Ion Beam Energy Research Articles

Synergy of high-intensity chromium ion implantation and ion beam energy impact on the zirconium alloy surface

The peculiarities and modes of material modification with high-intensity, high-power density ion beams on the irradiated surface are studied for the first time. Chromium ions are implanted into a zirconium alloy using a 25 kW/cm2, 450 μs beam at the pulse repetition rates within 8–35 pps. Every high-energy ion pulse impact is followed by ultrafast cooling of the surface due to heat removal into the target material. Three modes are studied at the temperatures of 580, 700, and 900 °C with an additional pulsed heating. An increase in the average target temperature from 580 to 700 °C within 1 h at the same pulse power density allows increasing the depth of chromium ion alloying from 1.5 to more than 7 μm. The use of ultrafast cooling of the Zr1%Nb alloy surface offers a grain size reduction from a few μm to approximately 50–250 nm, without any microstructural changes throughout the sample volume. An inhomogeneous chromium ion distribution over the target surface and depth is observed.

Nanodosimetric investigation of the track structure of therapeutic carbon ion radiation part 1: measurement of ionization cluster size distributions

At the Heidelberg Ion-Beam Therapy Center, the track structure of carbon ions of therapeutic energy after penetrating layers of simulated tissue was investigated for the first time. Measurements were conducted with carbon ion beams of different energies and polymethyl methacrylate (PMMA) absorbers of different thicknesses to realize different depths in the phantom along the pristine Bragg peak. Ionization cluster size (ICS) distributions resulting from the mixed radiation field behind the PMMA absorbers were measured using an ion-counting nanodosimeter. Two different measurements were carried out: (i) variation of the PMMA absorber thickness with constant carbon ion beam energy and (ii) combined variation of PMMA absorber thickness and carbon ion beam energy such that the kinetic energy of the carbon ions in the target volume is constant. The data analysis revealed unexpectedly high mean ICS values compared to stopping power calculations and the data measured at lower energies in earlier work. This suggests that in the measurements the carbon ion kinetic energies behind the PMMA absorber may have deviated considerably from the expected values obtained by the calculations. In addition, the results indicate the presence of a marked contribution of nuclear fragments to the measured ICS distributions, especially if the carbon ion does not cross the target volume.

Development and Testing of a Helicon Plasma Thruster Based on a Magnetically Enhanced Inductively Coupled Plasma Reactor Operating in a Multi-Mode Regime

A disruptive Electric Propulsion system is proposed for next-generation Low-Earth-Orbit (LEO) small satellite constellations, utilizing an RF-powered Helicon Plasma Thruster (HPT). This system is built around a Magnetically Enhanced Inductively Coupled Plasma (MEICP) reactor, which enables acceleration of quasi-neutral plasma through a magnetic nozzle. The MEICP reactor features an innovative design with a multi-dipole magnetic confinement system, generated by neodymium iron boron (NdFeB) permanent magnets, combined with an azimuthally asymmetric half-wavelength right (HWRH) antenna and a variable-section ionization chamber. The plasma reactor is followed by a solenoid-free magnetic nozzle (MN), which facilitates the formation of an ambipolar potential drop, enabling the conversion of electron thermal energy into ion beam energy. This study explores the impact of an inhomogeneous magnetic field on the heating mechanism of the HPT and highlights its multi-mode operation within a pulsed power range of 200 to 500 W of RF. The discharge state, characterized by high-energy electron-excited ions and low-energy excited neutral particles in the plasma plume, was analyzed using optical emission spectroscopy (OES). The experimental testing campaign, conducted under pulsed power excitation, reveals that, as RF input power increases, the MEICP reactor transitions from inductive (H-mode) to wave coupling (W-mode) discharge modes. Spectrograms, electron temperature, and plasma density measurements were obtained for the Helicon Plasma Thruster within its operational envelope. Based on OES data, the ideal specific impulse was estimated to exceed 1000 s, highlighting the significant potential of this technology for future LEO/VLEO space missions.

High voltage determination and stabilization for collinear laser spectroscopy applications.

Fast beam collinear laser spectroscopy is the established method to investigate nuclear ground state properties such as the spin, the electromagnetic moments, and the charge radius of exotic nuclei. These are extracted with high precision from atomic observables, i.e., the hyperfine splitting and the isotope shift, which become possible due to a large reduction of the Doppler broadening by compressing the velocity width of the ion beam through electrostatic acceleration. With the advancement of experimental methods and applied devices, e.g., to measure and stabilize the laser frequency, the acceleration potential became the dominant systematic uncertainty contribution. To overcome this, we present a custom-built high-voltage divider, which was developed and tested at the German metrology institute, and a feedback loop that enabled collinear laser spectroscopy to be performed at a 100-kHz level. Furthermore, we describe the impact of field penetration into the laser-ion interaction region. This affects the determined isotope shifts and hyperfine splittings if Doppler tuning is applied, i.e., the ion beam energy is altered instead of scanning the laser frequency. Using different laser frequencies that were referenced to a frequency comb, the field penetration was extracted laser spectroscopically. This allowed us to define an effective scanning potential to still apply the faster and easier Doppler tuning without introducing systematic deviations.

Experimental Evaluation of Higher Order Stability Zones Using a Digitally Operated Quadrupole Mass Filter.

Recent improvements to the comparison-based method of digital waveform generation increased the reproducibility of the waveforms so that the higher-order Mathieu stability zones can be accessed reliably. Digitally driven quadrupole mass filters access these zones using a fixed AC voltage and rectangular waveforms that are defined by a duty cycle. In this context, the duty cycle is the fraction of the waveform period where the waveform remains in the high state. Because digitally driven quadrupoles navigate stability using a duty cycle, there is no need to apply a resolving DC offset between electrode pairs. Accessing the higher stability zones using a conventional resonantly tuned RF requires the use of thousands of AC and DC voltages making the mode of operation less accessible with these devices. Stability zones higher than (1,1) and (2,1) have theoretical resolving powers that are on the order 1,140 and 3,447 at fwhm which drives efforts to practically access these operational conditions. Accessing these zones digitally requires the use of extremely precise waveforms. In a previous effort, waveform generation produced waveforms to reliably access the (1,1) and (2,1) zones without impacting performance. However, recent work found more improvement was needed to reliably access neighboring higher stability zones. Derived from that work, it was determined that a waveform resolution of ∼10 ppm or less was needed to reliably access the (3,1) and (3,2) zones. The present work utilized digital waveforms that achieve this level of precision to experimentally access and characterize attributes of the (3,1) and (3,2) zones. This work dives into the investigation of different beam energies to overcome the destabilizing fringing fields, improve transmission, and their overall effect on the experimental resolving power and signal-to-noise. In addition, the AC voltage of the driving RF was varied to understand the effects on the initial ion beam energy that is needed to achieve balanced separation and how the overall signal-to-noise is affected. Lastly, an assessment was made on the effects of the temporal parameters of a digital mass scan on peak sensitivity, peak fidelity, and overall duration for a scan.

Role of ion-beam current and energy for nano-scale joining of copper nanowires: Experimental and theoretical study

Copper nanowires (Cu NWs) are popular potential building blocks of various interconnecting components, microscale circuits, and nanoelectronics. Making interconnects at the nanoscale is still an open problem, and various methods have been explored during the past decades. While ion beam joining has been known for quite some time, the beam parameter-dependent processes leading to joining is yet to be understood in detail. A low-energy (5 keV) and broad argon ion beam is unable to induce joining among the Cu NW mesh, at the low ion currents (<400 nA). However, when the ion current was elevated to 1 µA at the same energy, a large-scale joining was observed. We developed a 3D finite volume model for heat transfer and Joule heating-based melting, which successfully explains the ion current-induced joining. When the current is increased to a significantly high level, the network fragments into smaller copper nanoparticles due to the heat produced. On the other hand, at higher argon ion energy (200 keV) a large-scale joining is observed even at small (<400 nA) beam current. A state-of-the-art, Monte Carlo-based TRI3DYN simulation predicted the role of recoils, redeposition, and ion beam mixing in such joining process at high ion energy, which is mostly due to elastic collisional consequences. Such ion current-induced nanowelded copper mesh-coated PET substrate shows good transmission in the optical range of wavelengths and a notable decrease in the sheet resistance is observed.

Microstructural characterization of nanocrystalline hexagonal boron nitride thin films deposited by ion-beam assisted pulsed laser deposition

In recent years, hexagonal boron nitride (hBN) thin films have garnered considerable attention across various fields, including electronics, anti-corrosion coatings, tribology, and optoelectronics. Boron nitride films produced via physical vapor deposition typically result in amorphous microstructure and suffer from issues such as cracking and delamination. The synthesis of crystalline hBN thin films typically demands higher processing temperatures, toxic gas precursors, and catalytic metal substrates. Hence, this research aims to produce crystalline hBN films at relatively lower temperatures without toxic gas precursors. hBN thin films were deposited on silicon (100) substrates at 600 °C using an ion beam-assisted pulsed laser deposition. The study explores the microstructural evolution and surface morphology of deposited films under different Ar:N2 gas mixtures (ranging from 0% to 100% N2) and varying ion beam energies (from 0 to 400 eV). Microstructural analysis showed the hBN nanocrystallite formation in films deposited with N2 content of 50% and higher and an ion beam energy equal to or exceeding 200 eV, and the crystallite size was measured to be ∼24±8 nm. Raman spectra, grazing incidence X-ray diffraction, and transmission electron microscopy confirm the presence of hBN phase in as-deposited films. Films deposited with an N2 content of ≥50% and ion beam energy of ≥200 eV showed improved crystallinity, increased island size, and density of hBN nanocrystallites. The addition of ion bombardment comparatively made films rougher due to grain growth and formation of larger hBN nanoislands, and surface roughness increased with an increase in N2 content and ion beam energy. The results indicate that the ion beam bombardment facilitates nanograin formation and improves the crystallinity of hBN films even at lower deposition temperatures, offering the promise of advancing their use into practical applications across various fields.

Patterning of COC Polymers by Middle‐Energy Ion Beams for Selective Cell Adhesion in Microfluidic Devices

AbstractMicrofluidic devices play a crucial role in advanced cell biology applications, including cell separations, cultivations, migration and interaction studies, diagnostic devices, and organ‐on‐chips. One of the frequent purposes of such devices is the ability to selectively address the attachment of cells at defined locations on the surface. This study explores the application of middle‐energy carbon, oxygen, and nitrogen ions to locally modify the surface of cyclic olefin copolymer (COC) thermoplastic material, allowing selective cell growth on patterned polymer surfaces. The investigation considers ion element type, ion beam energy, and ion irradiation fluence, analyzing their influence on the modification effect. Characterization of the modified surfaces involves various surface‐analytical methods such as contact angle, energy dispersive spectroscopy (SEM‐EDX), atomic force microscopy (AFM), x‐ray photoelectron spectroscopy (XPS), rutherford backscattering spectrometry (RBS), and elastic recoil detection analysis (ERDA). The study extends to practical aspects, with a representative cancer cell line, MCF‐7, grown on the patterned surface to evaluate the degree of selective attachment. Additionally, the stability of the irradiated patterns is tested under elevated temperatures beyond the glass transition temperature (Tg), demonstrating the compatibility of the approach with hot embossing technology. The findings underscore the potential of ion beam treatment for COC in cell‐biology‐related applications, offering insights into surface modification techniques for enhanced functionality in microfluidic devices.

Reduction of graphene oxide film on glass substrate using argon ion beam irradiation: A systematic study with X-ray photoelectron spectroscopy analysis

In our research, we explored a novel and eco-friendly method of utilizing argon ion beam irradiation to thin down graphene oxide (GO) films on glass substrates, aiming to enhance their mechanical, electrical, and optical properties. By employing high-energy argon ions, we developed a groundbreaking, environmentally conscious technique that not only permits micro-patterning directly on GO films but also facilitates concurrent material characterization. Varying the energy levels (1000, 2000, and 3000 eV) and exposure times (0 to 80 s, in 20-second increments), we meticulously examined the impact on carbon and oxygen atomic ratios of the GO using X-ray photoelectron spectroscopy (XPS) for in-depth analysis. Our findings revealed that increasing the argon ion beam energy to 2000 eV and extending the irradiation time significantly reduced oxygen content while increasing the carbon atomic ratio, indicating effective GO surface reduction. However, further increasing the energy to 3000 eV resulted in a slight increase in oxygen content and a decrease in the carbon atomic ratio compared to the energy 2000 eV, suggesting a decrease in reduction efficacy. This method's simplicity, eco-friendliness, and precision mark a significant advancement over traditional chemical reduction methods, offering a solid understanding of high-energy argon ion beam irradiation's effectiveness in GO reduction. Our comprehensive analysis, including survey and high-resolution C 1s and O 1s XPS spectra, highlights the surface chemistry modifications induced by this treatment, demonstrating the versatility of argon ion beam irradiation in producing reduced graphene oxide (rGO) for various applications.

Signal oscillations in helium scattering by bismuth atoms in the low energy range

Low Energy Ion Scattering (LEIS) analysis of bismuth selenide (Bi2Se3), a strong 3D topological insulator, revealed oscillations of the detected signal in dependence on primary ion beam energy. Bismuth is a part of the group of elements where oscillatory behaviour was already noticed, such as gallium, indium, or lead. Generally, it is ascribed to quasi-resonant charge exchange processes between primary ion and target atom. Moreover, clear differences exist between data for target atoms in elemental form and for atoms in compound form. A study of Bi signal yields in different material forms was performed for primary He+ projectiles within the energy range from 0.50 to 6.00 keV. A foil of pure Bi, Bi2Se3, Bi2O3 and thin Bi films deposited on several substrates (SiO2, CuOx) by Molecular Beam Epitaxy were analysed. The energy shift in the position of oscillations was observed when the oxygen atoms were present at the surface and bonded to Bi atoms. A description of the Bi ion yield variation is provided to facilitate the quantification process in LEIS.

A study on the fabrication procedure for a high-D/Ti-ratio-deuterated-titanium film on the disk-type neutron generator target

This study aims to present thin film deposition and deuterium adsorption procedure to fabricate disk-type targets with high D/Ti values for a neutron generator and increase their lifespan. The neutron target consists of a titanium thin film with hydrogen loading, and a copper substrate for heat removal. We optimized the incident deuterium ion beam energy and thin film thickness using Geant4 simulations. Additionally, we calculated the expected neutron yield under the optimized conditions. The hydrogen adsorption conditions were optimized by comparing the H/Ti results as per hydrogen adsorption temperature and loading time using titanium foils of different thickness values. Hydrogen (or deuterium) adsorption ratio is strongly influenced by the surface condition and the deposition conditions of the thin film. A titanium film was deposited in various conditions of plasma DC power and substrate temperature. The quality of the thin film was evaluated through surface roughness evaluation and thin film sheet resistance for each deposition conditions. Subsequently, the hydrogen adsorption results were compared according to the quality of the thin titanium films, and the thin titanium film deposition conditions with the highest hydrogen adsorption ratio were confirmed. The selected conditions were applied to conduct deuterium adsorption. In conclusion, this study underscores the critical relationship between thin film quality and hydrogen (or deuterium) adsorption ratio, reinforcing the importance of optimizing thin film deposition parameters for the design of neutron generator disk-type targets with high quality of film and extended lifespan.

Super-heavy ion beams generated by a multi-PW femtosecond laser

The numerical investigations into the acceleration of superheavy ions driven by a multi-PW, 30 fs laser pulse with a peak intensity from 5 × 1022 to 2 × 1023 W/cm2 were carried out using an advanced 2D3V particle-in-cell code. The properties of laser-accelerated Au, Pb, Bi, and U ion beams, such as ionization and ion energy spectra, ion beam energies, angular distributions of the beam fluence, the ion pulse shapes, and peak intensities, were examined and compared. It was found that for a laser intensity of 1023 W/cm2, a common feature of the Au, Pb, Bi, and U ion beams was the dominance in the beam of Ne-like ions that carry the vast majority (≥90%) of the energy of all accelerated ions and have by far the highest mean and maximum ion energy. The Ne-like ion beams for Au, Pb, Bi, and U have almost identical angular fluence distributions and ion pulse shapes, as well as peak fluencies and intensities. However, the dependence of the parameters of the Ne-like ion beam on the laser intensity is different for ions with different masses. In the considered laser intensity range, the heaviest ions (U ions) ensured the achievement of the highest beam parameters, such as the mean and maximum ion energy, the ion beam energy, or the laser-to-ions energy conversion efficiency. The mono-charge superheavy ion beams demonstrated in this paper open the prospect for novel applications of heavy ions in high energy-density physics, nuclear physics, and possibly in other fields.

Effect of 105 MeV gold ion irradiation on dielectric properties of PVC/PVDF@BaZrO3 nanohybrid thin film

The PVC/PVDF@BaZrO3 nanohybrid thin films were prepared by solution grown method. The dielectric constant of the films was higher due to BaZrO3 incorporation in the PVC/PVDF matrix. The PVDF and PVC/PVDF nanohybrid films were irradiated with 105 MeV Au2+ ion beam under vacuum condition at room temperature with two ion fluence. The irradiated thin film of PVC/PVDF@BaZrO3 exhibits relatively low dielectric constant with low loss at different temperature because of thermodynamic stability of β-phase. However, almost complete amorphization was observed in BaZrO3 filler in PVC/PVDF@BaZrO3 nanohybrid samples. After being irradiated with a 105 MeV Au2+ ion beam, the (ϵ′) dielectric constant, FTIR and SEM parameters were used to evaluate changes in dielectric and structural properties for all the samples. In FTIR spectra, new peaks appeared at 1705 cm−1, disappeared or minutely shifted due to high energy of ion beam. It is interesting to note that BaZrO3 phase becomes amorphized through 105 MeV Au2+ ion irradiation that causes an increased dielectric constant along with cross-linking effect of nanohybrid films.

Spectroscopic ellipsometry modelling of Cr+ implanted copper oxide thin films

In this paper, we present modelling of spectroscopic ellipsometry data. The measured samples are thin films of copper oxides modified with the ion implantation method. The samples were prepared using reactive magnetron sputtering. Thin films of CuO and Cu4O3 were deposited and subjected to Cr ion implantation with an energy of 15 keV and a dose of 5 × 1016 ions/cm2. The decrease in crystallinity of the thin film as a result of the implantation was inspected with X-ray diffraction measurements. The implantation of Cr+ ions was simulated using the Stopping and Range of Ions in Matter software by Ziegler and Biersack. Ion beam energy of 15 keV was simulated to estimate the distribution of Cr ions in the copper oxides thin films. Optical parameters, such as refractive index, extinction coefficient, and absorption coefficient of the thin films, were investigated with spectroscopic ellipsometry. Multilayered models based on Tauc–Lorentz oscillators were developed for both oxides. Analysis of the optical properties showed that the ion implantation with Cr decreased the absorption of copper oxides thin films and the modelling proved that the material properties of top layers changed the most.

Effects of deposited particle energy on the structure and properties of diamond-like carbon films

Using plasma-enhanced chemical vapor deposition (PECVD), a series of diamond-like carbon (DLC) films were prepared on YG8 carbide substrate by changing the enhancement mode and the negative bias voltage of the substrate. The structure and properties of the deposited films were tested by a series of analytical and testing instruments.During the deposition of DLC films, the ability of electrons to collide and ionize the gas is enhanced by increasing the number of electrons and extending the movement path of electrons, which is called electron-assisted enhanced gas ionization. Four different experimental modes (A mode, B mode, C mode, D mode) were set up. Different experimental modes have different degrees of electron-assisted enhancement ability of gas ionization, so different experimental modes are called different enhancement modes. The ions ionized by the electrons participate in the deposition of the film under the traction of the negative bias voltage of the substrate. The results show that: when depositing diamond-like carbon films, the energy of the ion beam is indirectly affected by electron collisions in different enhancement modes and directly affected by the negative bias voltage of the substrate. The higher the enhancement mode, the higher the ion beam energy. The higher the substrate negative bias voltage, the higher the ion beam energy generated by gas source discharge. Under the dual action of enhancement mode and substrate negative bias voltage, the total energy of ions involved in deposition should not be too high or too low, and the synergy of the two makes the properties and quality of the deposited film reach a better value. For industrial large-scale production of tool protection film for cutting aluminum alloy, it is more suitable for high enhancement mode and low negative bias voltage production.Through a series of process optimization to improve and enhance the comprehensive performance of DLC film, it is further applied to the actual processing application field, which has great industrial and social value to realize the large-scale application of DLC film in the field of hard to cut metal processing.

Development of a 100 ps TDC based on a Kintex 7 FPGA for the high granular neutron time-of-flight detector for the BM@N experiment

The prototype of a TDC board has been developed for the new high granular time-of-flight neutron detector (HGND). The board is based on the standard LVDS 4x asynchronous oversampling using the xc7k160 FPGA with a 100 ps bin width. The HGND is being developed for the BM@N (Baryonic Matter at Nuclotron) experiment to identify neutrons and to measure their energies in heavy-ion collisions at ion beam energies up to 4 A GeV. The HGND consists of about 2000 scintillator detectors (cells) with a size of 40×40×25mm3 and light readout with EQR15 11-6060D-S photodetectors. To measure the time resolution of the scintillator cells, the two-channel FPGA TDC board prototype with two scintillator cells was tested with an electron beam of “Pakhra” synchrotron at the LPI institute (Moscow, Russia). The measured cell time resolution is 146 ps, which is in a good agreement with the 142 ps time resolution measured with a 12-bit @ 5 GS/s CAEN DT5742 digitizer. For the full HGND, the TDC readout board with three such FPGAs will read 250 channels. In total, eight such TDC boards will be used for the full HGND at the BM@N experiment.

Guiding as a General Consequence of the Charged Particle Interaction with the Inner Surface of an Insulator Capillary—Guiding of 1 MeV Proton Microbeam through Polytetrafluoroethylene Macrocapillary

The transmission of energetic, 1 MeV proton microbeam through a single, cylindrical shaped, macrometer-sized polytetrafluoroethylene capillary was studied experimentally. The capillary axis was tilted with respect to the axis of the incident ion beam. The tilting, the aspect ratio of the capillary and the small beam divergence disabled the geometrical transmission of the beam through the target. The intensity, energy, deflection and charge state of the transmitted beam were investigated. We found that the pure guided transmission of a MeV/amu energy ion beam is observable. We clearly identified three completely different stages during the guiding process according to the measured energy distribution of transmitted particles. At the beginning the transmission intensity was low and only inelastic contributions with energy lower than 1 MeV were found in the spectrum. Later, in the second stage, the elastic peak appeared and became more and more significant. Finally, when the stable transmission evolved, only the elastic peak was present and the inelastic area was totally absent as a direct consequence of the ion guiding and as a result of the charged particle interaction with a charged inner surface of the insulator capillary.

Influence Mechanism of Magnetic Field and Wave Modes on Helicon Plasma Thruster

The mechanism of energy deposition on a helicon plasma thruster under a focused magnetic field is different with a uniform magnetic field, and energy coupling efficiency has greatly improved. This paper studies the spatial distribution of power deposition under different magnetic field configurations. The results show that the magnetic field configuration can change the spatial distribution of energy deposition. A focused magnetic field configuration can couple more energy on the antenna downstream and reduce energy loss during plasma transport, which leads to improved propellant utilization efficiency and enhanced thruster performance. Then this paper studies the energy coupling efficiency and energy distribution characteristics for ionization and acceleration under different W modes, including W1 and W2. The results show that, in the W1 mode, the energy is mainly focused on ion acceleration, resulting in higher ion beam energy. In contrast, the W2 mode is focused on propellant ionization, resulting in greater efficiency of propellant utilization. The W2 mode demonstrates a higher energy coupling efficiency and has superior thruster performance compared to the W1 mode, with a thrust increase of about 1.6 times. The paper proposes several suggestions to improve the thrust-to-weight ratio and specific impulse of a helicon plasma thruster, which provides theoretical support for engineering applications.

Bismuth, by high-sensitivity low energy ion scattering

Low energy ion scattering is an analytical technique with extreme surface sensitivity. It enables qualitative and quantitative elemental analysis of the outermost atomic layer. Straightforward quantification is possible by using well-defined reference samples, as the measured signal is related to known surface atomic concentration. Bi, like Pb, exhibits strong oscillatory behavior of backscattered ion yield when primary ion beam energy is varied. Here, we present the spectra of bismuth obtained by scattering of 4He+ ions in a wide range of energies (0.5–6.0 keV). These should cover a regularly used range of energies for He analysis and serve as standards or reference spectra for analysis of bismuth if the scattering angle is 145° or similar. For this purpose, high-purity foil cleaned by ion sputtering was used. The sensitivity of the instrument in use (high-sensitivity low energy ion scattering spectrometer) is defined by the 3 keV 4He+ spectrum of copper. The related atomic sensitivity and relative sensitivity factors are determined.

Settings of a monolithic piezoelectric filter on bulk acoustic waves by ion-beam etching

The process of tuning of the piezoelectric filter consists in lowering the frequencies of the resonators as a result of removing the electrode layer by means of ion-beam etching (IBE) in an inert gas atmosphere. It is necessary to control frequencies of the first and second resonators, as well as the frequency spacing (distance between frequencies of the upper and lower resonances of the piezo system), dynamic impedance of partial resonators and insertion attenuation. We present the results of using ion-beam etching in tuning monolithic piezoelectric filters on volumetric acoustic waves. It is shown that tuning should be performed using frequencies of the upper and lower resonances of the piezo system under control of the insertion attenuation. It is also necessary to exclude the control operations for the frequencies of the first and second resonators. The optimum parameters of ion-beam etching electrodes of the resonators are determined: working pressure — 1.33 × 10–5 Pa, working gas flow — 1.75 m3 · Pa/sec, ion beam energy — 1 keV, ion current density — 6 mA/cm2. Moreover, the dependence of the insertion damping and dynamic resistance on the frequency of the resonator was revealed. Characteristics of the obtained monolithic quartz filter are presented: nominal frequency — 21400.681 MHz, bandwidth by –3 dB — 32.66 kHz, insertion loss 0.5 dB. The obtained results can be used when tuning sections with smaller electrodes for filters at higher frequencies.