With the deepening of a new round of technological revolution and industrial reform, digital technology has been continuously innovated and widely penetrated into various economic fields. The digital economy (DE) is gradually becoming the focus of China's economic development planning and a new engine to enhance national strength. Evaluating the development level of DE in various regions is conducive to timely discover the shortcomings in China's DE development, as well as provide an important basis for putting forward corresponding policy suggestions. This investigation established a hybrid multi-criteria decision making (MCDM) model for evaluating DE development of 31 provincial level regions in China ranging from 2015 to 2020. Firstly, the evaluation indicator system is established from digital infrastructure, integrated development, social benefits, innovation ability, and electronic-commerce dimensions containing 17 quantitative sub-criteria based on Fuzzy-Delphi method. Secondly, integrated weights of 17 sub-criteria from 2015 to 2020 are computed in terms of objective weights calculated by the anti-entropy weight (AEW) approach from 2015 to 2020 and subjective weights obtained via the best-worst method (BWM). Thirdly, MARCOS model is applied to evaluate the DE development degree of various regions in China ranging from 2015 to 2020. Case analysis illustrates that the DE development of Guangdong, Jiangsu, Zhejiang, and Beijing always maintain in the top four from 2015 to 2020, while the southwest and northwest regions in China are obviously fall behind others. And the DE development degree of various regions is primarily affected under the integrated development performance, innovation ability performance, and social benefits performance. Therefore, the backward regions should emphasize the development of software industry and information technology industry. The robustness of the proposed MCDM model combining Fuzzy-Delphi, AEW, BWM and MARCOS is discussed employing three similarity coefficients of rankings. And it is verified that the proposed MCDM model has superior robustness and validity in evaluating DE development.