The hybrid barrier discharge plasma process combined with ozone decomposition catalysts was studied experimentally for decomposing dilute trichloroethylene (TCE). Based on the fundamental experiment for catalytic activities on ozone decomposition, MnO2 was selected for application in the main experiments for its higher catalytic abilities than other metal oxides. A lower initial TCE concentration existed in the working gas; the larger ozone concentration was generated from the barrier discharge plasma treatment. Near complete decomposition of dichloro-acetylchloride (DCAC) into Cl2 and COx was observed for an initial TCE concentration of less than 250 ppm. C=C π bond cleavage in TCE gave a carbon single bond of DCAC through oxidation reaction during the barrier discharge plasma treatment. Those DCAC were easily broken in the subsequent catalytic reaction. While changing oxygen concentration in working gas, oxygen radicals in the plasma space strongly reacted with precursors of DCAC compared with those of trichloro-acetaldehyde. A chlorine radical chain reaction is considered as a plausible decomposition mechanism in the barrier discharge plasma treatment. The potential energy of oxygen radicals at the surface of the catalyst is considered as an important factor in causing reactive chemical reactions.