AbstractNoise current, detectivity, quantum efficiency, and response speed are critical metrics in evaluating organic/inorganic photodiodes. Herein, these metrics are simultaneously advanced in poly(3,4‐ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS)/native SiOx/n‐Si hybrid photodetectors, achieving excellent performance in detecting broadband faint light. Wave‐interference photonic crystals, comprising periodic microstructured inverse pyramids with nanometer‐scale mesa widths, are integrated into the Si absorber to effectively couple incident light for increased absorption, thereby balancing optics and conformal contact coverage. The developed photodetector comprises a deep depletion region and interfacial SiOx layer, enabling diffusion‐mitigated broadband photocarrier transport and effective charge collection, and suppressing carrier tunneling processes for low‐noise. An ultralow reverse dark current density of ≈2.46 × 10−8 A cm−2 at −0.4 V is realized for nanowatt‐level light detection. The photodetector showcases superlative properties among reported PEDOT:PSS–based inorganic heterojunctions, including a broadband external quantum efficiency of >≈80% from 340 to 960 nm (internal quantum efficiency of >≈90% from 380 to 840 nm), detectivity of >≈1012 Jones from 300 to 1140 nm, and microsecond response speed. This study provides practical insight for combining high‐absorption microstructures with space charge engineering for the development of high‐performance organic/inorganic hybrid photodetectors.
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