Hydrogen permeation through Mo and Ni using an atomic hydrogen beam is examined. Different from ion driven permeation (IDP), the hydrogen permeation rate does not show an appreciable spike, keeping the permeation rate at a constant and reproducible value. With increasing temperature, the steady state permeation rate increases but tends to saturate at higher temperatures, while an apparent diffusion coefficient determined from the time transient of the permeation rate is in good agreement with that determined by the gas driven permeation technique over the whole temperature range measured. The present results basically agree with our previous IDP measurement made for a fully annealed specimen and suggest that the diffusion process is the rate determining step, but accompanies the somewhat complex change in surface hydrogen concentration with temperature.