High Frequency Surface Acoustic Wave Research Articles

Coherent optical coupling to surface acoustic wave devices

Surface acoustic waves (SAW) and associated devices are ideal for sensing, metrology, and hybrid quantum devices. While the advances demonstrated to date are largely based on electromechanical coupling, a robust and customizable coherent optical coupling would unlock mature and powerful cavity optomechanical control techniques and an efficient optical pathway for long-distance quantum links. Here we demonstrate direct and robust coherent optical coupling to Gaussian surface acoustic wave cavities with small mode volumes and high quality factors (>105 measured here) through a Brillouin-like optomechanical interaction. High-frequency SAW cavities designed with curved metallic acoustic reflectors deposited on crystalline substrates are efficiently optically accessed along piezo-active directions, as well as non-piezo-active (electromechanically inaccessible) directions. The precise optical technique uniquely enables controlled analysis of dissipation mechanisms as well as detailed transverse spatial mode spectroscopy. These advantages combined with simple fabrication, large power handling, and strong coupling to quantum systems make SAW optomechanical platforms particularly attractive for sensing, material science, and hybrid quantum systems.

Rayleigh wave propagation in centrosymmetric materials with micro-stiffness, flexoelectric and micro-inertia effects

A theoretical investigation of Rayleigh waves propagation in polarized media has been carried out using a reformulated flexoelectric theory for isotropic dielectrics with micro-inertia effect. Within this non-classical theory, the internal energy density is the functional of the strain tensor, dilatation gradient, deviatoric part of stretch gradient and rotation gradient tensors, polarization vector, and polarization gradient. The obtained system of governing equations additionally contains three material length-scale parameters to account the micro-stiffness effect, one material constant to capture the micro-inertia effect, two flexoelectric constants to describe the flexoelectric effect and three length scale parameters related to the polarization gradient. To solve the coupled governing equations, the method of Lamé-type potentials for mechanical displacement and electric polarization vectors is used. The influences of various factors such as micro-stiffness, flexoelectricity, electric quadrupoles and micro-inertia effects on the phase velocity of the Rayleigh waves in a homogeneous isotropic half-space are studied. It is found that above effects become significant with the increase of the wavenumber. This study can be important for the investigation of high frequency surface acoustic waves in dielectric materials.

In situ monitoring of lithium electrodeposition using transient grating spectroscopy

Mechanisms of lithium electrodeposition, which overwhelmingly affect lithium metal battery performance and safety, remain insufficiently understood due to its electrochemical complexity. Novel, nondestructive, and in situ techniques to probe electrochemical interfaces during lithium electrodeposition are highly desirable. In this work, we demonstrate the capability of transient grating spectroscopy to monitor lithium electrodeposition at the micrometer scale by generating and detecting surface acoustic waves that sensitively interact with the deposited lithium. Specifically, we show that the evolution of the frequency, velocity, and damping rate of the surface acoustic waves strongly correlates with the lithium nucleation and growth process. Our work illustrates the sensitivity of high-frequency surface acoustic waves to micrometer scale changes in electrochemical cells and establishes transient grating spectroscopy as a versatile platform for future in situ investigation of electrochemical interfaces.

Shake It Off! Acoustic Manipulation of Lipid Vesicles for Mass Spectrometric Analysis.

Analyzing lipid assemblies, including liposomes and extracellular vesicles (EVs), is challenging due to their size, diverse composition, and tendency to aggregate. Such vesicles form with a simple phospholipid bilayer membrane, and they play important roles in drug discovery and delivery. The use of mass spectrometry (MS) allows for broad analysis of lipids from different classes; however, their release from the higher order structural aggregates is typically achieved by chemical means. Mechanical disruption by high frequency surface acoustic waves (SAW) is presented as an appealing alternative to preparing lipid vesicles for MS sampling. In this work, SAWs used to disrupt liposomes allow for the direct analysis of their constituent lipids by employing SAW nebulization with corona discharge (CD) ionization. We explore the effects of duration, frequency, and incorporation of nonpolar lipids, including cholesterol, on the SAW's ability to disrupt the liposome. We also report on the successful MS analysis of liposome-derived lipids along with cytochrome C in solution, thus demonstrating applications to aqueous samples and native MS conditions.

Dispersion of surface elastic waves on Z-LiNbO3 films on Z-sapphire

Epitaxial thin films of lithium niobate with a thickness of 160 nm, oriented along the crystallographic c axis, were grown by direct liquid injection chemical vapor deposition on c-sapphire substrates. Different families of very high-frequency surface acoustic waves with general polarization exist in such piezoelectric films on high-velocity substrates. Surface Brillouin light scattering measurements, complemented with fast finite element analysis of wave dispersion, demonstrate Rayleigh, leaky shear, and leaky longitudinal surface waves, excited at frequencies between 10 and 30 GHz. The Brillouin technique reveals dispersion and anisotropy of propagation without the implementation of high-frequency surface acoustic wave transducers.

In-droplet cell lysis of AC16 human cardiomyocyte cells via surface acoustic waves.

Although several lysis methods are available, biomedical applications are pushing the demand for miniaturised systems and thus for new ways to lyse cells in small volumes. In this work, we demonstrate in-droplet cell lysis of AC16 human cardiomyocyte cells in 20 μL droplets using high frequency surface acoustic waves. The acoustic streaming leads to high shear flow creating porous or breaking the cell membrane and releasing intracellular material. Contrary to previous work where the lysis efficiency is measured by a cell-permeant dye that can be used to determine cell viability, here we propose to quantify the DNA extracted from the cells as a measure of the lysis efficiency. This reagent-free method provides a valuable cell lysis alternative for many biological and biomedical applications, particularly for the development of point-of-care platforms.

Elucidating the oscillation instability of sessile drops triggered by surface acoustic waves

Surface acoustic waves (SAWs) are used in droplet microfluidics for operations on sessile droplets, such as internal mixing, directional motion, or nebulization. An unsolved problem has been to understand how high frequency (MegaHz) SAWs can counterintuitively cause low frequency (10-500 Hz) oscillations on the drop free surface, which is known to enhance drop mobility. Using simultaneous measurements of the free-surface dynamics and internal acoustic pressure, we find that the drop oscillation instability results from coupling between an intracavity acoustic mode excited by the SAW, and an inertia-capillary surface eigenmode, through amplitude modulation and delayed radiation pressure feedback.

Focused surface acoustic wave induced nano-oscillator based reservoir computing

We demonstrate using micromagnetic simulations that a nanomagnet array excited by surface acoustic waves (SAWs) can work as a reservoir. An input nanomagnet is excited with focused SAW and coupled to several nanomagnets, seven of which serve as output nanomagnets. To evaluate memory effect and computing capability, we study the short-term memory (STM) and parity check (PC) capacities, respectively. The SAW (4 GHz carrier frequency) amplitude is modulated to provide a sequence of sine and square waves of 100 MHz frequency. The responses of the selected output nanomagnets are processed by reading the envelope of their magnetization states, which is used to train the output weights using the regression method. For classification, a random sequence of 100 square and sine wave samples is used, of which 80% are used for training, and the rest are used for testing. We achieve 100% training and 100% testing accuracy. The average STM and PC are calculated to be ∼4.69 and ∼5.39 bits, respectively, which is indicative of the proposed acoustically driven nanomagnet oscillator array being well suited for physical reservoir computing applications. The energy dissipation is ∼2.5 times lower than a CMOS-based echo-state network. Furthermore, the reservoir is able to accurately predict Mackey-Glass time series up to several time steps ahead. Finally, the ability to use high frequency SAW makes the nanomagnet reservoir scalable to small dimensions, and the ability to modulate the envelope at a lower frequency (100 MHz) adds flexibility to encode different signals beyond the sine/square waves classification and Mackey-Glass predication tasks demonstrated here.

Effect of interdigital transducers structure on insertion loss of high-frequency surface acoustic wave devices

Effect of interdigital transducers structure on insertion loss of high-frequency surface acoustic wave devices

High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure.

A high-frequency surface acoustic wave (SAW) resonator, based on sandwiched interdigital transducer (IDT), is presented. The resonator has the structure of diamond/AlN/IDT/AlN/diamond, with Si as the substrate. The results show that its phase velocity and electromechanical coupling coefficient are both significantly improved, compared with that of the traditional interdigital transduce-free surface structure. The M2 mode of the sandwiched structure can excite an operation frequency up to 6.15 GHz, with an electromechanical coupling coefficient of 5.53%, phase velocity of 12,470 m/s, and temperature coefficient of frequency of −6.3 ppm/°C. This structure provides a new ideal for the design of high-performance and high-frequency SAW devices.

Real-time laser ultrasonic monitoring of laser-induced thermal processes

Intra- and inter-layer integrity of components fabricated with advanced manufacturing techniques, such as laser powder bed fusion, is dependent upon rapid heating, melting, and solidification processes. There is a need for new techniques to provide in situ feedback of these processes. Here a laser-based ultrasonic technique to probe thermal effects induced by a high-power continuous wave laser in titanium samples is described. Numerical simulations were performed to show that, for a spatially uniform heating beam, laser-induced surface acoustic waves are strongly influenced by surface heating conditions, are dispersive in the case of rapid heating, and that an abrupt velocity reduction happens upon the onset of surface melting. Furthermore, laser-based ultrasound experimental results which monitor the transient change of surface wave travel time associated with high power laser surface heating are provided. A pulsed laser is used to generate high frequency surface acoustic waves that propagate through the laser-heated region and are detected using a photorefractive crystal-based interferometer. Qualitative agreement is observed between theory and experiment with both showing a rapid reduction in the surface wave velocity at the onset of illumination and further decrease in surface wave velocity associated with melting. It is demonstrated that changes in the surface wave velocity can be used to track local heating and detect the onset of surface melting in real time.

Optical coherence elastography to evaluate depth-resolved elasticity of tissue.

Skin-elasticity measurements can assist in the clinical diagnosis of skin diseases, which has important clinical significance. Accurately determining the depth-resolved elasticity of superficial biological tissue is an important research direction. This paper presents an optical coherence elastography technique that combines surface acoustic waves and shear waves to obtain the elasticity of multilayer tissue. First, the phase velocity of the high-frequency surface acoustic wave is calculated at the surface of the sample to obtain the Young's modulus of the top layer. Then, the shear wave velocities in the other layers are calculated to obtain their respective Young's moduli. In the bilayer phantom experiment, the maximum error in the elastic estimation of each layer was 2.2%. The results show that the proposed method can accurately evaluate the depth-resolved elasticity of layered tissue-mimicking phantoms, which can potentially expand the clinical applications of elastic wave elastography.

Fabrication of high frequency SAW devices using tri-layer lift-off photolithography

A tri-layer lift-off photolithography technique is presented to enable the fabrication of surface acoustic wave (SAW) devices with near GHz fundamental operating frequencies. SAW devices require high-quality micron-scale features for high frequency operation, a requirement that challenges traditional UV photolithography techniques. The presented process is a modified version of a previously reported tri-layer photolithography process intended for Si and SiO2 substrates which allows for compatibility with materials that are piezoelectric and pyroelectric, often used as the substrate in SAW devices. The process uses a lithographic tri-layer consisting of layers of lift-off resist (LOR) on the bottom, back anti-reflection coating (BARC) in the middle, and photoresist (PR) on top. The addition of the BARC layer prevents back reflection of exposure light, improves the structural integrity of the lithographic stack, and decouples the PR and LOR development, improving resolution by a factor of two over traditional lift-off photolithography techniques. We demonstrate the fabrication of a SAW device with an interdigital transducer (IDT) pitch of 4 μm (minimum feature size of 1 μm) on 128° Y-X cut lithium niobate. The device produces a dip in the measured S11 spectrum at 994.5 MHz, corresponding to the fundamental operating frequency of the device. The fundamental operating frequency of the SAW device is also determined theoretically via numerical modelling and found to be 995.5 MHz. The process thus enables the reliable fabrication of high frequency SAW devices that exhibit excellent agreement with numerical results.

Acoustic enhancement of aerobic greywater treatment processes

Increasing the efficiency of aerobic greywater treatment is crucial to ensure that greywater recycling can be effectively implemented in individual and community households. In this work, we demonstrate that exposing greywater samples to low intensity high frequency (MHz-order) surface acoustic waves (SAWs) during the aerobic treatment process can result in increases in the total suspended solids (TSS), chemical oxygen demand (COD) and biochemical oxygen demand (BOD) removal efficiencies by 24%, 24% and 21%, respectively, over a 2 h aerobic digestion period, and up to 37% (TSS removal efficiency) over a 4 h period compared to the unexposed controls. These values are considerably higher than that typically obtained with lower frequency (kHz-order) bulk ultrasound, particularly because the SAW does not cause denaturation of bacteria in the greywater suspension unlike its low frequency counterpart. The SAW enhancement in removal efficiencies can primarily be attributed to the acoustic radiation pressure and acoustic streaming that it generates, which act to efficiently deagglomerate the bacterial flocculates in addition to promoting more uniform mixing of the suspended waste, bacteria and dissolved oxygen in the sample. Also, the results indicate that in the presence of air bubbles in the greywater, the MHz-order SAW treatment remains effective. Additionally, we show that it is possible to further increase the TSS removal efficiency by about twofold through a hybrid process. This ability to significantly accelerate the rate of aerobic digestion to achieve a given removal efficiency level highlights the potential of this novel low-cost technology for improving domestic greywater treatment.

Protected Long-Distance Guiding of Hypersound Underneath a Nanocorrugated Surface.

In nanoscale communications, high-frequency surface acoustic waves are becoming effective data carriers and encoders. On-chip communications require acoustic wave propagation along nanocorrugated surfaces which strongly scatter traditional Rayleigh waves. Here, we propose the delivery of information using subsurface acoustic waves with hypersound frequencies of ∼20 GHz, which is a nanoscale analogue of subsurface sound waves in the ocean. A bunch of subsurface hypersound modes are generated by pulsed optical excitation in a multilayer semiconductor structure with a metallic nanograting on top. The guided hypersound modes propagate coherently beneath the nanograting, retaining the surface imprinted information, at a distance of more than 50 μm which essentially exceeds the propagation length of Rayleigh waves. The concept is suitable for interfacing single photon emitters, such as buried quantum dots, carrying coherent spin excitations in magnonic devices and encoding the signals for optical communications at the nanoscale.

A novel high frequency SAWR based sensor combined with living cells for shellfish toxin quantitative determination

Shellfish toxin can be easily found in seafood, and bring potential harm to human health. Nowadays some analytical methods are used for shellfish toxin quantitative detection. However, there are some disadvantages in these analytical methods such as time consuming, high cost, etc. Therefore, a more suitable method is in demand. In this study, a novel method using high frequency surface acoustic wave resonator (SAWR) based sensor combined with living cells was developed for shellfish toxin continuous monitoring. ECA9706 cell lines were used as the sensing elements to establish the sensor device for DSP toxin okadaic acid (OA) quantitative monitoring. The sensor device is in serial with SAWR. SAWR output frequency was recorded for detecting characterization. The OA concentration of prepared solutions could be characterized by using SAWR sensor, and good linear relationship between sensor responses and OA concentration is achieved. Liquid chromatography tandem mass spectrometry (LC–MS/MS) is used for characterization of OA content in shellfish extract. Good linear relationship between OA content and the concentration determination provided by SAWR sensor. HEK293 cells were fixed on electrode and utilized as negative control. The results showed that ECA9706 cell-based sensor had selective responses to OA. This method is promising in shellfish toxins rapid quantitative determination.

Surface acoustic waves increase magnetic domain wall velocity

Domain walls in magnetic thin films are being explored for memory applications and the speed at which they move has acquired increasing importance. Magnetic fields and currents have been shown to drive domain walls with speeds exceeding 500 m/s. We investigate another approach to increase domain wall velocities, using high frequency surface acoustic waves to create standing strain waves in a 3 micron wide strip of magnetic film with perpendicular anisotropy. Our measurements, at a resonant frequency of 248.8 MHz, indicate that domain wall velocities increase substantially, even at relatively low applied voltages. Our findings suggest that the strain wave derived effective magnetic field acts as an additional driver for domain wall motion.

High-frequency surface acoustic wave resonator with ScAlN/hetero-epitaxial diamond

High-frequency and wideband surface acoustic wave (SAW) devices have become an important topic in 5G communication systems and beyond. For this purpose, piezoelectric ScAlN thin films deposited on high SAW velocity diamond are studied in SAW resonators on the polycrystalline diamond (PCD) and hetero-epitaxial diamond (HED) substrates. A very strong c-axis orientation of ScAlN on HED was confirmed. Interdigital transducers of 0.8 μm and 0.5 μm were fabricated to realize 2.2 to 3.5 GHz high-frequency resonators. High Q values were obtained for the 2.3–2.5 GHz device on both PCD and HED. Additionally, a high electro-mechanical coupling coefficient (K2) of 5.40–5.52% and high SAW velocities of 7400–7766 m/s were obtained in the 2.3–2.5 GHz devices. In comparison to the simulated coupling coefficient results of a previous report, ScAlN/diamond might have higher K2 for the Sezawa wave.

Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films grown on silicon substrates by molecular beam epitaxy (MBE). We report on the experimental frequency response and electromechanical properties of 400 nm-thick crystalline AlScN acoustic resonators with up to 12% Sc/(Sc+Al) ratio. The film thickness is optimized for operation at the SHF range, targeting emerging wireless communication standards, such as 4G LTE/5G. We report on high-performance acoustic devices that take advantage of the crystallinity, and high piezoelectric properties of 400 nm-thick epitaxial AlScN films. Our work presents enhanced effective electromechanical coupling coefficients (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) up to 5.3% and unloaded quality factors (Q <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> ) of ~192 at 3-10 GHz. However, fabrication challenges due to the high-stress levels of sub-micron AlScN epi-layers grown on Si substrates remain challenging and will be discussed in this paper. [2019-0231].

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate.

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order surface acoustic wave (SAW) devices generate enormous accelerations on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid handling at the microscale-and even at the nanoscale. In this paper we explicitly demonstrate two major fabrication methods of SAW devices on lithium niobate: the details of lift-off and wet etching techniques are described step-by-step. Representative results for the electrode pattern deposited on the substrate as well as the performance of SAW generated on the surface are displayed in detail. Fabrication tricks and troubleshooting are covered as well. This procedure offers a practical protocol for high frequency SAW device fabrication and integration for future microfluidics applications.