In-situ low pressure oxidation of stoichiometric Ni 3Al alloys has been studied using X-ray photoelectron spectroscopy and Auger electron spectroscopy for the temperature range 300 to 700°C. For these conditions, only aluminum oxides are observed. At 300 and 500°C, two oxide species are formed: one ascribed to an “intermediate state” and the other to amorphous Al 2O 3. This intermediate species, not reported previously, is interpreted as due to a precursor oxide species. Above 700°C, only γ-Al 2O 3 is formed. Below 700°C, the oxidation appears to be diffusion limited as the oxide does not increase for exposures above 600 L, whereas at 700°C, the oxide continues to grow with increasing exposure. The different behaviors for the two temperature ranges are discussed in terms of different oxidation mechanisms. In addition to these mechanisms, it is found that the oxide growth rate depends on the grain orientation. The development of intergranular oxides has also been observed.