Ultra-short pulse laser machining is an important finishing technology for high hardness materials. In this study, it demonstrated that the ultra-short pulse laser can be used to drill the film cooling holes and square holes in aero-engine turbine blades made of C/SiC composites. Both the edges and bottoms of the drilling holes are covered with small particles. The following factors have a great effect on drilling holes according to this work: (1) circular holes can be processed only at a relative small helical lines spacing. (2) With the increase of laser scanning speed, the depth of holes reduces while the diameter rarely changes. (3) Through the holes of high aspect ratio can be obtained via high processing power.