Interdigital Transducer Electrodes Research Articles

Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a bright future for their use in high frequency narrow band filters. Resonant frequency drift due to temperature variation has a large impact on the narrower passband and a temperature coefficient of frequency (TCF) closer to 0 can broaden the stable temperature range of the resonator. This paper proposes a method of etching grooves in the area of the piezoelectric layer not covered by the Interdigital transducer (IDT) electrodes to improve the temperature stability of the Lamb resonator. Through the finite element method and theoretical analysis, the phase velocity, group velocity, and TCF dispersion curve of different modes of the resonator with groove structure were determined. The reason for the change of TCF under different normalized thicknesses of AlN was explained through the conversion of the LWR from a contour mode resonator (CMR) to a Cross-Sectional Lamé Mode Resonator. Simulation and test have shown that etching grooves have the effect of reducing TCF by adjusting the electromechanical coupling coefficient. The test shows that 205 nm-depth grooves can lower the TCF of the S0 mode IDT-Open LWR from −13.3 to −5.1 ppm/°C and S1 mode from −36.8 to −9.0 ppm/°C, respectively. The TCF of S0 and S1 mode LWRs decreased by 61.7% and 75.5%, respectively, after 205 nm groove etching. The groove etching method greatly raises the temperature stability of the LWR, enabling Lamb wave filters to operate stably over a wider temperature range.

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic wave (SAW) filters and duplexers. In this method, the boundary element method (BEM) is adopted to obtain the capacitance per unit length in a layered medium, while the partial capacitance (PC) method is used to derive the effective relative permittivity of the multi-layered IDT. Numerical results from commercially available software are provided for comparison with the results calculated using the proposed method. The consistent results verify the validity and accuracy of this method, which also demonstrates significantly faster calculation speed compared to commercially available software. Precise electrical response prediction of a dual-mode SAW (DMS) filter can be achieved by applying this method to the COM model, and this ultra-fast calculation method can also be included in filter design optimization.

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

One approach to extend the acoustic applications of aluminum nitride (AlN) in the GHz frequency range is to take advantage of the piezoelectric performance and high acoustic velocity (∼11 350 m/s) along the c-axis of this material. In particular, in the case of high-frequency micro-electromechanical systems, it should be possible to simplify the construction of resonators by using a-plane AlN-based structures. In the work described in this Letter, a single-crystalline a-plane AlN layer on an r-plane sapphire substrate is obtained by combining sputtering and high-temperature annealing. Based on this non-polar AlN, a resonator with only planar interdigital transducer electrodes is fabricated. Experiments on this resonator reveal simultaneous excitation of an anisotropic Rayleigh surface acoustic wave (SAW) at 2.38 GHz and a laterally excited bulk acoustic wave (LBAW) at 4.00 GHz. It is found that the Rayleigh SAW exhibits outstanding performance, with a quality factor as high as 2458 and great stability under variations in temperature. The LBAW at 4.00 GHz is excited by pure planar interdigitated electrodes without the need for any cavity or bottom electrode structure, thus demonstrating a promising approach to the construction of high-frequency resonators with a relatively simple structure.

Through-Holes Design for Ideal LiNbO3 A1 Resonators.

This paper proposes a method to realize ideal lithium niobate (LiNbO3) A1 resonators. By introducing subwavelength through-holes between the interdigital transducer (IDT) electrodes on the LiNbO3 surface, all unfavorable spurious modes of the resonators can be suppressed completely. It is convenient and valid for various IDT electrode parameters and different LiNbO3 thicknesses. Also, this method does not require additional device fabrication steps. At the same time, these through-holes can greatly reduce the suspended area of the LiNbO3 thin film, thus significantly improving the design flexibility, compactness, mechanical stability, temperature stability, and power tolerance of the resonators (and subsequent filters). It is expected to become an important means to promote the practical application of LiNbO3 A1 filters and even all Lamb waves filters.

Preparation of MoS2 Nanospheres using a Hydrothermal Method and Their Application as Ammonia Gas Sensors Based on Delay Line Surface Acoustic Wave Devices.

An ammonia sensor based on a delay-line surface acoustic wave (SAW) device is developed in this study by coating the delay line area of the device with a nano-structured molybdenum disulfide (MoS2) sensitive material. A SAW device of 122 MHz was designed and fabricated with a pair of interdigital transducers (IDTs) defined on a 128° y-cut LiNbO3 substrate using photolithography technologies, and the aluminum IDT electrodes were deposited by a DC magnetron sputtering system. By adjusting the pH values of precursor solutions, molybdenum disulfide (MoS2) nanospheres were prepared with various structures using a hydrothermal method. Finally, an NH3 gas sensor with high sensitivity of 4878 Hz/ppm, operating at room temperature, was successfully obtained. The excellent sensitivity performance may be due to the efficient adsorption of NH3 gas molecules on the surfaces of the nanoflower-like MoS2, which has a larger specific surface area and provides more active sites, and results in a larger change in the resonant frequency of the device due to the mass loading effect.

Durability of TiAl based surface acoustic wave devices for sensing at intermediate high temperatures

TiAl based surface acoustic wave (SAW) devices, which offer a promising cheap and easy to handle wireless sensor solution for intermediate high temperatures up to 600 °C, were prepared and investigated with respect to their durability. To obtain the devices, Ti/Al multilayers were deposited on high-temperature stable piezoelectric catangasite (CTGS) substrates and structured as electrodes via the lift-off technique. AlNO cover layers and barrier layers at the substrate site served as an oxidation protection. The devices were characterized regarding their electrical behavior by ex-situ measurements of their frequency characteristics after heat treatments up to 600 °C in air. In addition, long-term in situ measurements up to 570 °C were performed to analyze a possible drift of the resonant frequency in dependence on the temperature and time. Scanning electron microscopy of the surfaces of the devices and scanning transmission electron microscopy of cross sections of TiAl interdigital transducer electrode fingers and the contact pads were conducted to check the morphology of the electrode metallization and to reveal if degradation or oxidation processes occurred during the heat treatments.The results demonstrated a sufficient high-temperature stability of the TiAl based devices after a first conditioning of system. A linear dependence of the resonant frequency on the temperature of about −37 ppm/K was observed. In summary, the suitability of TiAl based SAW sensors for long-term application at intermediate temperatures was proven.

Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation.

Surface acoustic wave (SAW)-based acoustofluidic devices have shown broad applications in microfluidic actuation and particle/cell manipulation. Conventional SAW acoustofluidic device fabrication generally includes photolithography and lift-off processes and thus requires accessing cleanroom facilities and expensive lithography equipment. In this paper, we report a femtosecond laser direct writing mask method for acoustofluidic device preparation. By micromachining of steel foil to form the mask and direct evaporation of metal on the piezoelectric substrate using the mask, the interdigital transducer (IDT) electrodes of the SAW device are generated. The minimum spatial periodicity of the IDT finger is about 200 μm, and the preparation for LiNbO3 and ZnO thin films and flexible PVDF SAW devices is verified. Meanwhile, we have demonstrated various microfluidic functions, including streaming, concentration, pumping, jumping, jetting, nebulization, and particle alignment using the fabricated acoustofluidic (ZnO/Al plate, LiNbO3) devices. Compared to the traditional manufacturing process, the proposed method omits spin coating, drying, lithography, developing, and lift-off processes and thus has advantages of simple, convenient, low cost, and environment friendliness.

Fractional Bandwidth up to 24% and Spurious Free SAW Filters on Bulk 15°YX-LiNbO3 Substrates Using Thickness-Modulated IDT Structures

To cope with ubiquitous wireless connectivity and the increased and faster data delivery in 5G communication, surface acoustic wave (SAW) filters are progressively requiring wider bandwidths. Conventional bulk 15°YX-LiNbO3 substrates with a large coupling coefficient (K2) are attractive for the low-cost mass production of wideband SAW filters, but these generally suffer from spurious responses, limiting their practical application. In this work, a novel and simple SAW configuration is proposed that uses thickness-modulated interdigital transducer (IDT) structures to overcome the limitations set by spurious responses. Different from the conventional design where the thicknesses of the IDT electrodes in the series and parallel resonators generally kept the same, the proposed configuration adopts IDT electrodes of different thicknesses in the series and shunt resonators to suppress or remove unwanted spurious Rayleigh modes from the filter passband. Two different ultra-wideband SAW filter designs employing thickness-modulated IDTs were designed and fabricated to validate the effective suppression of spurious modes. The SAW filters experimentally featured spurious-free responses in the passband as well as a large 3 dB fractional bandwidth (FBW) in the 18.0% and 24.1% ranges and low insertion losses below 1 dB. This work can significantly broaden the range of applications for SAW devices and can open a pathway to commercialize ultra-wideband SAW filters in 5G communication systems.

Real-time sensing of trace TNT with acoustic surface wave method based on the modified interdigital transducer electrodes

Real-time sensing of trace TNT with acoustic surface wave method based on the modified interdigital transducer electrodes

Identification of electrical impedance correlation using interdigital transducer (IDT) electrode and blood glucose by giving variations of sugar concentration to male mice

The electrical impedance depends on the frequency and material with the specific frequency using a Bioelectrical Impedance Spectrometer (BIS), a material detection using an Interdigital Transducer (IDT) electrode, and data process using software Data Acquisition (DAQ). The current electricity used in this tool is AC. The purpose is to identify the electrical impedance correlation to glucose, the effect of natural sugar on male mice’s blood, and identify impedance values in glucose conditions. The method is grouping the mice because they were given a variety of drinks for 1 month. The tails of mice were cut for blood and tested. Data stored using Microsoft Excel, Bode, and Nyquist plots of data stored in the form of images. Data processing using Ms. Excel. The results are glucose value generated from this study was normal. So far nothing significant has been found. The conclusion is that there is no discovery between electrical impedance and glucose in this study, due to several factors such as time, human error, measuring instruments, and the environment. Other animal factors are the effects of metabolism, lifestyle, size, body weight, and undetected disease. This study concludes that the value of glucose produced by each animal is different.

High-acoustic-index-contrast phononic circuits: Numerical modeling

We numerically model key building blocks of a phononic integrated circuit that enable phonon routing in high-acoustic-index waveguides. Our particular focus is on the gallium nitride-on-sapphire phononic platform which has recently demonstrated high acoustic confinement in its top layer without the use of suspended structures. We start with the systematic simulation of various transverse phonon modes supported in strip waveguides and ring resonators with sub-wavelength cross section. Mode confinement and quality factors of phonon modes are numerically investigated with respect to geometric parameters. A quality factor of up to 108 is predicted in optimized ring resonators. Next, we study the design of the phononic directional couplers and present key design parameters for achieving strong evanescent couplings between modes propagating in parallel waveguides. Last, interdigitated transducer electrodes are included in the simulation for direct excitation of a ring resonator and critical coupling between microwave input and phononic dissipation. Our work provides a comprehensive numerical characterization of phonon modes and functional phononic components in high-acoustic-index phononic circuits, which supplements previous theories and contributes to the emerging field of phononic integrated circuits.

Electrical Performances of a Surface Acoustic Wave Device With Inter-Digital Transducers Electrodes in Local Resonances

Abstract In this paper, we investigate numerically the coupling of the Rayleigh mode with the micro-wall resonance modes in inter-digital transducers (IDTs) electrodes of surface acoustic wave (SAW) devices. We perform a finite element analysis (FEA) of the SAW features using an implemented model using comsol Multiphysics® software. The SAW structure comprises identical transmitter and receiver IDTs electrodes, with different electrode heights (he). The proposed FEA study is based on the extraction of reflection (S11) and transmission (S21) coefficients of the SAW device. The IDTs are considered to be a micro-wall phononic crystal acting as local resonators at frequencies inside the SAW passband. The locally resonance gap is strongly dependent on the he value, and S11 and S21 parameters are affected by the SAW energy absorption in the IDTs system. We have chosen two he values (0.5 and 3 µm) to study low and high aspect ratios of micro-walls, corresponding respectively to Bragg-type and resonance-type bandgaps appearing near the SAW central frequency. At the SAW resonance frequency, the return (S11) and the insertion (S21) losses are reduced. S21 is reduced by 12.73 and 18.49 dB for he = 0.5 and 3 µm, respectively, accompanied by an increase in the quality factor, and S11 parameter is reduced by 1.357 and 4.98 dB for he = 0.5 and 3 µm, respectively.

Modeling a Dielectrophoretic Microfluidic Device with Vertical Interdigitated Transducer Electrodes for Separation of Microparticles Based on Size.

This article conceptualizes and mathematically models a dielectrophoretic microfluidic device with two sets of interdigitated transducer vertical electrodes for separation of a binary heterogeneous mixture of particles based on size; each set of electrodes is located on the sidewalls and independently controllable. To achieve separation in the proposed microfluidic device, the small microparticles are subjected to positive dielectrophoresis and the big microparticles do not experience dielectrophoresis. The mathematical model consists of equations describing the motion of each microparticle, fluid flow profile, and electric voltage and field profiles, and they are solved numerically. The equations of motion take into account the influence of phenomena, such as inertia, drag, dielectrophoresis, gravity, and buoyancy. The model is used for a parametric study to understand the influence of parameters on the performance of the microfluidic device. The parameters studied include applied electric voltages, electrode dimensions, volumetric flow rate, and number of electrodes. The separation efficiency of the big and small microparticles is found to be independent of and dependent on all parameters, respectively. On the other hand, the separation purity of the big and small microparticles is found to be dependent on and independent of all parameters, respectively. The mathematical model is useful in designing the proposed microfluidic device with the desired level of separation efficiency and separation purity.

Simulation of a microfluidic device employing dielectrophoresis for liquid biopsy

This article details simulation based study of cell separation in a dielectrophoretic microfluidic device. The device consists of a narrow microchannel connected to a wide microchannel with several finite sized planar interdigitated transducer electrodes protruding into the narrow microchannel from one of its sidewalls. In the narrow microchannel, the circulating tumor cells are subjected to positive dielectrophoresis while the regular cells are subjected to negative dielectrophoresis to achieve separation and as all cells move in to the wide microchannel, the physical distance between the two types of cells increases thereby making their collection from the device easier. Equations describing motion, fluid field, electric field, and electric potential form the mathematical model and accounts for forces related to inertia, drag, and dielectrophoresis. Applied electric potential, electrode/gap length, and tumor cell diameter have a positive effect on the performance metrics while velocity of the medium and microchannel width have negative effect on the performance metrics. The model presented in this article is beneficial in realizing liquid biopsy with the desired performance metrics using the proposed microfluidic device.

Highly Sensitive and Full Range Detectable Humidity Sensor using PEDOT:PSS, Methyl Red and Graphene Oxide Materials

Single transducer with humidity sensing materials has limitations in both range and sensitivity, which cannot be used to detect the full range of humidity with consistent sensitivity. To enlarge range and improve sensitivity in the all range relative humidity (RH), we propose a highly sensitive and full range detectable humidity sensor based on multiple inter-digital transducer (IDT) electrodes connected in series with poly(3,4-ethylenedioxythiophene) doped poly (styrene sulfonate) anions (PEDOT: PSS), C15H15N3O2 (Methyl Red), and graphene oxide (GO) thin films as the active sensing materials. The humidity sensor with single active material has a limit in the detecting ranges, where the GO, PEDOT: PSS, and Methyl Red materials have sensing responses of 0 to 78% RH, 30 to 75% RH, and 25 to 100% RH, respectively. However, a humidity sensor using combined three active materials can respond to much wider range of RH with high sensitivity, where the IDTs and the active regions were prepared using ink-jet printing and spin coating, respectively. This proposed sensor can detect a full range of 0% RH to 100% RH. The response and recovery times are 1 sec and 3.5 sec, respectively. Our single sensing device using multiple IDTs connected different active materials in series can overcome the limitations of single transducer based sensor for the high performance sensor applications.

Model-Based Performance Study of Dielectrophoretic Flow Separator

This article presents model-based analysis of a dielectrophoretic microfluidic flow separator in terms of separation efficiency and purity. The device employs interdigitated transducer electrodes on the bottom surface, and they run over the entire width of the microchannel. The device realizes type-based separation, specifically electrical properties, by capturing one type of microscale entity on the electrode surface due to positive dielectrophoresis (DEP) while keeping the other type suspended in the medium due to negative DEP. The model describes the trajectory of microscale entities, electric field potential, and fluid velocity in the microchannel and accounts for forces related to DEP, sedimentation, drag, virtual mass, and inertia. The model is used for parametric study using polystyrene and silica microparticles with radius of 3 μ m; parameters analyzed are flowrate, applied electric potential, number of electrode pairs, and electrode/gap length. Separation efficiency of the levitated microscale entity is 100% for all input parameters, while that of the captured microscale entity varies. Separation purity of the captured microscale entity is 100% for all input parameters, as long as the other type remains levitated, while that of the levitated microscale entity varies. The model developed in this article can help select parameters for achieving the desired level of performance metrics. The model is validated using experimental data on levitation of latex microparticles for voltages of 1–8 Vpp in a microfluidic device with electrode/gap length of 20 μ m and height of 120 μ m. The novelty of the model is that it is dynamic and can model the simultaneous capture and levitation of microscale entities in the microfluidic device.

Cavity-free vacuum-Rabi splitting in circuit quantum acoustodynamics

Artificial atoms coupled to surface acoustic waves (SAWs) have played a crucial role in the recent development of circuit quantum acoustodynamics (cQAD). In this paper, we have investigated the interaction of an artificial atom and SAWs beyond the weak coupling regime, focusing on the role of the interdigital transducer (IDT) that enables the coupling. We find a parameter regime in which the IDT acts as a cavity for the atom, rather than an antenna. In other words, the atom forms its own cavity. Similar to an atom coupled to an explicit cavity, this regime is characterized by vacuum-Rabi splitting, as the atom hybridizes with the phononic vacuum inside the IDT. This hybridization is possible because of the interdigitated coupling, which has a large spatial extension, and the slow propagation speed of SAWs. We work out a criterion for entering this regime from a model based on standard circuit-quantization techniques, taking only material parameters as inputs. Most notably, we find this regime hard to avoid for an atom on top of a strong piezoelectric material, such as LiNbO$_3$. The SAW-coupled atom on top of LiNbO$_3$ can thus be regarded as an atom-cavity-bath system. On weaker piezoelectric materials, the number of IDT electrodes need to be large in order to reach this regime.

Graphene-Based Fully Transparent Thin Film Surface Acoustic Wave Devices for Sensing and Lab-on-Chip Applications

This paper explores to use graphene as transparent interdigital transducer (IDT) electrode for a fully transparent surface acoustic wave (SAW) device due to its extraordinary electrical, physical and mechanical properties. The number of graphene atomic layers was firstly optimized for its best performance as the SAW electrode, and a 4-layered graphene IDT electrode, with aluminum doped zinc oxide, AZO, as the bus bar and wire bonding pad, was selected to fabricate fully transparent ZnO/glass SAW devices. The SAW resonators exhibited obvious resonant response at different wavelengths, and resonance signals with amplitude up to 20 dB were obtained with the transparency above 80%. The graphene-based transparent SAW sensor has been used for different sensing applications. Temperature sensing tests showed that the frequencies increase linearly with the increase of temperature, which has an opposite trend compared to that obtained from a conventional LiNbO3 SAW device. The humidity sensing and human breathing detection have been demonstrated, and discontinuous respiration measurement can be used to distinguish the human respiration at the normal state or the state after exercise. Strong acoustic streaming and particle concentration using the transparent SAW devices have been achieved, which are suitable for microfluidic and lab-on-chip applications.

Surface acoustic wave devices with graphene interdigitated transducers

This paper reports the development of high performance surface acoustic wave (SAW) devices by using graphene as a virtually massless interdigital transducer (IDT) to mitigate mass-loading effects. Different layers of graphene electrodes were made and their influences on the SAW device performance were experimentally and theoretically evaluated. Results showed that 4-layer graphene with a value of sheet resistance less than 77.6 Ω sq−1 and graphene IDTs of at least 80 pairs are needed to obtain the optimum performance of graphene IDT SAW devices. Furthermore, the optimal ratio of aperture/wavelength for the graphene IDT electrode was found to be 5. Graphene based SAW devices, with a resonance frequency of 154 MHz, transmission signal amplitude of 30 dB and K2 of 3.78%, were fabricated and successfully demonstrated for applications in breathing monitoring.

Dielectrophoresis-based 3D-focusing of microscale entities in microfluidic devices.

This article presents a validated mathematical model of a dielectrophoresis (DEP)-based microfluidic device capable of 3D-focusing microscale entities at any lateral location inside the microchannel. The microfluidic device employs planar, independently controllable, interdigitated transducer (IDT) electrodes on either side of the microchannel. The developed model is used for understanding the influence of different geometric and operating parameters on 3D focusing, and it comprises of motion equation, Navier-Stokes equation, continuity equation, and electric potential equation (Laplace equation). The model accounts for forces associated with inertia, gravity, buoyancy, virtual mass, drag, and DEP. The model is solved using finite difference method. The findings of the study indicate that the 3D focusing possible with the proposed microfluidic device is independent of microscale entity's size and initial position, microchannel height, and volumetric flow rate. In contrast, 3D focusing achievable with the microfluidic device is dependent on the applied electric potential, protrusion width of electrodes, and width of electrode/gap. Additionally, the lateral position of 3D focused can be controlled by varying the applied electric potential. The advantage of the proposed microfluidic device is that it is simple to construct while capable of achieving 3D focusing at any lateral location inside the microchannel.