To effectively improve photocatalytic activity, the morphology and crystallinity of semiconductor photocatalysts must be precisely controlled during the formation process. Self-aligned Nb2O5 nanotube arrays have been successfully fabricated using the electrochemical anodization method. A novel growth mechanism of Nb2O5 nanotubes has been proposed. Starting from the initial oxidation process, the “multi-point” corrosion of fluoride ions is a key factor in the formation of nanotube arrays. The inner diameter and wall thickness of the nanotubes present a gradually increasing trend with increased dissociative fluorine ion concentration and water content in the electrolyte. With dehydroxylation and lattice recombination, the increased crystallinity of Nb2O5 represents a reduction of lattice defects, which effectively facilitates the separation and suppresses the recombination of photo-generated carriers to enhance their catalytic degradation activity.