With the expectation of extremely high-capacity requirement of 6G networks, visible light communication (VLC) has abundant frequency resource and excellent performance in 6G integrated communication in space, air, underwater, indoor, and car networks [1]. The micro light emitting diode (micro-LED) is regarded as a reliable light source for high-speed VLC and is capable of illumination while providing communication. Compared to the traditional light source, micro-LED possesses better characteristics such as high bandwidth, low power consumption, long lifetime and high reliability [2-3].In this work, we made improvements in the micro-LED fabrication compared with the common negative doped GaN (common-n) devices we produced by shallow etching before [4]. Micro-LEDs can be manufactured into completely separate pixels for independent control by deep etching. For green micro-LEDs with a wavelength of 510nm, the light output power of deep etching one increased. At the same working current density, the -3dB bandwidth of deep etching micro-LED has an average growth of 50% compared to shallow etching one. Benefit from the promotion of optical power and -3dB bandwidth, micro-LED with independent etching structure have a better performance in VLC system. A record date rate of 6.58Gpbs was achieved by single green micro-LED employing the orthogonal frequency division multiplexing (OFDM) modulation scheme, which proposes a feasible optimization direction for the integration of micro-LED high-speed VLC and lighting. REFERENCES: [1] Chi N, Zhou Y, Wei Y, et al. Visible light communication in 6G: Advances, challenges, and prospects[J]. IEEE Vehicular Technology Magazine, 2020, 15(4): 93-102.[2] James Singh K, Huang Y M, Ahmed T, et al. Micro-LED as a promising candidate for high-speed visible light communication[J]. Applied Sciences, 2020, 10(20): 7384.[3] Lin R, Jin Z, Qiu P, et al. High bandwidth series-biased green micro-LED array toward 6 Gbps visible light communication[J]. Optics Letters, 2022, 47(13): 3343-3346.[4] Zhu S, Qiu P, Shan X, et al. Micro-LED based double-sided emission display and cross-medium communication[J]. IEEE Photonics Journal, 2022, 14(3): 1-5. Figure 1
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