection in a Faraday cup able to contain secondary emissions and backscattered electrons, and the inclusion of a suppressor grid in front of the ion collector to eliminate ion-induced secondary electron emission. These features are expected to secure high stability of the gauge and the low pressure limit. An in-depth description of the design is presented, along with the discussions on simulations of the key components that provide the improved performance.

Pulsed photoemission induced plasma breakdown

This article characterises the effects of cathode photoemission leading to electrical discharges in an argon gas. We perform breakdown experiments under pulsed laser illumination of a flat cathode and observe Townsend to glow discharge transitions. The breakdown process is recorded by high-speed imaging, and time-dependent voltage and current across the electrode gap are measured for different reduced electric fields and laser intensities. We employ a 0D transient discharge model to interpret the experimental measurements. The fitted values of transferred photoelectron charge are compared with calculations from a quantum model of photoemission. The breakdown voltage is found to be lower with photoemission than without. When the applied voltage is insufficient for ion-induced secondary electron emission to sustain the plasma, laser driven photoemission can still create a breakdown where a sheath (i.e. a region near the electrode surfaces consisting of positive ions and neutrals) is formed. This photoemission induced plasma persists and decays on a much longer time scale ( s) than the laser pulse length ( ps). The effects of different applied voltages and laser energies on the breakdown voltage and current waveforms are investigated. The discharge model can accurately predict the measured breakdown voltage curves, despite the existence of discrepancy in quantitatively describing the transient discharge current and voltage waveforms.

Dimensional analysis on microscale gas breakdown with electric field nonuniformity and positive space charge effects

A dimensional method was employed to evaluate the microscale gas breakdown characteristics at atmospheric pressure, resulting in a universal breakdown curve applicable to different types of gases (e.g., Ar, Xe, Ne, and N2). As the gap distance decreases, the breakdown mode transitions from ion-induced secondary electron emission to the field emission regime. In the field emission regime, the positive space charge effect becomes more significant. We discovered that incorporating the positive space charge effect in the field emission regime can be achieved by modifying the local electric field enhancement factor β. Consequently, we propose an effective electric field enhancement factor, βeff, which scales linearly with β, to accurately reproduce the breakdown curve while considering the positive space charge effect. This proposed approach significantly simplifies the numerical model. Additionally, we examined the effects of gas pressure, gap distance, cathode properties (e.g., work function and secondary electron emission coefficient), and electric field nonuniformity.

Secondary electron emission from magnetron targets

Ion-induced secondary electron emission of surfaces occurs in all gas discharges which have contact to surfaces such as electrodes or chamber walls. These secondary electrons (SEs) play an important role, for instance, in the performance of DC discharges, RF discharges and magnetron sputtering discharges. SE generation can be separated into potential electron emission (PEE) due to the neutralization of the incident ion upon impact and kinetic electron emission (KEE) due to the electronic stopping of the penetrating ion in the solid. SE due to neutralization is usually described by Auger processes and the density of states of the electrons in the solid, whereas KEE scales with the electronic stopping of the ion in the solid, as being calculated by ion collision simulations. The measurement of the energy distribution of the SEs of three metals (Al, Ti, Cu) and their oxides reveals the occurrence of Auger peaks, which are not reflected by standard models such as the Hagstrum model. Instead, in this paper, a model is proposed describing these Auger peaks by Auger neutralization of holes created by the collision cascade of the incident ion. This shows decent agreement. The contribution of Auger peaks in the metals Al and Ti is very significant, whereas it is negligible in the case of Cu. The implication of these energy distributions to the performance of magnetron sputtering discharges is discussed.

Application of optical emission spectroscopy to predict the composition of films during reactive magnetron sputtering of Ti-Al composite targets

The processes of reactive magnetron sputtering of Ti-Al composite targets with different Al/Ti ratios have been studied. The dependences of the deposition rate, discharge voltage, elemental composition, and intensity of the control lines of optical plasma radiation on the oxygen concentration in the Ar/O2 gas mixture are established. It is shown that during reactive sputtering of Ti-Al composite targets, the discharge voltage is determined by the effective ion-induced secondary electron emission coefficient (SEEC) which depends on the area occupied by metals on the target, the degree of their oxidation, and the SEEC of these metals and their oxides. The rate of the deposition of TixAl1-xOy films in the metallic and transition sputtering modes increases proportional to the concentration of Al in the target, but the relative concentration of metals in the deposited films depends on the oxygen concentration in the Ar/O2 gas mixture and is determined by the reactivity of the target materials. It has been shown by optical emission spectroscopy (OES) that the ratio of the atomic concentrations of Al and Ti in deposited TixAl1-xOy films unambiguously depends on the ratio of the intensity of the control optical lines of aluminum AlI and titanium TiI in plasma. This makes it possible to use the OES method to predict the content of metals in a film during reactive magnetron sputtering of Ti-Al targets.

Effect of molecular axis orientation of 3.6 MeV Si2+ projectiles on the ion-induced secondary electron emission from a carbon foil

We study ion-induced secondary electron emission from solid surfaces. This work focuses on the dependence of the energy distribution of secondary electrons on the orientation of Si-dimers impinging on thin carbon foils. The orientation was determined by the foil-induced Coulomb explosion method. Furthermore, the electron energy was measured with a retarding field analyzer. The correlation between the electron energy distribution and the cluster orientation was obtained through simultaneous measurements. A comparison of the electron energy distribution for parallel and perpendicular orientations indicated that the electron yields at an energy below 20 eV are lower for parallel orientation. This reduction can be explained by the orientation dependence of the energy loss of Si2+ in carbon. It was suggested that the orientation effect is due to the distant collision between the cluster and the target atom, in which low-energy electrons are produced.

Streamer–surface interaction in an atmospheric pressure dielectric barrier discharge in argon

An atmospheric-pressure dielectric barrier discharge (DBD) in argon is investigated using a time-dependent and spatially two-dimensional fluid-Poisson model in axisymmetric geometry. The focus is on the streamer–surface interaction and the cathode-layer formation during the first discharge event in the single-filament DBD driven by sinusoidal voltage. A characteristic structure consisting of a volume streamer propagating just above the dielectric and simultaneous development of an additional surface discharge near the cathode is observed. The analysis of the electric field, electron production and loss rates, and surface charge density distribution shows that the radial deflection of the volume streamer is driven by free electrons remaining in the volume from the Townsend pre-phase and guided by the radial component of the electric field. The surface discharge occurring between the deflected volume streamer, which acts as virtual anode, and the dielectric surface is governed by ion-induced secondary electron emission and the surface charges accumulated on the dielectric.

Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments

Ion-induced secondary electron emission at a target surface is an essential mechanism for laboratory plasmas, i.e. magnetron sputtering discharges. Electron emission, however, is strongly affected by the target condition itself such as oxidation. Data of oxidized targets, however, are very sparse and prone to significant systematic errors, because they were often determined by modeling the complex behavior of the plasma. Thus, it is difficult to isolate the process of ion-induced electron emission from all other plasma-surface-interactions. By utilizing ion beams, the complex plasma environment is avoided and electron yields are determined with higher accuracy. In this study, ion-induced secondary electron emission coefficients (SEECs) of clean, untreated (air-exposed), and intentionally oxidized copper and nickel surfaces were investigated in such a particle beam experiment. Pristine and oxidized metal foils were exposed to beams of singly charged argon ions with energies of 0.2 keV - 10 keV. After the ion beam treatment, the surface conditions were analyzed by ex-situ x-ray photoelectron spectroscopy measurements. Further, a model for the electron emission of a partly oxidized surface is presented, which is in agreement with the experimental data. It was found, that oxidized and untreated/air-exposed surfaces do not show the same SEEC: for intentionally oxidized targets, the electron yields were smaller by a factor of 2 than for untreated/air-exposed surfaces. SEECs of oxides were found to be between the values for clean and for untreated metal surfaces. Further, the SEEC was at maximum for untreated/air-exposed surfaces and at minimum for clean surfaces; the electron yields of untreated/air-exposed and clean surfaces were in agreement with values reported in the literature.

Polarity dependence of electrical breakdown in argon under a non-uniform electric field

A considerable difference in the breakdown potential of a uniform pressure gas (specifically argon) under an asymmetric non-uniform electric field is observed depending on the polarity of the field. The degree of variation in the breakdown potential between the two polarities can be explained if one assumes a strong variation of the ion-induced secondary electron emission coefficient with the magnitude of the reduced electric field at the cathode. The magnitude of the breakdown potential can be predicted by evaluating the breakdown criterion along multiple field lines if one includes a numerical factor to account for diffusion of electrons out of the preferred breakdown channel.

Computing the Paschen curve for argon with speed-limited particle-in-cell simulation

Upon inclusion of collisions, the speed-limited particle-in-cell (SLPIC) simulation method successfully computed the Paschen curve for argon. The 1D3V simulations modeled an electron cascade across an argon-filled capacitor, including electron-neutral ionization, electron-neutral elastic collisions, electron-neutral excitation, and ion-induced secondary electron emission. In electrical breakdown, the timescale difference between ion and electron motion makes traditional PIC methods computationally slow. To decrease this timescale difference and speed up computation, we used SLPIC, a time-domain algorithm that limits the speed of the fastest electrons in the simulation. The SLPIC algorithm facilitates a straightforward, fully kinetic treatment of dynamics and collisions. SLPIC was as accurate as PIC, but ran up to 200 times faster. SLPIC accurately computed the Paschen curve for argon over three orders of magnitude in pressure.

Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors

The influence of charge trap states in the dielectric boundary material on capacitively coupled radio-frequency (RF) plasma discharge is investigated with theory and particle-in-cell/Monte Carlo collision simulation. It is found that the trap states of the wall material manipulated discharge properties mainly through the varying ion-induced secondary electron emission (SEE) coefficient in response to dynamic surface charges accumulated within the solid boundary. A comprehensive SEE model considering surface charging is established first, which incorporates the valence band electron distribution, electron trap density, and charge trapping through Auger neutralization and de-excitation. Theoretical analysis is carried out to reveal the effects of trap states on sheath solution, stability, plasma density and temperature, particle and power balance, etc. The theoretical work is supported by simulation results, showing the reduction of the mean RF sheath potential as charging-dependent emission coefficient increases. As the gas pressure increases, a shift of the maximum ionization rate from the bulk plasma center to the plasma-sheath interface is observed, which is also influenced by the trap states of the electrode material where the shift happens at a lower pressure with traps considered. In addition, charge traps are proven to be helpful for creating asymmetric plasma discharges with geometrically symmetric structures; such an effect is more pronounced in γ-mode discharges.

Secondary electron emission due to multi-species iodine ion bombardment of different target materials

Ion-induced secondary electron emission (SEE) is a fundamental surface interaction that strongly influences many plasma discharges. Recently, interest in iodine plasmas is growing due to new material processing and space propulsion applications, but data for SEE yields due to iodine ion bombardment remain scarce. Additionally, due to the formation of multiple ion species in typical iodine plasmas and surface chemical reactions leading to iodide layer formation, the effective SEE yield is expected to differ from that for individual ion species on clean surfaces. In this work, we measure the SEE yield of multi-species iodine ion beams bombarding different target materials (Mo, W, Al, Ti, Cu, carbon-carbon, and steel) in the energy range of 0.6–1.4 keV. An ion beam is produced by extracting and accelerating ions from a gridded ion source based on an inductively coupled plasma (ICP). SEE yields of downstream targets are measured using a conventional electrostatic probe technique, and the ion beam composition is determined using time-of-flight spectrometry. The beam is composed predominately of atomic (I+) and molecular (I2+) ions whose ratio changes depending on the ICP power. Yields depend strongly on the target material and beam composition and vary between 0.05 and 0.4 depending on whether potential or kinetic emission processes dominate.

Particle-in-cell simulations of the alpha and gamma modes in collisional nitrogen capacitive discharges

We perform one-dimensional (1D) particle-in-cell (PIC) simulations to study the α and γ modes in an intermediate pressure 1.6 Torr, 2.5 cm gap capacitive nitrogen discharge driven at 13.56 MHz with current density amplitudes J 0 = 7 to 150 A m−2. In the α-mode, ion-induced secondary electron emission has minimal effects on the discharge equilibrium, while in the γ-mode, it is essential for sustaining the discharge. As in a previous study of a comparable argon discharge, [Kawamura et al 2020, J. Vac. Sci. Technol. A 38, 023003], the nitrogen discharge in the α-mode can be described by a ‘passive bulk’ model in which the ionization is negligible in the central bulk region and is due solely to electron sheath heating. The nitrogen discharge undergoes an α to γ transition in the applied J 0 range, characterized by an increase in density and a decrease in electron temperature, sheath widths and sheath voltages. For the γ-mode, we calculate the scalings of the maximum sheath width s m and the rf sheath voltage amplitude V 1 with J 0. We compare the PIC results in the α-mode to the passive bulk model (modified for nitrogen), and, in the γ-mode with the expected J 0-V 1 and s m-V 1 curves. We find good agreement with the simulations in both the α and γ regimes, and the α to γ transition is well predicted by the models.

Influence of ion-induced secondary electron emission parameters in PICMC plasma simulations with experimental validation in DC cylindrical diode and magnetron discharges

Niobium thin films are used at CERN (European Organization for Nuclear Research) for coatings of superconducting radio-frequency (SRF) accelerating cavities. Numerical simulations can help to better understand the physical processes involved in such coatings and provide predictions of thin film properties. In this article, particle-in-cell Monte Carlo 3D plasma simulations are validated against experimental data in a coaxial cylindrical system allowing both DC diode and DC magnetron operation. A proper choice of ion induced secondary electron emission parameters enables to match experimental and simulated discharge currents and voltages, with argon as the process gas and niobium as the target element. Langmuir probe measurements are presented to further support simulation results. The choice of argon gas with a niobium target is driven by CERN applications, but the methodology described in this paper is applicable to other discharge gases and target elements.Validation of plasma simulations is the first step towards developing an accurate methodology for predicting thin film coatings characteristics in complex objects such as SRF cavities.

Analysis of current-voltage characteristics for Langmuir probes immersed in an ion beam.

Movable electrical probes were used to diagnose the beam flux profile and potential of ion beams since the early 1960s. Experimental measurements of beam plasmas can provide essential data related to the space charge neutralization, but the current-voltage characteristics obtained from such electrical probes are dominated by beam ion impact and ion-induced secondary emission. In this work, we present an analysis of the Langmuir characteristics obtained in a negative ion beam. We identify and discuss separately the contributions to the collected current given by secondary plasma ions and electrons, stripped electrons, beam ions, and ion-induced secondary electron emission. We present the beam plasma parameters obtained at different beam energies in NIO1.

Atmospheric pressure dielectric barrier discharge involving ion-induced secondary electron emission controlled by dielectric surface charges

Secondary electron emission (SEE) induced by interaction between positive ion and dielectric surface is essential physical process for maintaining sustained discharge and controlling the characteristics of atmospheric pressure dielectric barrier discharge (DBD). In this work, SEE is described based on Auger neutralization theory. Dielectric energy band structure and defect energy level, including hole and electron trap energy levels, are taken into account to build a hypothetical relationship γi = f (σ) between secondary electron emission coefficient γi and surface charge density σ. With the introduction of γi = f (σ) in DBD model, the characteristics of DBD are discussed in both first and steady discharges. It is found that, in steady discharge, γi has higher value during the beginning and development state of discharge pulse of DBD, and γi decreases in extinction stage. The negatively charged dielectric surface enhances SEE before discharge, which benefits the formation of diffuse discharge, compared with DBD of constant γi. Moreover, the increase of energy band gap of dielectric reduces γi, leading to the contractive discharge in DBD. The relationship between γi and σ can be further applied to study the influences of defect energy level parameters on SEE and DBD characteristics.

Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms

Particle-in-Cell/Monte Carlo Collision simulations are performed to investigate the effects of heavy-particle induced secondary electrons (SEs) on the ionization dynamics and on the control of ion properties at the electrodes in geometrically symmetric capacitively coupled argon discharges driven by tailored voltage waveforms. The driving voltage waveform is composed of a maximum of four (1≤N≤4) consecutive harmonics of the fundamental frequency of 13.56 MHz and is tailored by adjusting the identical phases of the even harmonics, θ. The simulations are carried out at neutral gas pressures of 3 Pa (nearly collisionless low-pressure regime) and 100 Pa (collisional high-pressure regime). Different approaches are used in the simulations to describe the secondary electron emission (SEE) at the electrodes: we adopt (i) constant ion-induced secondary electron emission coefficients (SEECs), γ, and (ii) realistic, energy-dependent SE yields for ions and fast neutrals. The mean ion energy at the electrodes, ⟨Ei⟩, can be controlled by θ at both pressures, for both approaches adopted to describe the SEE in the simulations. At a low pressure of 3 Pa, we obtain largely different dependencies of the ion flux at the electrodes, Γi, on θ, depending on the value of the γ-coefficient. For γ=0.2, Γi remains nearly constant as a function of θ, independently of the choice of N, i.e., the mean ion energy can be controlled separately from the ion flux by adjusting θ. However, for values of γ different from 0.2, the quality of the separate control of the ion properties changes significantly. At a high pressure of 100 Pa, independently of the choice of γ, for a given N≥2, the ion flux varies as a function of θ. At both pressures, the surface conditions affect the plasma parameters and the quality of the separate control of ion properties at the electrodes. Adopting realistic, energy-dependent SE yields for heavy particles in the simulations can lead to significantly different results compared to those obtained by assuming constant SEECs.

DC discharge with high secondary electron emission oxide cathode: Effects of gas pressure and oxide cathode structure

In present study, DC discharge with high secondary electron emission (SEE) oxide cathodes (NiO/Ni and MgO/NiO/Ni cathode) is characterized with a significant increase in discharge current compared to the one with normal Ni cathode at different gas pressures from 400 to 700 torr. The increase multiple value of the discharge current decreases as the gas pressure increases, which can be related to a relative weakened ion-induced SEE process at high gas pressure. The NiO intermediate layer plays an important role in a sandwich MgO/NiO/Ni cathode for DC discharge, which may be due to the fact that its high resistance favors field-enhanced SEE process. Regardless of the gas pressure, the structural characteristics (thickness and roughness) of oxide layer have an effect on the enhancement of the discharge current, which can be attributed to field-enhanced SEE process. Additionally, the increase in the number of needle electrodes is conducive to the increase of discharge current with oxide cathode, which is related to an increase in the discharge area on the cathode surface according to the discharge images.