High Frequency Surface Acoustic Wave Research Articles

Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films grown on silicon substrates by molecular beam epitaxy (MBE). We report on the experimental frequency response and electromechanical properties of 400 nm-thick crystalline AlScN acoustic resonators with up to 12% Sc/(Sc+Al) ratio. The film thickness is optimized for operation at the SHF range, targeting emerging wireless communication standards, such as 4G LTE/5G. We report on high-performance acoustic devices that take advantage of the crystallinity, and high piezoelectric properties of 400 nm-thick epitaxial AlScN films. Our work presents enhanced effective electromechanical coupling coefficients (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) up to 5.3% and unloaded quality factors (Q <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> ) of ~192 at 3-10 GHz. However, fabrication challenges due to the high-stress levels of sub-micron AlScN epi-layers grown on Si substrates remain challenging and will be discussed in this paper. [2019-0231].

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate.

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order surface acoustic wave (SAW) devices generate enormous accelerations on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid handling at the microscale-and even at the nanoscale. In this paper we explicitly demonstrate two major fabrication methods of SAW devices on lithium niobate: the details of lift-off and wet etching techniques are described step-by-step. Representative results for the electrode pattern deposited on the substrate as well as the performance of SAW generated on the surface are displayed in detail. Fabrication tricks and troubleshooting are covered as well. This procedure offers a practical protocol for high frequency SAW device fabrication and integration for future microfluidics applications.

Polymeric liquid layer densified by surface acoustic wave.

Creating densified and stable liquid is a straightforward strategy for the fabrication of strong and ultra-stable amorphous or glassy materials. The current study has discovered that a liquid polymeric thin film is densified under the application of a high frequency surface acoustic wave (SAW). The experimental evidence is the decrease in film thickness and the increase in refractive index, measured by ellipsometry, of polyisobutylene thin films deposited on the solid substrates, when a high frequency SAW (39.5 MHz) is applied to the system. Further investigations by polarization-resolved single molecule fluorescence microscopy have demonstrated that the rotational motion of fluorescent probes doped inside the liquid film is retarded and the dynamical heterogeneity is reduced. The results demonstrate that the application of SAW of high frequency makes the thin polymeric liquid film densified and more dynamically homogeneous.

High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO2/SiC structure

The explosive growth of wireless communication and the creation of new frequency bands for 5G systems increasingly require surface acoustic wave (SAW) with high operating frequency (i.e. 3–6 GHz) as well as high-temperature stability. In this work, high-frequency and high-temperature stable SAW devices using ZnO/SiO2/SiC layered structures were proposed and reported. SAW characteristics of the Sezawa wave mode, including the phase velocities (Vp), electromechanical coupling coefficients (K2) and temperature coefficient of frequency (TCF), were studied systematically by the finite element method. High-frequency SAW one-port resonators with the resonant frequency ranging from ∼4.5–5.4 GHz were fabricated on the above structures. With SiC substrate providing high velocity and SiO2 interlayer for temperature compensation, a 5.0 GHz and nearly zero TCF of 0.7 ppm °C−1 can be achieved in a SAW device based on ZnO/SiO2/SiC structure. The good performance of these devices demonstrates that the ZnO/SiO2/SiC structure is promising for high-frequency and good temperature-stability SAW device applications.

MHz-Order Surface Acoustic Wave Thruster for Underwater Silent Propulsion.

High frequency (MHz-order) surface acoustic waves (SAW) are able to generate intense fluid flow from the attenuation of acoustic radiation in viscous fluids as acoustic streaming. Though such flows are known to produce a force upon the fluid and an equivalent and opposing force upon the object producing the acoustic radiation, there is no convenient method for measuring this force. We describe a new method to accomplish this aim, noting the potential of these devices in providing essentially silent underwater propulsion by virtue of their use of the sound itself to generate fluid momentum flux. Our example employs a 40 MHz SAW device as a pendulum bob while immersed in a fluid, measuring a 1.5 mN propulsion force from an input power of 5 W power to the SAW device. Supporting details regarding the acoustic streaming profile via particle image velocimetry and an associated theoretical model are provided to aid in the determination of the propulsion force knowing the applied power and fluid characteristics. Finally, a simple model is provided to aid the selection of the acoustic device size to maximize the propulsion force per unit device area, a key figure of merit in underwater propulsion devices. Using this model, a maximum force of approximately 10 mN/cm was obtained from 1 W input power using 40 MHz SAW in water and producing a power efficiency of approximately 50%. Given the advantages of this technology in silent propulsion with such large efficiency and propulsion force per unit volume, it seems likely this method will be beneficial in propelling small autonomous submersibles.

3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

The development of mobile communication sets higher demands on high frequency surface acoustic wave (SAW) devices. The layout of interdigital transducers (IDT) in SAW devices is in plane and the traditional methods of improving frequency for SAW devices are the increase of acoustic velocity and the reduction of wavelength. However, these methods have a limit due to the limited acoustic velocity and the photolithography limit. This work proposes a new way for the development of high frequency SAW devices by redesigning the layout of IDT in three dimensions (3D). The set of IDTs is split into two layers, i.e. the ground electrodes on one layer and the signal electrodes on the other layer. This 3D layout of IDTs dramatically narrows the horizontal gap between two adjacent electrodes, which can significantly increase the frequency. The frequency and the electromechanical coupling factor (K 2 ) of the four structures of SAW devices with the 3D layout of IDTs were studied by the finite element method (FEM). The results show that the frequency can be doubled under the same critical resolution of lithography due to the shortening of wavelength, and the 3D layout of IDTs is available for SAW devices based on piezoelectric thin film or piezoelectric single crystal. This work develops a new alternative to increase the working frequency of SAW devices.

Enhancing greywater treatment via MHz-Order surface acoustic waves

There is a pressing need for efficient biological treatment systems for the removal of organic compounds in greywater given the rapid increase in household wastewater produced as a consequence of rapid urbanisation. Moreover, proper treatment of greywater allows its reuse that can significantly reduce the demand for freshwater supplies. Herein, we demonstrate the possibility of enhancing the removal efficiency of solid contaminants from greywater using MHz-order surface acoustic waves (SAWs). A key distinction of the use of these high frequency surface acoustic waves, compared to previous work on its lower frequency (kHz order) bulk ultrasound counterpart for wastewater treatment, is the absence of cavitation, which can inflict considerable damage on bacteria, thus limiting the intensity and duration, and hence the efficiency enhancement, associated with the acoustic exposure. In particular, we show that up to fivefold improvement in the removal efficiency can be obtained, primarily due to the ability of the acoustic pressure field in homogenizing and reducing the size of bacterial clusters in the sample, therefore providing a larger surface area that promotes greater bacteria digestion. Alternatively, the SAW exposure allows the reduction in the treatment duration to achieve a given level of removal efficiency, thus facilitating higher treatment rates and hence processing throughput. Given the low-cost of the miniature chipscale platform, these promising results highlight its possibility for portable greywater treatment for domestic use or for large-scale industrial wastewater processing through massive parallelization.

MHz-order surface acoustic wave thruster for underwater silent propulsion

High frequency surface acoustic waves with MHz order are able to generate intense acoustic streaming flow transformed from the attenuation of acoustic radiation pressure in viscous fluid. We here demonstrate the fluid propulsion force onto the device of SAW chip as a reaction force based on the change of momentum flux of acoustic streaming flow. A pendulum force balancing method is established to simply quantify 40 MHz SAW propulsion force onto lithium niobate (LN) chip. Propulsion force with 5 mN can be easily generated by applying ∼1 W power to SAW device. A theoretical model, along with acoustic streaming profile via particle image velocimetry, is proposed to explain the propulsion force based on applied power and different fluid viscosity. Finally, we propose a model optimizing LN chip size to perform maximum propulsion force per unit device area. The maximum force of ∼ 10 mN/cm2 with 1 W power using 40 MHz SAW has been performed in water. With high-frequency, short attenuation length, relatively low applied power and large propulsion force per surface area, it shows great potential of SAW-induced thruster for underwater silent propulsion and transportation.

Holographic measurement of surface acoustic wave parameters in crystals

The theoretical basis of a specialized technique for applying digital holographic interferometry to measure the parameters of surface acoustic waves is presented, a measuring system for visualization and quantitative analysis of the parameters of ultralow-amplitude high-frequency oscillations arising in electronic devices using surface acoustic waves is developed, and experimental results of the study of surface acoustic waves in crystals of lithium niobate are obtained. In this case, to ensure the possibility of recording precision double-exposure interferograms of high-frequency surface acoustic waves, a picosecond pulsed laser with two-stage frequency multiplication was used as a radiation source, and to increase the spatial resolution of the system with the possibility of observing a wide field of view, an adjustable optical zoom of the incoming image was applied to the matrix input (based on charge-coupled devices) of the recording camera and digital zoom was used for obtained interferogram. We achieved the measuring sensitivity of the surface acoustic waves amplitude and spatial-temporal resolution allowing visualization and measurement of surface acoustic waves with amplitudes of the order of 1 nm and frequencies of the order of 10 MHz, which is far beyond the capabilities of standard methods of holographic interferometry.

Sidewall Quantum Wires on GaAs (001) Substrates

We study the structural, optical, and transport properties of sidewall quantum wires on GaAs(001) substrates. The QWRs are grown by molecular beam epitaxy (MBE) on GaAs(001) substrates prepatterned with shallow ridges. They form as a consequence of material accumulation on the sidewalls of the ridges during the overgrowth of a quantum well (QW) on the patterned surface. The QWRs are approximately 200 nm-wide and have emission energies red-shifted by 27meV with respect to the surrounding QW. Spatially resolved spectroscopic photoluminencence studies indicate that the QW thickness reduces around the QWRs, thus creating a 4 meV energy barrier for the transfer of carriers from the QW to the QWR. We show that the QWRs act as efficient channels for the transport of optically excited electrons and holes over tens of {\mu}m by a high-frequency surface acoustic wave (SAW). These results demonstrate the feasibility of efficient ambipolar transport in QWRs with sub-micrometer dimensions, photolithographically defined on GaAs substrates.

Fabrications of L-band LiNbO3-based SAW Resonators for Aerospace Applications.

High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an L-band SAW resonator based on 128° Y-X LiNbO3 substrate. The design parameters of SAW resonator were optimized by the finite element (FEM) method and the coupling-of-mode (COM) theory. Electron-beam lithography (EBL) technology was used to fabricate the submicron-scale of interdigital transducers (IDTs) and grating reflectors. The effects of some key EBL processes (e.g., the use of electron beam resist, the choice of metal deposition methods, the charge-accumulation effect, and the proximity-effect) on the fabrication precision of SAW devices were discussed. Experimentally, the LiNbO3-based SAW resonators fabricated using improved EBL technology exhibits a Rayleigh wave resonance peaks at 1.55 GHz with return loss about −12 dB, and quality factor Q is 517. Based on this SAW resonator, the temperature and strain sensing tests were performed, respectively. The experimental results exhibit a well linear dependence of temperature/strain on frequency-shift, with a temperature sensitivity of 125.4 kHz/°C and a strain sensitivity of −831 Hz/με, respectively.

High-frequency surface acoustic wave devices based on epitaxial Z-LiNbO3 layers on sapphire

Filter market demands push the development of new piezoelectric materials to address the modern telecommunication challenges. Combining composite wafers with an epitaxial piezoelectric layer and a said high velocity and acoustic quality substrate is a promising way to answer those demands. However, the fabrication of high-quality LiNbO3 films with reproducible physical properties is complicated by the difficulty in controlling volatile Li2O incorporation into the film and of measuring its composition. So far, large-scale production of films with physical properties suitable for the targeted applications is not available. In this paper, lithium niobate films with controlled nonstoichiometry were deposited by means of pulsed injection metalorganic vapor phase deposition. We have demonstrated a high acoustical performance for surface acoustic wave devices operating in the frequency range of 3.7 GHz up to 5.3 GHz and based on grown epitaxial Z-axis oriented LiNbO3 films on sapphire. An electromechanical coupling of 8% for the Rayleigh wave at 5.3 GHz was demonstrated experimentally.

High-frequency V-doped ZnO/SiC surface acoustic wave devices with enhanced electromechanical coupling coefficient

The rapid development of large-volume and high-speed mobile communication systems has increased the demand for high-frequency and wide-band surface acoustic wave (SAW) devices. In this work, ZnO films and V-doped ZnO (V:ZnO) films with (0002) orientation were grown on SiC substrates using a magnetron sputtering method. High-frequency SAW resonators with the resonant frequency ranging from 4 GHz to 6 GHz were fabricated on the above structures. V:ZnO/SiC SAW resonators exhibited a significantly increased electromechanical coupling coefficient (K2) in the range of 2.80%–5.12%, in a wide normalized thickness range, which is more than a 75% increase compared to that of ZnO-based SAW resonators. Besides, the high quality factor Q ranging from 431 to 593 and an improvement in the figure of merit value were observed for the V:ZnO/SiC SAW resonators operating at 4–6 GHz. Finally, 4.58 GHz SAW filters using V:ZnO films with a larger bandwidth and a lower insertion loss were achieved. This work clearly shows that the ZnO/SiC SAW properties can be improved by V doping, and the V:ZnO/SiC structures have great potential for application in high-frequency and wide-band SAW filters.

High-velocity non-attenuated acoustic waves in LiTaO3/quartz layered substrates for high frequency resonators

Multilayered substrates for Surface Acoustic Wave (SAW) devices are able to combine SAW characteristics that cannot coexist in a single crystal substrate and, thus, meet the strong requirements of the new class of SAW devices developed for the next generations of communication systems. Recently, high performance resonators arranged on LiTaO3/quartz bonded wafers and utilizing shear horizontally polarized acoustic waves were reported. Leaky SAWs with quasi-longitudinal polarization propagate faster and can facilitate fabrication of high frequency SAW devices but generally leak strongly into the substrate. This paper describes how the LiTaO3/quartz structure can be optimized to allow longitudinal SAWs to propagate without attenuation. Due to the symmetry consideration, which is supplemented by a rigorous numerical simulation of the admittance functions of SAW resonators and an accurate extraction of the propagation losses, the found optimal LiTaO3 and quartz orientations with the optimized LiTaO3 thickness ensure the propagation of acoustic waves with a velocity exceeding 5400 m/s and an electromechanical coupling of 6.8% in resonators with Q factors up to 10,000. The optimal LT/quartz structures with plate thicknesses varying between 0.32 and 0.68 wavelengths can be employed in SAW resonators operating at high frequencies, up to 5 GHz. The existence of numerous orientations in quartz supporting the propagation of non-attenuated longitudinal SAWs is explained based on the concept of exceptional bulk waves, which is a part of SAW theory.

Surface acoustic wave-based micromixing enhancement using a single interdigital transducer

The realization of efficient mixing of samples inside a microfluidic channel is essential for performing numerous biological assays in miniaturized total analysis systems. The low Reynolds number flows at the microscale create laminar streams inside the microchannel, limiting flow mixing to a molecular diffusion level. In this paper, we propose a simple and efficient acoustofluidic mixing technique inside a single-layered polydimethylsiloxane (PDMS) microfluidic channel. The proposed surface acoustic wave (SAW)-based system composed of a straight interdigitated transducer (IDT) is positioned beneath the PDMS microchannel. Fluorescein dye dissolved in deionized water (sample fluid) and deionized water (sheath fluid) was introduced through the first and second inlets of the PDMS microchannel, respectively. Their flow rates were controlled such that the sample fluid with fluorescein dye was hydrodynamically focused close to the bottom of the microchannel by the sheath fluid. High-frequency (140 MHz) SAWs, generated from the IDT placed right beneath the first outlet, mixed the two fluids under the influence of strong acoustic streaming flows. The mixed samples were then collected at the two outlet ports for further analysis of the mixing efficiency. The developed acoustofluidic mixing device required an input voltage of 12 Vpp at a total flow rate of 50 μl/min to realize complete mixing. At a similar applied voltage, the throughput of the proposed device could be further increased to 200 μl/min with a mixing efficiency of &amp;gt;90%.

High-Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure

In this letter, highly (0002) oriented ZnO piezoelectric films were deposited on high acoustic velocity SiC substrates. Surface acoustic wave (SAW) devices on ZnO/SiC layered structure operating in the fundamental mode with high frequency to the 7-GHz range were successfully fabricated for the first time. The comprehensive experimental and theoretical investigations about phase velocities ${V}_{p}$ , the electromechanical coupling coefficients ${K}^{{2}}$ , and quality factors Q of one-port SAW resonators have been studied considering various ZnO normalized thicknesses ${h}/\lambda $ . The resonators with large ${K}^{{2}}$ and high Q are implemented over 5–7 GHz demonstrating ${K}^{{2}}$ of 0.47%–2.83% and Q of 146–549. Specifically, a high ${K}^{{2}}$ of 2.83% and a large Q of 549 are simultaneously achievable for the resonator at 5.19 GHz. Finally, with the high ${V}_{p}$ of ZnO/SiC structure being up to 6800 m/s at ${h}/\lambda = {0.14}$ , a 6.8-GHz SAW filter was achieved. Our work shows that the ZnO/SiC structure is of great potential for high-frequency SAW devices application.

Paralytic shellfish poisoning toxin detection based on cell-based sensor and non-linear signal processing model

ABSTRACTParalytic shellfish poisoning (PSP) toxin is widely contained in seafood and its product. It brings great harm to human health when people eat it. During the past two decades, shellfish toxin quantitative analysis methods develop fast, such as mouse bioassay (MBA), chemical analysis method, immunoassay and cell-based assay (CBA). However, there are some disadvantages in these analytical methods such as time consuming, high cost. Therefore, a more suitable method is in demand. In this study, a novel method using high-frequency surface acoustic wave resonator (SAWR)-based sensor combined with living cells was developed for shellfish toxin continuous monitoring. The mouse tongue isolated taste bud (MTITB) cells cell lines were used as the sensing elements to establish the sensor device for PSP toxin carbamoyl toxin (CT) quantitative monitoring. The sensor device is in serial with SAWR. SAWR output frequency was recorded for detecting characterization. HEK293 cell lines were cultured on electrode and utilized as negative control. The results showed that MTITB cell-based sensor had selective responses to CT. This method is promising in PSP toxins rapid quantitative determination.

Anomalous Attenuation of Piezoacoustic Surface Waves by Liquid Helium Thin Films

We report on the observation of an anomalously high attenuation of high frequency surface acoustic waves by thin films of liquid $^{4}$He. The piezoelectric acoustic waves propagate along the surface of a lithium niobate substrate, which is coated with varying amounts of liquid helium. When the thickness of the helium layer is much larger than the wavelength of the surface acoustic wave on the substrate its attenuation is dominated by the excitation of compressional waves into the liquid, in good agreement with theory and previous measurements. However, for sufficiently thin helium coverage, we find that the acoustic wave attenuation is significantly increased beyond that measured with the substrate submerged in bulk liquid. Possible mechanisms for this enhanced attenuation are discussed.

Flip-chip gate-tunable acoustoelectric effect in graphene

We demonstrate a flip-chip device for performing low-temperature acoustoelectric measurements on exfoliated two-dimensional materials. With this device, we study gate-tunable acoustoelectric transport in an exfoliated monolayer graphene device, measuring the voltage created as high-frequency surface acoustic waves dynamically drive the graphene charge carriers, the density of which we simultaneously control with a silicon back-gate. We demonstrate ambipolar dependence of the acoustoelectric signal, as expected from the sign of the graphene charge carriers. We observe a marked reduction in the magnitude of the acoustoelectric signal over a well-defined range of density in the vicinity of charge neutrality, which we attribute to a spatially heterogeneous charge-disorder landscape not directly revealed by conventional transport measurements.

Texture-enhanced Al-Cu electrodes on ultrathin Ti buffer layers for high-power durable 2.6 GHz SAW filters

Achieving high resistance to acoustomigration and electromigration in the electrodes used in high-power and high-frequency surface acoustic wave (SAW) filters is important to mobile communications development. In this study, the effects of the Ti buffer layers on the textures and acoustomigration and electromigration resistances of the Al-Cu electrodes were studied comprehensively. The results demonstrate that both power durability and electromigration lifetime are positively correlated with the Al-Cu electrode texture quality. Ultrathin (∼2 nm) Ti can lead to the strongest Al-Cu (111) textured electrodes, with a full width at half maximum of the rocking curve of 2.09°. This represents a remarkable enhancement of the power durability of high-frequency 2.6 GHz SAW filters from 29 dBm to 35 dBm. It also produces lifetime almost 7 times longer than those of electrodes without Ti buffer layers in electromigration tests. X-ray diffraction and transmission electron microscopy analyses revealed that these improved acoustomigration and electromigration resistances can be attributed primarily to the reductions in overall and large-angle grain boundaries in the highly Al-Cu (111) textured electrodes. Furthermore, the growth mechanism of highly Al-Cu texture films is discussed in terms of surface-interface energy balance.