A fluorine substituted healable silicone elastomer is developed as actuator dielectric material in this study. The silicone possesses both high electrical breakdown strength (>65 kV/mm) and admirable intrinsic permittivity (more than 4.3 at 50 Hz). Moreover, with fluorine stimulated carbamate bond exchange, the networks of prepared silicones can be recovered with more than 80% of mechanical and insulating reprocessing efficiency. Importantly, electrical breakdown damage is able to be healed at high healing efficiency (90%), which overcomes the classical dilemma between insulation and healability. The study provides a new way to enhance the performance and reliability of actuator polymer dielectrics, especially at high electric field intensity. • Fluorine substitution is found to promote healability of silicone. • Not only mechanical damage, but also electrical breakdown damage can be healed. • The electrical and mechanical properties are comparable with commercial silicone. • Effects including fluorine content and crosslinking on properties were studied.