The main factor of laser-induced damage is the modulation to electromagnetic field of laser by the crack on the subsurface. In this paper, a three-dimensional crack model on the exit surface is presented. Three-dimensional finite-difference time-domain (FDTD) method is employed to simulate the electric field intensity distribution in the vicinity of crack on fused silica subsurface. The roles of the crack width, depth, length and the gradient angle in the modulation to the incident light field are analyzed in detail. Results show that the crack size plays an important role in the electric modulation. With the increasing depth and width, the peak value of maximal electric field intensity appears in fused silica. However, the maximal electric field intensity tends to be a constant when the crack length reaches 1 μm. Besides, the enhancement of light intensity becomes obvious when total internal reflection occurs in fused silica. Our calculated results provide an advisable theoretical criterion to the corresponding experiment.
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