Grating optics lie in the heart of X-ray spectroscopy instruments. The low efficiency and angular dispersion of conventional single-layer-coated gratings significantly limit the transmission and energy resolution of monochromators and spectrometers, particularly in the tender X-ray region (E=1−5 keV). Multilayer-coated blazed gratings (MLBGs) operating at high diffraction orders offer the advantage of achieving both high efficiency and high dispersion simultaneously. Tender X-ray monochromators and spectrometers using different high-order MLBGs have been designed, all demonstrating one to two orders of magnitude higher transmission compared to conventional systems. By employing a 2400 l/mm MLBG at the −4th or −8th diffraction order, the theoretical energy resolution of the instrument is improved by two to three times at 2.5 keV. Two MLBGs operating at the −2nd and −4th orders have been fabricated, showcasing remarkable efficiencies of 34%–12% at 2.5 keV, surpassing that of single-layer-coated gratings by an order of magnitude. Further optimization of manufacturing accuracy can yield even higher efficiencies. The measured angular dispersion agrees well with theoretical predictions, supporting the potential for high resolution. High-order MLBG optics pave the way for a new generation of tender X-ray monochromators/spectrometers that offer both high transmission and high resolution.
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