Results of studies of the effect of the buffer layer 1.3PbO 0.5ZrO2 0.5TiO2 (conditional composition is Pb1.3(Zr0.5Ti0.5)O3) on the properties of Pb(Zr0.5Ti0.5)O3 films on Ti and Pt substrates are considered. The films are obtained by metal organic deposition method (MOD).Films deposited on Pt substrate (with the buffer layer or without it) do not show fatigue up to N = 109 (where N is number of switching cycles) on Pr(N) and Ec(N) dependences. For films deposited on Ti substrates with the intermediate buffer layer Pr(N) dependences demonstrate a basically new feature: after ∼108 switching cycles the remanent polarization increases. The increase of Pr is 50% at N = 1010, the increase of coercive field is small.