The task of the research was to improve the performance of lithium-ion batteries, namely, increase the specific energy and specific power, increase the number of charge-discharge cycles, improve production technology, expand the temperature operating range and reduce the cost of energy production.Analysis of existing technologies for the production of lithium-ion batteries has made it possible to take into account the shortcomings and technological limitations, which inspired the emergence of a new approach to the creation of electrode systems on other physical principles.The paper considers the improvement of the technology of obtaining anode systems for lithium-ion batteries using a graphite film with the application of a silicon film. The obtained result, using the proposed technique, shows an increase in the ionic conductivity of the electrodes, which occurs mainly due to a decrease in the resistance of the grain boundaries. This is due to several reasons, namely the decrease in the concentration of dielectric impurities in the surface layer.We also studied the anode system of the electrode of a lithium-ion battery obtained by vacuum spraying on a flexible thin organic film (usually polystyrene), with a thin film copper electrode applied to it, on which a layer of graphite and silicon was applied by high-frequency magnetron deposition. requirements.The proposed method is to obtain a thin film nanoscale electrode material for lithium-ion batteries based on films formed from clusters of graphite and silicon, which are obtained in two stages of magnetron sputtering of graphite and silicon target in plasma, using argon and oxygen.The use of a magnetron sputtering device and targets made of graphite and silicon allows you to control the structure of the layers of carbon and silicon. The developed technology of magnetron sputtering provides control and repeatability of the layer thickness.