Ion-induced Electron Emission Research Articles

Nonlinear change of ion-induced secondary electron emission in the κ-Al2O3 surface charging from first-principle modelling

Abstract Secondary electron emission (SEE) induced by the positive ion is an essential physical process to influence the dynamics of gas discharge which relies on the specific surface material. Surface charging has a significant impact on the material properties, thereby affecting the SEE in the plasma-surface interactions. However, it does not attract enough attention in the previous studies. In this paper, SEE dependent on the charged surface of specific materials is described with the computational method combining a density functional theory (DFT) model from the first-principle theory and the theory of Auger neutralization. The effect of κ-Al2O3 surface charge, as an example, on the ion-induced secondary electron emission coefficient (SEEC) is investigated by analysing the defect energy level and band structure on the charged surface. Simulation results indicate that, with the surface charge from negative to positive, the SEEC of a part of low ionization energy ions (such as Ei = 12.6 eV) increases first and then decreases, exhibiting a nonlinear changing trend. This is quite different from the monotonic decreasing tendency observed in the previous model which simplifies the electronic structure. This irregular increase of the SEEC can be attributed to the lower escaped probability of orbital energy. The results further illustrate that the excessive charge could cause the bottom of the conduction band close to the valence band, thus leading to the decrease of the orbital energy occupied by the excited electrons. The nonlinear change of SEEC demonstrates a more realistic situation of how the electronic structure of material surface influences the SEE process. This work provides an accurate method of calculating SEEC from specific materials, which is urgent in widespread physical scenarios sensitive to surface materials, such as increasingly growing practical applications concerning plasma-surface interactions.

Fully discrete model of kinetic ion-induced electron emission from metal surfaces

Ion-induced electron emission (IIEE) is an important process whereby ions impinging on a material surface lead to net emission of electrons into the vacuum. While relevant for multiple applications, IIEE is a critical process of electric thruster (ET) operation and testing for space propulsion, and, as such, it must be carefully quantified for safe and reliable ET performance. IIEE is a complex physical phenomenon, which involves a number of ion-material and ion-electron processes, and is a complex function of ion mass, energy, and angle, as well as host material properties, such as mass and electronic structure. In this paper, we develop a discrete model of kinetic IIEE to gain a more accurate picture of the electric thruster chamber and facility material degradation processes. The model is based on three main developments: (i) the use of modern electronic and nuclear stopping databases, (ii) the use of the stopping and range of ions in matter to track all ion and recoil trajectories inside the target material, and (iii) the use of a scattering Monte Carlo approach to track the trajectories of all mobilized electrons from the point of first energy transfer until full thermalization or escape. This represents a substantial advantage in terms of physical accuracy over existing semi-analytical models commonly used to calculate kinetic IIEE. We apply the model to Ar, Kr, and Xe irradiation of W and Fe surfaces and calculate excitation spectra as a function of ion depth, energy, and angle of incidence. We also obtain minimum threshold ion energies for net nonzero yield for each ion species in both Fe and W and calculate full IIEE yields as a function of ion energy and incidence angle. Our results can be used to assess the effect of kinetic electron emission in models of full ET facility testing and operation.

An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes

The ignition process of a pulse modulated capacitively coupled argon discharge driven simultaneously by two radio frequency voltages [12.5 MHz (high frequency) and 2.5 MHz (low frequency, LF)] is investigated by multifold experimental diagnostics and particle in cell / Monte Carlo collision simulations. In particular, (i) the effects of the LF voltage amplitude measured at the end of the pulse-on period, VL,end , on the spatiotemporal distribution of the electron impact excitation rate determined by phase resolved optical emission spectroscopy, and (ii) the electrical parameters acquired by analyzing the measured waveforms of the plasma current and voltage, are studied. Computed electrical parameters and spatio-temporal excitation maps show a good qualitative agreement with the experimental results. Especially, various breakdown mechanisms are found at different VL,end . At low values of VL,end , the ‘RF-avalanche’ mode (volume process) dominates the electron multiplication process. By increasing VL,end , the ionization caused by the volume electrons is suppressed and the electron loss at the electrodes is enhanced, leading to a delayed ignition. At higher values of VL,end , the avalanche ionization is significantly enhanced by ion-induced secondary electron emission at the electrodes, so that the ignition is significantly advanced.

Cylindrical hot cathode ionisation gauge – The concept and simulations

A novel design of an ionisation vacuum gauge is presented, aiming to achieve predictable sensitivity and high accuracy in high and the ultra-high vacuum range. The proposed design features a belt-like electron beam emitted from a linear filament, following a circular trajectory between two cylindrical electrodes, resembling a cylindrical analyser. The proposed design offers several key upsides: a precisely defined electron beam trajectory with reduced susceptibility to path variations, effective electron collection in a Faraday cup able to contain secondary emissions and backscattered electrons, and the inclusion of a suppressor grid in front of the ion collector to eliminate ion-induced secondary electron emission. These features are expected to secure high stability of the gauge and the low pressure limit. An in-depth description of the design is presented, along with the discussions on simulations of the key components that provide the improved performance.

Pulsed photoemission induced plasma breakdown

This article characterises the effects of cathode photoemission leading to electrical discharges in an argon gas. We perform breakdown experiments under pulsed laser illumination of a flat cathode and observe Townsend to glow discharge transitions. The breakdown process is recorded by high-speed imaging, and time-dependent voltage and current across the electrode gap are measured for different reduced electric fields and laser intensities. We employ a 0D transient discharge model to interpret the experimental measurements. The fitted values of transferred photoelectron charge are compared with calculations from a quantum model of photoemission. The breakdown voltage is found to be lower with photoemission than without. When the applied voltage is insufficient for ion-induced secondary electron emission to sustain the plasma, laser driven photoemission can still create a breakdown where a sheath (i.e. a region near the electrode surfaces consisting of positive ions and neutrals) is formed. This photoemission induced plasma persists and decays on a much longer time scale ( s) than the laser pulse length ( ps). The effects of different applied voltages and laser energies on the breakdown voltage and current waveforms are investigated. The discharge model can accurately predict the measured breakdown voltage curves, despite the existence of discrepancy in quantitatively describing the transient discharge current and voltage waveforms.

Magnetic confinement less microwave discharge gridded ion thruster

A watt-level microwave discharge is induced without magnetic confinement for a high-precision gridded ion thruster, making use of a coaxial transmission line resonator. The thruster is characterized by performance measurements and plasma diagnosis, and a description of the operating mechanism of this thruster is given in this paper. A Faraday probe and a retarding potential analyzer are employed for the diagnosis. The results show that the plume divergence increases due to the electric field formed between the plume and the ion-induced electron emission cathode. A discharge mode transition is found during the increase of the microwave power, in which the bulk heating mode is converted to the surface heating mode. The magnetic-less microwave discharge gridded ion thruster performs a continuously adjustable thrust range of 5–115 μN and a highest total efficiency of 17.2%. Compared to the common ECR ion thruster, this thruster is free from magneto-static interference on the instruments and the additional magnetic momentum on the spacecraft.

Dimensional analysis on microscale gas breakdown with electric field nonuniformity and positive space charge effects

A dimensional method was employed to evaluate the microscale gas breakdown characteristics at atmospheric pressure, resulting in a universal breakdown curve applicable to different types of gases (e.g., Ar, Xe, Ne, and N2). As the gap distance decreases, the breakdown mode transitions from ion-induced secondary electron emission to the field emission regime. In the field emission regime, the positive space charge effect becomes more significant. We discovered that incorporating the positive space charge effect in the field emission regime can be achieved by modifying the local electric field enhancement factor β. Consequently, we propose an effective electric field enhancement factor, βeff, which scales linearly with β, to accurately reproduce the breakdown curve while considering the positive space charge effect. This proposed approach significantly simplifies the numerical model. Additionally, we examined the effects of gas pressure, gap distance, cathode properties (e.g., work function and secondary electron emission coefficient), and electric field nonuniformity.

Secondary electron emission from magnetron targets

Ion-induced secondary electron emission of surfaces occurs in all gas discharges which have contact to surfaces such as electrodes or chamber walls. These secondary electrons (SEs) play an important role, for instance, in the performance of DC discharges, RF discharges and magnetron sputtering discharges. SE generation can be separated into potential electron emission (PEE) due to the neutralization of the incident ion upon impact and kinetic electron emission (KEE) due to the electronic stopping of the penetrating ion in the solid. SE due to neutralization is usually described by Auger processes and the density of states of the electrons in the solid, whereas KEE scales with the electronic stopping of the ion in the solid, as being calculated by ion collision simulations. The measurement of the energy distribution of the SEs of three metals (Al, Ti, Cu) and their oxides reveals the occurrence of Auger peaks, which are not reflected by standard models such as the Hagstrum model. Instead, in this paper, a model is proposed describing these Auger peaks by Auger neutralization of holes created by the collision cascade of the incident ion. This shows decent agreement. The contribution of Auger peaks in the metals Al and Ti is very significant, whereas it is negligible in the case of Cu. The implication of these energy distributions to the performance of magnetron sputtering discharges is discussed.

Application of optical emission spectroscopy to predict the composition of films during reactive magnetron sputtering of Ti-Al composite targets

The processes of reactive magnetron sputtering of Ti-Al composite targets with different Al/Ti ratios have been studied. The dependences of the deposition rate, discharge voltage, elemental composition, and intensity of the control lines of optical plasma radiation on the oxygen concentration in the Ar/O2 gas mixture are established. It is shown that during reactive sputtering of Ti-Al composite targets, the discharge voltage is determined by the effective ion-induced secondary electron emission coefficient (SEEC) which depends on the area occupied by metals on the target, the degree of their oxidation, and the SEEC of these metals and their oxides. The rate of the deposition of TixAl1-xOy films in the metallic and transition sputtering modes increases proportional to the concentration of Al in the target, but the relative concentration of metals in the deposited films depends on the oxygen concentration in the Ar/O2 gas mixture and is determined by the reactivity of the target materials. It has been shown by optical emission spectroscopy (OES) that the ratio of the atomic concentrations of Al and Ti in deposited TixAl1-xOy films unambiguously depends on the ratio of the intensity of the control optical lines of aluminum AlI and titanium TiI in plasma. This makes it possible to use the OES method to predict the content of metals in a film during reactive magnetron sputtering of Ti-Al targets.

Effect of molecular axis orientation of 3.6 MeV Si2+ projectiles on the ion-induced secondary electron emission from a carbon foil

We study ion-induced secondary electron emission from solid surfaces. This work focuses on the dependence of the energy distribution of secondary electrons on the orientation of Si-dimers impinging on thin carbon foils. The orientation was determined by the foil-induced Coulomb explosion method. Furthermore, the electron energy was measured with a retarding field analyzer. The correlation between the electron energy distribution and the cluster orientation was obtained through simultaneous measurements. A comparison of the electron energy distribution for parallel and perpendicular orientations indicated that the electron yields at an energy below 20 eV are lower for parallel orientation. This reduction can be explained by the orientation dependence of the energy loss of Si2+ in carbon. It was suggested that the orientation effect is due to the distant collision between the cluster and the target atom, in which low-energy electrons are produced.

Ion-induced electron emission by keV-range energy indium ions: Influence of material and geometry

This work provides measurements of the ion-induced electron emission yield caused by keV-range energy indium ions (3–8 keV). In our experiment, the ion sources, fueled with indium, are based on the working principle of field-emission electric propulsion (FEEP) technologies. The measured yields are given for different material properties (plain structure vs foam) and geometries (flat surface vs conical). Study outcomes show that electrons induced by keV-range indium ions can lead to overestimating the measured ion current by 30%–200% depending on the collector materials and geometry. We spotlighted that molybdenum, tungsten, and stainless steel 316L have relatively low yields compared to aluminum 2017A. Moreover, it is possible to lower down a specific material yield by two-thirds when using a foam structure. Finally, it is shown that off-axis ion influence on a collector increases the resulting electron emission yield. In the case of an indium-FEEP thruster, ion-induced electron emissions are a major perturbation when measuring ion current. Mainly, due to the energy range of ions studied, yields retrieved are orders of magnitudes larger than what is usually measured when studying the plume of an electrostatic electric propulsion system. It is, therefore, strongly recommended to use a so-called Faraday cup to study the ion beam from an indium-FEEP thruster as the probe’s close architecture allows us to greatly mitigate these perturbations.

Ion-induced electron emission cathode for a micro-newton HEMP thruster

An ion-induced electron emission cathode is applied for the first time in micro electric propulsion devices. In this investigation, ion-induced electron emission is operated on an annular LaB6 emitter for the neutralization and ion extraction of a microwave discharge HEMP Thruster (High Efficiency Multi-staged Plasma Thruster). A plume plasma diagnosis is performed with a Faraday probe and a retarding potential analyzer to analyze the discharge characteristics and plasma parameters. The results show that the ion-induced electron emission cathode can provides an emission current of over 0.4 mA. Compared with the condition with a thermionic cathode, there is a reduction in the thruster extracted ion current due to the deficiency of the emission current. The emission current shows different trends over anode voltage in different position configurations, which are affected by the incident ion flux and ion energy. Since the ion-induced electron emission cathode is free of power supply and propellant, it is of significant potential for low-power electric propulsion systems.

A velocity map imaging spectrometer for measuring absolute differential cross sections for ion-induced electron emission from molecules.

In this paper, we present a newly developed crossed beam experimental setup that utilizes the velocity map imaging (VMI) technique to simultaneously measure both the kinetic energy and emission angle of electrons emitted from atoms or molecules upon ion collision. The projectile ion beam with keV to MeV kinetic energy orthogonally crosses the neutral target beam produced by an effusion cell. The emitted electrons are extracted and analyzed by a multi-electrode VMI spectrometer. By monitoring the target density, the projectile ion beam intensity, and the beams' overlap, we are able to measure absolute differential cross sections for collision-induced electron emission from molecules. The characterization of the setup and the methodology will be presented as well as first results for electron emission from uracil upon 0.98 MeV/u 12C4+ collision.

Ion-induced electron and hydrogen ions emission of lead-bismuth silicate glass by ToF

A micro-channel Plate (MCP) is a continuous photo-electron multiplier, which has been widely used in the field of particle detectors and low-light night vision imaging devices. The electrons produced by particles collision from the incident end of MCP constitute the useful signal, while the electrons and negative ions produced by collision of ions formed by ionizing gas molecules are considered noise. To reduce the noise from ion collisions, it is important to identify the electron and negative ion emissions caused by collision of unexpected ion. In this paper, the electron and hydrogen ion emissions caused by 1.5MeV Au2+ were analyzed for the cases of acid-etched, alkali-etched, and hydrogen reduced lead-bismuth silicate glass (LBSG). The Time of Flight (ToF) method was used to detect the electron and hydrogen ion emission yields of LBSG. Hydrogen reduction significantly increases the yield of ion-induced electron and negative ions, and the alkali treatment gets the higher yield compared to acid treatment. It is proved that the ToF method is feasible to detect the ion-induced negative particles emission and would be more effectively if the accumulation of positive charges is avoided. The results are valuable not only for noise analysis and manufacturing parameters optimization of low-noise and high-gain MCP, but also as a reference for preparation of new-type micro-channels and investigation on the electron emission properties of glass for space.

Revisiting the numerical stability/accuracy conditions of explicit PIC/MCC simulations of low-temperature gas discharges

Particle-in-cell (PIC) with Monte Carlo collisions is a fully kinetic, particle based numerical simulation method with increasing popularity in the field of low temperature gas discharge physics. Already in its simplest form (electrostatic, one-dimensional geometry, and explicit time integration), it can properly describe a wide variety of complex, non-local, non-linear phenomena in electrical gas discharges at the microscopic level with high accuracy. However, being a numerical model working with discretized temporal and (partially) spatial coordinates, its stable and accurate operation largely depends on the choice of several model parameters. Starting from four selected base cases of capacitively coupled, radio frequency driven argon discharges, representing low and intermediate pressure and voltage situations, we discuss the effect of the variation of a set of simulation parameters on the plasma density distribution and the electron energy probability function. The simulation parameters include the temporal and spatial resolution, the PIC superparticle weight factor, as well as the electron reflection and the ion-induced electron emission coefficients, characterizing plasma–surface interactions.

Streamer–surface interaction in an atmospheric pressure dielectric barrier discharge in argon

An atmospheric-pressure dielectric barrier discharge (DBD) in argon is investigated using a time-dependent and spatially two-dimensional fluid-Poisson model in axisymmetric geometry. The focus is on the streamer–surface interaction and the cathode-layer formation during the first discharge event in the single-filament DBD driven by sinusoidal voltage. A characteristic structure consisting of a volume streamer propagating just above the dielectric and simultaneous development of an additional surface discharge near the cathode is observed. The analysis of the electric field, electron production and loss rates, and surface charge density distribution shows that the radial deflection of the volume streamer is driven by free electrons remaining in the volume from the Townsend pre-phase and guided by the radial component of the electric field. The surface discharge occurring between the deflected volume streamer, which acts as virtual anode, and the dielectric surface is governed by ion-induced secondary electron emission and the surface charges accumulated on the dielectric.

Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments

Ion-induced secondary electron emission at a target surface is an essential mechanism for laboratory plasmas, i.e. magnetron sputtering discharges. Electron emission, however, is strongly affected by the target condition itself such as oxidation. Data of oxidized targets, however, are very sparse and prone to significant systematic errors, because they were often determined by modeling the complex behavior of the plasma. Thus, it is difficult to isolate the process of ion-induced electron emission from all other plasma-surface-interactions. By utilizing ion beams, the complex plasma environment is avoided and electron yields are determined with higher accuracy. In this study, ion-induced secondary electron emission coefficients (SEECs) of clean, untreated (air-exposed), and intentionally oxidized copper and nickel surfaces were investigated in such a particle beam experiment. Pristine and oxidized metal foils were exposed to beams of singly charged argon ions with energies of 0.2 keV - 10 keV. After the ion beam treatment, the surface conditions were analyzed by ex-situ x-ray photoelectron spectroscopy measurements. Further, a model for the electron emission of a partly oxidized surface is presented, which is in agreement with the experimental data. It was found, that oxidized and untreated/air-exposed surfaces do not show the same SEEC: for intentionally oxidized targets, the electron yields were smaller by a factor of 2 than for untreated/air-exposed surfaces. SEECs of oxides were found to be between the values for clean and for untreated metal surfaces. Further, the SEEC was at maximum for untreated/air-exposed surfaces and at minimum for clean surfaces; the electron yields of untreated/air-exposed and clean surfaces were in agreement with values reported in the literature.

Ion-Induced Electron Emission and Surface Erosion of Nanostructured Nickel under High-Fluence Irradiation with 30-keV Argon Ions

Ion-Induced Electron Emission and Surface Erosion of Nanostructured Nickel under High-Fluence Irradiation with 30-keV Argon Ions

Polarity dependence of electrical breakdown in argon under a non-uniform electric field

A considerable difference in the breakdown potential of a uniform pressure gas (specifically argon) under an asymmetric non-uniform electric field is observed depending on the polarity of the field. The degree of variation in the breakdown potential between the two polarities can be explained if one assumes a strong variation of the ion-induced secondary electron emission coefficient with the magnitude of the reduced electric field at the cathode. The magnitude of the breakdown potential can be predicted by evaluating the breakdown criterion along multiple field lines if one includes a numerical factor to account for diffusion of electrons out of the preferred breakdown channel.

Computing the Paschen curve for argon with speed-limited particle-in-cell simulation

Upon inclusion of collisions, the speed-limited particle-in-cell (SLPIC) simulation method successfully computed the Paschen curve for argon. The 1D3V simulations modeled an electron cascade across an argon-filled capacitor, including electron-neutral ionization, electron-neutral elastic collisions, electron-neutral excitation, and ion-induced secondary electron emission. In electrical breakdown, the timescale difference between ion and electron motion makes traditional PIC methods computationally slow. To decrease this timescale difference and speed up computation, we used SLPIC, a time-domain algorithm that limits the speed of the fastest electrons in the simulation. The SLPIC algorithm facilitates a straightforward, fully kinetic treatment of dynamics and collisions. SLPIC was as accurate as PIC, but ran up to 200 times faster. SLPIC accurately computed the Paschen curve for argon over three orders of magnitude in pressure.