Miniaturized optical benches process free-space light propagating in-plane with respect to the substrate and have a large variety of applications, including the coupling of light through an optical fiber. High coupling efficiency is usually obtained using assembled micro-optical parts, which considerably increase the system cost and integration effort. In this work, we report a high coupling efficiency, monolithically integrated silicon micromirror with controlled three-dimensional (3D) curvature that is capable of manipulating optical beams propagating in the plane of the silicon substrate. Based on our theoretical modeling, a spherical micromirror with a microscale radius of curvature as small as twice the Gaussian beam Rayleigh range provides a 100% coupling efficiency over a relatively long optical path range. Introducing dimensionless parameters facilitates the elucidation of the role of key design parameters, including the mirror's radii of curvature, independent of the wavelength. A micromachining method is presented for fabricating the 3D micromirror using fluorinated gas plasmas. The measured coupling efficiency was greater than 50% over a 200-μm optical path, compared to less than 10% afforded by a conventional flat micromirror, which was in good agreement with the model. Using the 3D micromirror, an optical cavity was formed with a round-trip diffraction loss of less than 0.4%, resulting in one order of magnitude enhancement in the measured quality factor. A nearly 100% coupling was also estimated when matching the sagittal and tangential radii of curvature of the presented micromirror’s surface. The reported class of 3D micromirrors may be an advantageous replacement for the optical lenses usually assembled in silicon photonics and optical benches by transforming them into real 3D monolithic systems while achieving wideband high coupling efficiency over submillimeter distances. Scientists from France and Egypt have developed spherical micromirrors that can couple optical fibres with almost 100% efficiency. Yasser Sabry and colleagues fabricated their monolithically-integrated mirrors in a silicon platform by a technique incorporating fluorinated gas plasmas and then coating the etched surface with a 100-nm-thick layer of aluminium. The resulting broadband mirrors had curvatures of 30–200 μm and exhibited reflectivities of >92% in the visible and near-infrared spectral regimes. The combination of high reflectivity and almost perfect coupling to optical fibres allows for the creation of miniature integrated optical cavities with a round trip transmission of better than 99.6% multiplied by the mirror reflectivity and an overall Q-factor of around 3000. This performance is an order of magnitude better than that achieved using flat mirrors.
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