Dielectric Constant Interlayer Research Articles

Ultralow-${k}$ Dielectric With Structured Pores for Interconnect Delay Reduction

An ultralow- ${k}$ dielectric using structured pores to reduce interconnect propagation delay is demonstrated. By using a carbon nanotube (CNT) template, porous oxide with vertical cylindrical pores is formed on the Si3N4 etch-stop layer and successfully integrated with the copper damascene process. The resulting dielectric is anisotropic with an interlayer dielectric constant of k = 1.97 and an intralayer dielectric constant of k = 1.75 at a porosity of 65%. Compared with the conventional porous material with randomly arranged spherical pores, a much higher elastic modulus of 15.7 GPa is achieved to allow the chemical mechanical polish process at a porosity of 65%.

Transport measurements in twisted bilayer graphene: Electron-phonon coupling and Landau level crossing

We investigate electronic transport in twisted bilayer graphene (tBLG) under variable temperatures ($T$), carrier densities ($n$), and transverse magnetic fields, focusing on samples with small-twist-angles ($\theta$). These samples show prominent signatures associated with the van Hove singularities (VHSs) and superlattice-induced mini-gaps (SMGs). Temperature-dependent field effect measurement shows that the difference between temperature-dependent resistivity and residual resistivity, $\rho_{xx}(n,T) - \rho_{0}(n)$, follows $~T^\beta$ for $n$ between the main Dirac point (DP) and SMG. The evolution of the temperature exponent $\beta$ with $n$ exhibits a W-shaped dependence, with minima of $\beta$ ~0.9 near the VHSs and maxima of $\beta$ ~1.7 toward the SMGs. This W-shaped behavior can be qualitatively understood with a theoretical picture that considers both the Fermi surface smearing near the VHSs and flexural-acoustic phonon scattering. In the quantum Hall regime, we observe only Landau level crossings in the massless Dirac spectrum originating from the main DP but not in the parabolic band near the SMG. Such crossings enable the measurement of an enhanced interlayer dielectric constant, attributed to a reduced Fermi velocity. Moreover, we measure the Fermi velocity, interlayer coupling strength, VHS energy relative to the DP, and gap size of SMG, four important parameters used to describe the peculiar band structure of the small-$\theta$ tBLG.

三组分光子晶体薄板的带系结构及固有损耗的研究

We obtain the photonic bands and intrinsic losses for the triangular lattice three-component two-dimensional (2D) photonic crystal (PhC) slabs by expanding the electromagnetic field on the basis of waveguide modes of an effective homogeneous waveguide. The introduction of the third component into the 2D PhC slabs influences the photonic band structure and the intrinsic losses of the system. We examine the dependences of the band gap width and gap edge position on the interlayer dielectric constant and interlayer thickness. It is found that the gap edges shift to lower frequencies and the intrinsic losses of each band decrease with the increasing interlayer thickness or dielectric constant. During the design of the real PhC system, the effect of unintentional native oxide surface layer on the optical properties of 2D PhC slabs has to be taken into consideration. At the same time, intentional oxidization of macroporous PhC structure can be utilized to optimize the design.

PBG properties of three-component 2D photonic crystals

In this paper we analyze theoretically how the introduction of the third component into the two-dimensional photonic crystal influences the photonic band structure and the density-of-states of the system. We consider the periodic array of cylindrical air rods in a dielectric, and the third medium is introduced as a ring-shaped intermediate layer of thickness d and dielectric constant ɛ i between the air pores and the dielectric background. Using the plane wave method, we have obtained the band structures for the 2D triangular lattice photonic crystals. The dependencies of TE and TM band gaps’ widths and gaps’ edges position on the interlayer dielectric constant and interlayer thickness were analyzed. In the framework of this approach, we have estimated the influence of the surface oxide layer on the band structure of macroporous silicon. We observed the shift of the gaps’ edges to the higher or lower frequencies, depending on the interlayer thickness and dielectric constant. We have shown that the existence of a native oxide surface layer should be taken into consideration to understand the optical properties of 2D photonic crystals, particularly in macroporous silicon structures.