AbstractElectron resist properties of three vinylaromatic polymers, polystyrene, polyvinylcarbazole and poly(3‐bromo‐N‐vinylcarbazole) have been examined. Polystyrene and polyvinylcarbazole are high contrast resists of high dry etch resistance, but for adequate sensitivity (D ⩽ ca. 10 μC/cm2 at 25 kV) high molecular weights are needed (Mw ⩾ 106). Poly(3‐brotno‐N‐vinylearbazole) has a much higher sensitivity (D = ca. 2 μC/cm2) than the unsubstituted polymer. The sensitivity of polystyrene and polyvinylcarbazole is increased appreciably by addition of organic bisazides as crosslinking agents, e.g. a sensitivity increase of almost an order of magnitude was found upon addition of 3% 4, 4′‐diazidostilbene to polystyrene, high contrast being maintained.