High-resolution Lens Research Articles

Elimination of the thick meniscus element in high-resolution scanning lenses

Thin lens solutions and optimization programs are utilized to avoid thick meniscus elements in the design of diffraction-limited scan lenses. Reasons for the appearance of thick meniscus elements and the procedures for eliminating them are explained.

ＫＦＡ１０００コスモス宇宙写真の判読

ＫＦＡ１０００コスモス宇宙写真の判読

ＫＦＡ１０００コスモス宇宙写真の写真処理

ＫＦＡ１０００コスモス宇宙写真の写真処理

ＫＦＡ１０００コスモス宇宙写真のＭＴＦ測定

ＫＦＡ１０００コスモス宇宙写真のＭＴＦ測定

ＫＦＡ１，０００コスモス宇宙写真の概要

ＫＦＡ１，０００コスモス宇宙写真の概要

A combined electron and ion beam lithography system

In scanning beam microfabrication processes, including resist exposure, direct maskless ion implantation, and micromachining, ions and electrons have complementary roles. It is advantageous to have, within a single scanning beam machine, finely focused and precisely coregistered beams of both ions and electrons. The requirement for the ion beam and the electron beam to have a common axis and to be focused at the target by a high resolution lens with short working distance can be met both by solely electrostatic and by combined magnetic and electrostatic lenses. Such lenses, and complete probe‐forming systems incorporating them, are considered.

High Resolution Lenses for Optical Waveguides

A mode index lens and a lens formed by a spherical depression in the substrate of the waveguide have opposite aberrations and can be combined in an element with considerably reduced aberrations. Only small differences in the mode index are required for the optimum combination.

Copying Lens for Microfilm Photography

A new lens design for precise copying exemplifies the success of the rms error function as a suitable criterion for the design of high resolution lenses. The design, a 145-mm f/4.0, gives 400-line/mm, high contrast,white-light visual resolution throughout a 30-mm flat image when used at 20:1 conjugates. On high resolution plates, a resolution of 320 lines/mm is obtained. The five-glass design has no vignetting of the marginal beams, presents no manufacturing problems, and gave full resolution when first assembled. The prescriptionwas found by the LASL 1972 Lens Design Program.