The equilibrium pressure attainable in a vacuum system is limited by gas influx from vaporization, desorption, diffusion and permeation. This imposes stringent requirements on the physical properties of the material used for the fabrication of the system, and leads to the selection of a limited number of suitable materials, especially if ultrahigh vacuum pressures are to be achieved. The properties and performance of such materials, namely glass, metals, ceramics and, in some application, synthetics, are reviewed in this article. Data on the physical parameters and preparation procedures, pertinent to their use in ultra high vacuum application, are given.
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