A NiO/Ag/NiO (NAN) transparent conducting electrode (TCE) was fabricated using a magnetron-sputtering system, and the NAN TCE was applied to p-Si/n-ZnO heterojunction photodiodes (HPDs). The NAN TCE exhibits a 50% higher transmittance than the Al electrode (less than 1%). However, a very low sheet resistance of 0.27 Ω/sq is obtained in Al electrode than in NAN TCE (6.5 Ω/sq). The NAN TCE could effectively enhance the photo response of p-Si/n-ZnO HPDs for both ultraviolet (UV) and visible bands as compared to the p-Si/n-ZnO HPDs with the traditional Al electrode. Compared to the traditional p-Si/n-ZnO HPDs using the Al electrode, for the p-Si/n-ZnO HPDs using NAN TCE, the 500 nm photo response is increased by approximately 10 times and the 280 nm photo response is significantly enhanced by approximately 100 times at a reverse-bias voltage of 1 V. The dark current of p-Si/n-ZnO HPDs with NAN TCE is two orders of magnitude lower than that of p-Si/n-ZnO HPDs with an Al electrode. The improved performance enhances the photo (500 nm) to dark current ratio from 2 for the p-Si/n-ZnO HPDs with Al electrode to 1.4 × 103 for the one with NAN TCE. The photo (280 nm) to dark current ratio is enhanced from 8.5 × 102 to 6.8 × 105. The mechanism results from the high transmittance in the NAN TCE and Ni diffusion in ZnO. The Ni diffusion in ZnO suppresses its defects and hence decreases electron scattering from crystallites/grains, thereby increasing carrier mobility.
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