At elevated temperatures cavity perturbation measurements with small cylindrical samples are well suited because homogeneous heating is possible and the insertion holes do not disturb the electromagnetic field around the sample. Measurements in several modes increase certainty and make cavity cooling superfluous. A careful evaluation of transmission data with a sample shape correction procedure is necessary for a good accuracy of permittivity measurement. In addition, a method is presented for the accurate determination of reference material data including the verification of reference data. To verify the theoretical considerations, a temperature controlled measurement apparatus with laser heating and temperature measurement via a pyrometer has been developed.