In this work, a sensitive and robust vacuum ultra-violet (VUV) single-photon ionization (SPI) ion trap time-of-flight mass spectrometer (VUV-SPI-IT-TOFMS) for on-line, realtime monitoring of chlorinated organic compounds in waste incineration flue gas has been newly developed. The fragment-free SPI technique with 121.6-nm VUV lamp irradiated by a microwave generator and the quadrupole ion trap to accumulate and select analyte ions were combined with a reflectron time-of-flight mass spectrometer to detect chlorinated organic compounds at trace level. This measuring system was tuned up to detect dioxins precursors with the aim at an application to monitoring trace level toxic substances in flue gases from incinerator furnaces. As a result, this technology has made it possible to analyze trichlorobenzene (T3CB), a dioxin precursor, in 18 s with a sensitivity of 80 ng/m3-N (10 pptv) using the selective accumulation of analyte substances and separation of interfering substances in the ion trap. Moreover, the first field test of the continuous monitoring T3CB in an actual waste incineration flue gas had been done for 7 months. The results show that this system has an exceeding robust performance and is able to maintain the high sensitivity in analyzing T3CB for long months of operation.