The effect of MESFET structure on the frequency dispersion of drain conductance (g/sub d/) was examined, It was found that a shorter gate length, lower buried p-layer concentration, lower sheet resistance of n/sup +/ layer, and thinner active layer thickness are effective in suppressing the frequency dependent g/sub d/. These phenomena are explained by the presence of deep traps in the depletion layer between the semi-insulating substate and active layer. We also show that the cross-point change of eye-pattern for density of input signal in logic ICs is due to frequency dependent g/sub d/ The cross-point change between mark ratio of 1/8 and 7/8 shows a linear relationship with gd/sub RF//gd/sub dc/ (the ratio of the drain conductance at RF and dc input), These results indicate that an optimized device structure with g/sub d/ small frequency dispersion can be used to realize high-speed and high quality logic ICs.