In-line Production Research Articles

Hemodiafiltration using dialysate as substitution fluid.

To reduce the cost of hemodiafiltration (HDF), a standard hemodialysis machine was modified to permit in-line production of substitution fluid from bicarbonate dialysate. The authors' present data showing that this procedure was made bacteriologically safe; was simple to use, and offered a cheap approach to perform high-flux HDF using a hemodifilter of relatively small membrane surface area.

Optimized process parameters for high volume wafer metallization

In a multiwafer pallet coating process film characteristics have been evaluated using three magnetron cathodes sputtering simultaneously in an in-line production machine. Variations of discharge pressure and bias and nonbias sputtering have shown deviations in reflectivity and microstructure. The coating process has been optimized for high throughput and a high degree of reproducibility. Therefore, special attention has been paid to the use of a magnet lift system which allows process parameters to be kept constant over long time periods, even when the target becomes eroded. The background vacuum situation in the process chamber has been evaluated under the extreme conditions of loading up to 20 4 in. wafers or 12 5 in. wafers per 4.5 min into the process chamber. The initial residual gas pressure of 9×10−8 mbar can be kept at a tolerable level below 3×10−7 mbar at all times, where it turns out that the pressure increase while loading the pallet is caused mainly by degassing of water vapor. In this paper the process parameters for an in-line high production of 1 μ AlSi metallization are described. The film characteristics for a high volume production process of 265 4 in. wafers are shown.

A high rate sputtering process for the formation of hard friction-reducing TiN coatings on tools

The high rate sputtering process for the deposition of thin films can be used economically in in-line production plants for various applications with high reliability and process controllability. The deposition of hard TiN films onto tools can be achieved using high rate sputtering techniques. The coating process parameters must be optimized to meet special requirements of the film condensation conditions. Therefore, influences of the process parameters on the substrate temperature, the film structure, the stoichiometry, the thickness uniformity and the hardness were investigated and will be reported. The technical realization is described as a reactive bias sputtering process in a double-cathode arrangement of a given geometry with an essential bias power load to the substrates. The principles of a high throughput production plant with typical cycle times of approximately 60 min will be demostrated.

4944. In-line production system for sputter deposition of graded index solar absorbing films: D R McKenzie et al, J Vac Sci Technol, 19 (1), 1981, 93–95

4944. In-line production system for sputter deposition of graded index solar absorbing films: D R McKenzie et al, J Vac Sci Technol, 19 (1), 1981, 93–95

In-line production system for sputter deposition of graded index solar absorbing films

An apparatus for producing a selective solar-absorbing coating on tubes is described. The coating has absorptance α = 0.88±0.02 and room-temperature emittance ε = 0.035±0.005. When applied to a glass substrate, it consists of layers of stainless steel, copper, and a composite metal–carbon layer. The coating is applied by translation of the substrate through two hollow-cathode magnetron sputter-coating chambers. The metal–carbon layer is applied by reactive sputtering in the presence of acetylene and has a graded refractive index. Coatings have been incorporated into evacuated tubular collectors and their properties are discussed.

Integrated construction of low-cost gas lasers

Helium-neon lasers have been fabricated using methods and materials particularly suited to high-volume in-line production. Pilot-project results suggest that satisfactory life and performance can probably be achieved in production lasers incorporating pressed or ground soft-glass parts, extensive solder-glass seals, and thin-film-metallization cathodes. The new construction methods suggested should lead to other innovative laser products.

Industrial specialization and organization of in-line production at the Kurgankhimmash plant

Industrial specialization and organization of in-line production at the Kurgankhimmash plant