Ion Beam Fabrication Research Articles

Intrinsic supercurrent diode effect in NbSe2 nanobridge

The significance of the superconducting diode effect (SDE) lies in its potential application as a fundamental component in the development of next-generation superconducting circuit technology. The stringent operating conditions at low temperatures have posed challenges for the conventional semiconductor diode, primarily due to its exceptionally high resistivity. In response to this limitation, various approaches have emerged to achieve the SDE, primarily involving the disruption of inversion symmetry in a two-dimensional superconductor through heterostructure fabrication. In this study, we present a direct observation of the supercurrent diode effect in a NbSe2 nanobridge with a length of approximately 15 nm, created using focused helium ion beam fabrication. Nonreciprocal supercurrents were identified, reaching a peak value of approximately 380 μA for each bias polarity at B zmax = ± 0.2 mT. Notably, the nonreciprocal supercurrent can be toggled by altering the bias polarity. This discovery of the SDE introduces a novel avenue and mechanism through nanofabrication on a superconducting flake, offering fresh perspectives for the development of superconducting devices and potential circuits.

Research progress of ultracold ion source

<sec>Nanobeam is an advanced technology for preparing charged ion beams with spot diameters on a nanometer scale, and mainly used for high-resolution and high-precision ion beam analysis, ion beam fabrication and ion beam material modification research. The nanobeam devices play an important role in realizing material analysis, micro/nano fabrication, microelectronic device manufacturing and quantum computing. The high-quality ion source is one of the key components of nanobeam device, the performance of which directly affects the resolution and precision of the nanobeam system. However, the traditional ion source used in this system is limited to available ionic species, large energy spread and complex structure. These issues hinder their ability to meet emerging application scenarios that require multi-ion types and high resolution. This emphasizes the importance of creating newion sources as soon as possible.</sec><sec>With the development of laser cooling technology, ultracold ions with temperatures in the range of mK or even μK can be obtained based on photoionization of cold atoms and laser cooling of ions. The typical characteristics of low temperature and easy operation greatly promote the emergence of ultracold ion sources. The ultracold ions exhibit extremely small transverse velocity divergence, which can significantly enhance the brightness and emittance quality parameters of the ion source, bringing great opportunities for innovating nano-ion beam technology. Therefore, the research on ultracold ion sources is of great significance for achieving high-quality ion sources with higher brightness, smaller size, lower energy dispersion, more diverse ion species, and simplified structure. Here, we introduce the important achievements in basic research and application technology development of magneto-optical trap ion sources, cold atomic beam ion sources, and ultracold single ion sources from the aspects of preparation principles, generation methods, and typical applications, and review the recent research progress of ultracold ion sources. Finally, we provide an outlook on the future development and application prospects of ultracold ion sources.</sec>

Molecular dynamics study of the tensile properties of gold nanocrystalline films irradiated by gallium Ions

Understanding the effects of heavy ion irradiation on the tensile properties of metals at the nanoscale is important for the development of nanomechanical and other nanodevices using focused ion beam fabrication. This is both in terms of achieving the expected performance of designed devices and in potentially exploiting changes in mechanical properties to develop novel device concepts. We report investigation of the tensile properties of gold nanocrystalline films bombarded by high-energy Ga ions using molecular dynamics calculations. Ga ion irradiation leads to multiple grains with the redistribution of the grain boundaries (GBs). Importantly, Ga ion irradiation causes the film to become less ductile and more prone to fracture. The main reason is not surface damage caused by the sputtering effect of high-energy particles, but the convergence of GBs to the surface crater. On the other hand, for porous films with micropores in the GBs, irradiation results in the hardening of film and the ultimate tensile strength is larger than that of unirradiated counterpart.

Cryo-electron tomography on focused ion beam lamellae transforms structural cell biology.

Cryogenic electron microscopy and data processing enable the determination of structures of isolated macromolecules to near-atomic resolution. However, these data do not provide structural information in the cellular environment where macromolecules perform their native functions, and vital molecular interactions can be lost during the isolation process. Cryogenic focused ion beam (FIB) fabrication generates thin lamellae of cellular samples and tissues, enabling structural studies on the near-native cellular interior and its surroundings by cryogenic electron tomography (cryo-ET). Cellular cryo-ET benefits from the technological developments in electron microscopes, detectors and data processing, and more in situ structures are being obtained and at increasingly higher resolution. In this Review, we discuss recent studies employing cryo-ET on FIB-generated lamellae and the technological developments in ultrarapid sample freezing, FIB fabrication of lamellae, tomography, data processing and correlative light and electron microscopy that have enabled these studies. Finally, we explore the future of cryo-ET in terms of both methods development and biological application.

Tuning electrical properties in Ga2O3 polymorphs induced with ion beams

Ion beam fabrication of metastable polymorphs of Ga2O3, assisted by the controllable accumulation of the disorder in the lattice, is an interesting alternative to conventional deposition techniques. However, the adjustability of the electrical properties in such films is unexplored. In this work, we investigated two strategies for tuning the electron concentration in the ion beam created metastable κ-polymorph: adding silicon donors by ion implantation and adding hydrogen via plasma treatments. Importantly, all heat treatments were limited to ≤600 °C, set by the thermal stability of the ion beam fabricated polymorph. Under these conditions, silicon doping did not change the high resistive state caused by the iron acceptors in the initial wafer and residual defects accumulated upon the implants. Conversely, treating samples in a hydrogen plasma converted the ion beam fabricated κ-polymorph to n-type, with a net donor density in the low 1012 cm−3 range and dominating deep traps near 0.6 eV below the conduction band. The mechanism explaining this n-type conductivity change may be due to hydrogen forming shallow donor complexes with gallium vacancies and/or possibly passivating a fraction of the iron acceptors responsible for the high resistivity in the initial wafers.

Ion beam fabrication of an antifouling Pluronic F-108 thin film-based microwell bioplatform for highly resolved cell microarrays

Cell microarray bioplatform have been widely developed for fundamental and advanced biomedical research. However, it is still difficult to achieve site-specific adhesion due to the weak cell repellency of the background regions. Here, a microwell bioplatform with a strong cell-repellent background was newly developed by a sequential ion beam irradiation-induced anchoring and re-irradiation-induced erosion microstructuring of PF-108 thin film on a tissue culture polystyrene (TCPS) substrate. The newly developed bioplatform possesses outstanding optical transparency and well-defined microwells in a variety of sizes and shapes. Its microwells also show cell-adhesiveness (as much as that on the TCPS) with excellent cell-repellency (no cell growth) on the anchored PF-108 film background. As a result, the live-cell culturing of different strains on the developed bioplatform produced two highly resolved cell microarrays (possessing the diverse sizes and shapes corresponding to those of the bioplatform) with a non-specific adhesion-free background. Moreover, different whole-slide GFP and dsRED protein expressions without a non-specific binding background were successfully achieved in the cell microarray. Noticeably, our finding demonstrates that this toxic chemical-free and biocompatible strategy using ion beam-induced solid-state microstructuring provides a non-specific binding-free microwell bioplatform for use in a highly resolved cell microarray for the practical gene expression assay.

A Study on Focused Ion Beam (FIB) Milling Machining and Fabrication Technology of Nano-Scale Diamond Tool for Machining Fine-Patterns in a Free-Form Surfaces.

Recently, the technology of the industry has been increasing for diffractive optical elements, holograms, optical components, and next-generation display components. The advanced high value-added industry is designing fine patterns on ultra-precision optical components and applying them to various industries. In the case of the ultra-fine pattern, a contact-type machining technique is required because it requires a precise pattern in nano-scale units. In this paper, the fabrication technology of ultra-precision diamond which is essential in the ultra-precision processing technology was suggested. The material used in the experiment was a single-crystal diamond tool (SCD), and the equipment for machining the SCD used a focused ion beam (FEI COMPANY, system Nova 600) equipment. The back fire method was applied without metal coating in order to carry out the process study and the focused beam of 30 keV Ga+ ions were carried out processing for various fabrication of diamond cutting tools. As a result of applying the backfire method through the process experiment, the cutting edge width of the ultra-precision diamond tool was verified 275 nm.

Formation of a three-dimensional bottle beam via an engineered microsphere

In this work, we propose a novel approach to produce three-dimensional (3D) optical trapping with sub-wavelength size through an engineered microsphere, under linear polarization states of an incident light. The engineered microsphere is designed to contain the segmented regions of diffractive patterns and made by focused ion beam fabrication. We simulate and experimentally characterize the focus performance of the engineered microsphere. The emitted light field from the exit surface of the engineered microsphere forms a pair of axially arranged focused beams, and they are connected with a continuous optical field embracing a 3D optical null at the center, forming the so-called optical bottle beam. Experimental results and numerical simulation are in good agreement. Such micro-optics can be used for precise and localized optical trapping.

Focused ion beam fabrication of Janus bimetallic cylinders acting as drift tube Zernike phase plates for electron microscopy

Modern nanotechnology techniques offer new opportunities for fabricating structures and devices at the micrometer and sub-micrometer level. Here, we use focused ion beam techniques to realize micrometer-sized Janus bimetallic cylinders acting as drift tube devices, which are able to impart a controlled phase shift to an electron wave. The phase shift results from the presence of contact potentials in the cylinders, in a similar manner to the electrostatic Aharonov–Bohm effect in bimetallic wires. We use electron Fraunhofer interference to demonstrate that such bimetallic structures introduce phase shifts that can be tuned to desired values by varying the dimensions of the pillars, in particular their heights. Such devices are promising for electron beam shaping and for the realization of electrostatic Zernike phase plates (i.e., devices that are able to impart a constant phase shift between an unscattered and a scattered electron wave) in electron microscopy, in particular, cryo-electron microscopy.

Laser and ion beams graphene oxide reduction for microelectronic devices

Reduced graphene oxide (rGO) is a two-dimensional material, which is attracting increasing attention due to its special properties. It can be obtained by laser or ion beam irradiations of pristine graphene oxide (GO). It shows high mechanical resistance, considerable electric and thermal conductivity. All these rGO characteristics together with the high number of molecular species that can be embedded between its layers, make graphene oxide a potential material for electronic sensors or efficient support on which conductive strips, condensers, and micrometric electronic devices can be designed. In particular, as it is described in this paper, it is possible to carry out high spatial resolution lithography in GO by using a focused laser or micro ion beam in order to design macro, micro, and submicron geometrical structures. The use of the reduced graphene oxide for the laser and ion beam fabrication of electrical resistances and capacitances is presented.

Nanoscale mapping of carrier recombination in GaAs/AlGaAs core-multishell nanowires by cathodoluminescence imaging in a scanning transmission electron microscope

Mapping individual radiative recombination channels at the nanoscale in direct correlation with the underlying crystal structure and composition of III–V semiconductor nanostructures requires unprecedented highly spatially resolved spectroscopy methods. Here, we report on a direct one-by-one correlation between the complex radial structure and the distinct carrier recombination channels of single GaAs-AlGaAs core-multishell nanowire heterostructures using low temperature cathodoluminescence spectroscopy directly performed in a scanning transmission electron microscope. Based on an optimized focused ion beam fabrication of the optically active specimen, we directly visualize the radial luminescence evolution and identify four distinct emission lines, i.e., the near band edge and defect luminescence of the GaAs core (819 nm, 837 nm), the emission of the single embedded GaAs quantum well (QW, 785 nm), and the AlGaAs shell luminescence correlated with alloy fluctuations (650–674 nm). The detailed radial luminescence profiles are anticorrelated between QW luminescence and core emission, illustrating the radial carrier transport of the core-shell system. We inspected in detail the low-temperature capture of excess carriers in the quantum well and barriers.

In situ protein micro-crystal fabrication by cryo-FIB for electron diffraction

Micro-electron diffraction (MicroED) is an emerging technique to use cryo-electron microscope to study the crystal structures of macromolecule from its micro-/nano-crystals, which are not suitable for conventional X-ray crystallography. However, this technique has been prevented for its wide application by the limited availability of producing good micro-/nano-crystals and the inappropriate transfer of crystals. Here, we developed a complete workflow to prepare suitable crystals efficiently for MicroED experiment. This workflow includes in situ on-grid crystallization, single-side blotting, cryo-focus ion beam (cryo-FIB) fabrication, and cryo-electron diffraction of crystal cryo-lamella. This workflow enables us to apply MicroED to study many small macromolecular crystals with the size of 2–10 μm, which is too large for MicroED but quite small for conventional X-ray crystallography. We have applied this method to solve 2.5 Å crystal structure of lysozyme from its micro-crystal within the size of 10 × 10 × 10 μm3. Our work will greatly expand the availability space of crystals suitable for MicroED and fill up the gap between MicroED and X-ray crystallography.

Modal Analysis of β−Ga2O3:Cr Widely Tunable Luminescent Optical Microcavities

Optical microcavities are key elements in many photonic devices, and those based on distributed Bragg reflectors (DBRs) enhance dramatically the end reflectivity, allowing for higher quality factors and finesse values. Besides, they allow for wide wavelength tunability, needed for nano-and microscale light sources to be used as photonic building blocks in the micro- and nanoscale. Understanding the complete behavior of light within the cavity is essential to obtaining an optimized design of properties and optical tunability. In this work, focused ion-beam fabrication of high refractive-index contrast DBR-based optical cavities within Ga₂O₃:Cr microwires grown and doped by the vapor-solid mechanism is reported. Room-temperature microphotoluminescence spectra show strong modulations from about 650 nm up to beyond 800 nm due to the microcavity resonance modes. Selectivity of the peak wavelength is achieved for two different cavities, demonstrating the tunability of this kind of optical system. Analysis of the confined modes is carried out by an analytical approximation and by finite-difference-time-domain simulations. A good agreement is obtained between the reflectivity values of the DBRs calculated from the experimental resonance spectra, and those obtained by finite-difference-time-domain simulations. Experimental reflectivities up to 70% are observed in the studied wavelength range and cavities, and simulations demonstrate that reflectivities up to about 90% could be reached. Therefore, Ga₂O₃:Cr high-reflectivity optical microcavities are shown as good candidates for single-material-based, widely tunable light emitters for micro- and nanodevices.

High frequency in situ fatigue response of Ni-base superalloy René-N5 microcrystals

A novel in situ scanning electron microscope (SEM), high frequency fatigue testing methodology is developed using a combination of laser milling, focused ion beam fabrication and nanoindentation. This methodology is used to investigate crack initiation, propagation, fracture, fatigue life, and the mechanical response of microcantilever samples of a Ni-based superalloy (René-N5) under different cyclic strain amplitudes. The crack initiation and propagation in the microcantilever is monitored by observing changes in the beam's dynamic stiffness and continuous SEM imaging. The dynamic stiffness response of the micro-beams exhibits a transition from softening to hardening at a critical strain amplitude of 7×10−3. Theoretical analysis indicates that this transition corresponds to the stress required to shear γ′ precipitates. SEM imaging reveals the evolution of significant extrusions, intrusions, and slip traces during cyclic loading above this critical strain amplitude. Below this strain amplitude, very little surface roughening is observed. In addition, the measured dynamic stiffness is observed to exhibit two regimes of decrease after crack initiation. These two regimes correspond to short and large crack propagation. Finally, an overall increase in fatigue life is observed when comparing to bulk scale experiments on nickel-base superalloys. It is proposed that this is an inherent size effect in the small-volume, single crystal specimens tested.

Micron-Scale Deformation: A Coupled In Situ Study of Strain Bursts and Acoustic Emission.

Plastic deformation of micron-scale crystalline materials differs considerably from bulk samples as it is characterized by stochastic strain bursts. To obtain a detailed picture of the intermittent deformation phenomena, numerous micron-sized specimens must be fabricated and tested. An improved focused ion beam fabrication method is proposed to prepare non-tapered micropillars with excellent control over their shape. Moreover, the fabrication time is less compared with other methods. The in situ compression device developed in our laboratory allows high-accuracy sample positioning and force/displacement measurements with high data sampling rates. The collective avalanche-like motion of the dislocations is observed as stress decreases on the stress-strain curves. An acoustic emission (AE) technique was employed for the first time to study the deformation behavior of micropillars. The AE technique provides important additional in situ information about the underlying processes during plastic deformation and is especially sensitive to the collective avalanche-like motion of the dislocations observed as the stress decreases on the deformation curves.

FIB-fabricated complex-shaped 3D chiral photonic silicon nanostructures.

Technologies capable of fabricating complex shaped silicon metasurfaces attract increasing attention. The focused ion beam fabrication technique is considered traditionally as causing thick damaged layers in silicon resulting in a significant rise of the optical absorption loss. We examine the structure of the FIB-fabricated nanostructures on the silicon-on-sapphire (SOS) platform and its optical characteristics before and after thermal oxidation. We show that being thermally oxidised the FIB-patterned silicon subwavelength nanostructure tends to regain its chiral optical features. The impact of the oxidation process on the silicon nanostructure optical behaviour is discussed.

In-plane and through-plane non-uniform carbon corrosion of polymer electrolyte fuel cell cathode catalyst layer during extended potential cycles

The impact of electrochemical carbon corrosion via potential cycling durability tests mimicking start-stop operation events on the microstructure of the cathode catalyst layer in polymer electrolyte fuel cells (PEFCs) is investigated using focused ion beam (FIB) fabrication without/with the pore-filling technique and subsequent scanning electron microscope (SEM) observations. FIB/SEM investigations without pore-filling reveals that the durability test induces non-uniform cathode shrinking across the in-plane direction; the thickness of the catalyst layer decreases more under the gas flow channel compared to the area under the rim of the flow field. Furthermore, FIB/SEM investigations with the pore-filling technique reveal that the durability test also induces non-uniform cathode shrinking in the through-plane direction; the pores in the area close to the membrane are more shrunken compared with those close to the microporous layer. In particular, a thin area (1–1.5 μm) close to the membrane is found to be severely damaged; it includes closed pores that hinder mass transport through the catalyst layer. It is suggested that uneven carbon corrosion and catalyst layer compaction are responsible for the performance loss during potential cycling operation of PEFCs.

Fabricating waveguide Bragg gratings (WBGs) in bulk materials using ultrashort laser pulses

Abstract Optical waveguide Bragg gratings (WBGs) can be created in transparent materials using femtosecond laser pulses. The technique is conducted without the need for lithography, ion-beam fabrication methods, or clean room facilities. This paper reviews the field of ultrafast laser-inscribed WBGs since its inception, with a particular focus on fabrication techniques, WBG characteristics, WBG types, and WBG applications.

Focused Ion Beam Fabrication of SU-8 Waveguide Structures on Oxidized Silicon

ABSTRACTThis work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.

Ion beam fabrication of aluminum-doped zinc oxide layer for high-performance liquid crystals alignment.

In this paper, a 1.8 keV ion beam (IB) sputtered thin layer of aluminum-doped zinc oxide (AZO) with columnar AZO bumps covering the surface working as an alignment layer for the homogeneous alignment of liquid crystals (LC) is investigated. Bumpy AZO alignment layers in twisted nematic (TN) cells generated larger LC pre-tilt angles and thus enabled accelerated switching of LC, and the highly conductive bumpy AZO thin layers allowed super-fast release of accumulated charges, and led to low residual DC performance. These results indicate the promising applications of AZO bumps layer as alignment layer in LC devices.