To realize practical micromachines using fluid power with high power density, a micro fluid control system using homogeneous ER (Electro-rheological) fluid is proposed and developed. The homogeneous ER fluid whose viscosity is changed by the applied electric field strength is expected to be suitable for compact micromachines as a working fluid. Firstly, a new micro ER valve using homogeneous ER fluid is proposed and fabricated with 9mm in diameter. Static and dynamic characteristics are investigated. With supply pressure of 25 kPa and electric field strength change of 1.0 kV/mm, it is ascertained that the controllable pressure range is 10 kPa and the bandwidth is 0.5 Hz. Secondly, for pumping of homogeneous ER fluid having much higher viscosity than tap water, some improvements such as redesign of check valves and an application of a boost pressure are performed. Output characteristics of a resonantly-driven piezoelectric micropump with the size of φ9×10mm are experimentally investigated and the effectiveness of those improvements is verified. Maximum flow rate of 15 mm3/s and maximum pumping pressure of 0.2 MPa are obtained. Finally, an open-loop micro position control system is fabricated, which consists of the micropump, the micro ER valve and a bellows microactuator. Through basic experiments, it is confirmed that the output displacement of 23 μm and the bandwidth of 0.3 Hz are realized.
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