The formation and nitridation of indium (In) droplets on Si (111)7×7, with regard to In droplet epitaxy growth of InN nanostructures, were studied using a spectroscopic photoemission and low energy electron microscopy, for the In coverages from 0.07 to 2.3 monolayer (ML). The results reveal that the In adatoms formed well-ordered clusters while keeping the Si (111)7×7 surface periodicity at 0.07ML and a single 3×3 phase at 0.3ML around 440–470°C. At 0.82ML, owing to the presence of structurally defect areas beside the 7×7 domains, 3-D In droplets evolved concomitantly with the formation of 4×1-In cluster chains, accompanied by a transition in surface electric property from semiconducting to metallic. Further increasing the In to 2.3ML led to a moderate increase in number density and an appreciable lateral growth of the droplets, as well as the multi-domain In phases. Upon nitridation with NH3 at ~480°C, besides the nitridation of the In droplets, the N radicals also dissociated the InSi bonds to form SiN. This caused a partial disintegration of the ordered In phase and removal of the In adatoms between the In droplets.
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