Scanning Heterodyne Research Articles

A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient

A new scanning microscope scheme which can map both phase and amplitude change of the probe beam is introduced. We will show that the true surface structure can be imaged by using the results of phase measurements while the amplitude image represents the map of the magnitude of the effective local reflection coefficient (ELRC). Relation between the surface structure and the ELRC is discussed. Spatial resolution is 0.67 microm which is limited by diffraction and the precision for measuring point-to-point variation of the average height of the surface structure is a few nanometers. Potential of this microscopy on surface diagnostics is discussed.

Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations

We describe a scanning heterodyne interferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ∼1pm with a lateral resolution of <1μm. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.

A 2-D Phase-Detecting/Heterodyne-Scanning Retrodirective Array

A 2-D retrodirective array based on phase detection and heterodyne scanning is presented. The system integrates two single voltage-controlled oscillator phase-shifting networks that are autonomously controlled via a phase-detecting array and control circuit that eliminates the R4 path loss typical of other retrodirective arrays. Retrodirectivity is reported for angles of 0deg, +15deg, and -15deg at a transmitting frequency of 6.5 GHz.

Backside interferometric methods for localization of ESD-induced leakage current and metal shorts

Transient interferometric mapping (TIM) setup for ns-time ESD testing is adapted for post-stress failure analysis. Probing from the chip backside using the thermo-optical effect is used for localization of heating place related to failure. Two variants of 2D holographic interferometers, a Michelson and a “Wollaston” one, are used for a rough identification of a failure site. An adapted scanning heterodyne interferometer is used for accurate position determination with a 2 μm space resolution. The methods are applied to identify ESD damage and metal shorts. Sensitivity and space resolution are analyzed, supported by a 3D-thermal simulation of repetitive heating signal. A power sensitivity of 50 μW for a single point heat source is demonstrated.

Non-conventional joint-transform correlations for pattern recognition by use of grating filters and heterodyne scanning

The spatial light modulators (SLMs) at the Fourier planes of a conventional joint-transform correlation (JTC) are eliminated using simple grating filters such as rectangular and triangular ones. To achieve this goal, two non-conventional real-time JTC architectures are proposed: (a) the grating filter is used along with a heterodyning and one-dimensional optical scanning technique to capture the cross-correlation functions of the input images without major processing and (b) the one-dimensional optical scanning is eliminated to achieve a faster (but a little bit more complicated) processing. The proposed techniques significantly reduce the time processing needed for real-time applications by eliminating the drawbacks of the non-ideal characteristics of the SLMs.

On the Theory of Optical Hilbert transform for incoherent objects

The Hilbert transform as been investigated abundantly in coherent imaging. To the best of our knowledge, it is for the first time investigated in the context of incoherent imaging. We present a two-pupil optical heterodyne scanning system and analyze mathematically the design of its two pupils such that the optical system can perform the Hilbert transform on incoherent objects. Computer simulations of the idea clarify the theoretical results.

Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements

Propose here unique wavelength and hybrid wavelength-polarization and wavelength-polarization-time-multiplexed heterodyne optical interferometers using an internal self-referencing scheme enabling Angstrom level sensitivity optical path-length measurements. As a first step, a proof-of-concept wavelength multiplexed scanning heterodyne interferometer is built to test the surface quality of a test mirror, demonstrating ±100 A profile variations with a 0.9 A accuracy. The hybrid wavelength-polarization and wavelength-polarization-time-multiplexed interferometers can be used to form spectrally coded distributed sensors.

Scanning heterodyne Kerr-effect microscope for imaging of magnetic tracks

Design and performance of a new type of Kerr microscope based on heterodyne cross-polarized technique is presented. Weak depolarization of the probe beam due to longitudinal magneto-optical Kerr effect is detected by means of heterodyne mixing of the two cross-polarized and frequency shifted waves generated by Zeeman-type He–Ne laser. In comparison with the traditional homodyne method the proposed technique has better sensitivity and spatial resolution. Experimental results of imaging service magnetic tracks on real samples of magnetic disks are presented, showing better contrast and spatial resolution with respect to the images obtained from commercial devices available in the market.

Scanning Heterodyne Interferometer Setup for the Time-Resolved Thermal and Free-Carrier Mapping in Semiconductor Devices

An automated scanning interferometer setup for time resolved measurement of thermal and free carrier distribution in semiconductor devices during short stress pulses is presented. The semiconductor device is probed via the thermal and free carrier induced changes in the semiconductor refractive index using a heterodyne interferometer. The setup integrates device stressing facilities, data acquisition and laser beam scanning. The time and space resolutions are 3 ns and 1.5 /spl mu/m, respectively. Different modes of interferometer configurations are discussed with respect to their application. A program for the extraction of the optical phase shift and calculation of the power dissipation density from the optical signal is also presented. The error due to measurement accuracy, as well as that introduced by the data post processing, is estimated.

Observation of amplitude and phase in ridge and photonic crystal waveguides operating at 155??m by use of heterodyne scanning near-field optical microscopy

We apply heterodyne scanning near-field optical microscopy (SNOM) to observe with subwavelength resolution the amplitude and phase of optical fields propagating in several microfabricated waveguide devices operating around the 1.55 microm wavelength. Good agreement between the SNOM measurements and predicted optical mode propagation characteristics in standard ridge waveguides demonstrates the validity of the method. In situ observation of the subwavelength-scale distribution and propagation of optical fields in straight and 90 degrees bend photonic crystal waveguides facilitates a more detailed understanding of the optical performance characteristics of these devices and illustrates the usefulness of the technique for investigating nanostructured photonic devices.

Interferometric and holographic imaging of surface-breaking cracks

Two advanced nondestructive evaluation systems are developed for imaging surface-breaking cracks in aerospace materials. The systems use scanning heterodyne interferometry and frequency-translated holography principles to image ultrasonic displacement fields on material surfaces with high resolution and sensitivity. Surface-breaking cracks are detected and characterized by visualizing near-field ultrasonic scattering processes, which in turn results in local intensification of ultrasonic displacement fields in the immediate vicinity of a crack. The local intensification permits cracks to be easily distinguished from background levels, and creates unique displacement field images that follow the contours and morphology of the cracks with microscopic precision. The interferometric and holographic imaging approaches each provide noncontact and near optical-diffraction-limited measurement capabilities that are essential for probing ultrasonic displacement fields in the immediate vicinity of cracks. Several representative crack-imaging results are provided, along with detailed descriptions of both experimental techniques, and the capabilities and limitations of each method. The resulting systems provide simple yet very powerful tools for evaluating surface-breaking cracks in detail.

Measuring optical phase singularities at subwavelength resolution

We will present experimental and theoretical studies of optical fields with subwavelength structures, in particular phase singularities and coherent detection methods with nanometric resolution. An electromagnetic field is characterized by an amplitude, a phase and a polarization state. Therefore, experimental studies require coherent detection methods, which allow one to measure the amplitude and phase of the optical field with subwavelength resolution. We will present two instruments, a heterodyne scanning probe microscope (heterodyne SNOM) and a high resolution interference microscope (HRIM). We will review some earlier work using the heterodyne SNOM, in particular the measurement of phase singularities produced by a 1 μm pitch grating with 10 nm spatial sampling. Using the HRIM we have investigated the intensity and phase distributions (with singularities) in the focal region of microlenses. The measurements are compared with the results calculated by rigorous diffraction theory.

Spectral heterodyne tomography

A novel method of optical coherent tomography—spectral heterodyne tomography—is proposed. Spectral heterodyne tomography is based on parallel heterodyne detection of a multitude of frequencies of the light backscattered by an object under study. The result of this detection is a spectral distribution of the amplitude and phase of the scattered radiation. Subsequent numerical processing allows one to find the distribution of scattering centers over the depth corresponding to the point of entrance of the incident light. The proposed method is potentially characterized by a higher efficiency as compared with the most successful approach to optical coherence tomography, based on heterodyne scanning interferometry.

Measuring three-dimensional polarization with scanning optical probes

In optical fields with sub-wavelength features the longitudinal field components become considerable. Therefore, the paraxial concept of 2D polarization has to be replaced by the description of the local behaviour of the 3D vector of the electric field. The heterodyne scanning probe optical microscope (heterodyne SPOM) allows one to measure the amplitude and phase of the optical field with sub-wavelength resolution. In this paper we will review some results of earlier work showing clearly the 3D aspect of the polarization in the diffracted field from a 1 µm pitch surface relief grating and present a new set-up for a polarization sensitive heterodyne SPOM. For the correct interpretation of SPOM images of optical fields with sub-wavelength features it is important to be aware of the field conversion by the fibre tip probe.

Optical scanning cryptography for secure wireless transmission.

We propose a method for secure wireless transmission of encrypted information. By use of an encryption key, an image or document is optically encrypted by optical heterodyne scanning and hence encryption is performed on the fly. We call this technique optical scanning cryptography. The output of the heterodyne encrypted signal is at radio frequency and can be directly sent through an antenna to a secure site for digital storage to be prepared for decryption. In the secure site, an identical optical scanning system to that used for encryption is used, together with a decryption key, to generate an electrical signal. The electrical signal is then processed and sent to a computer to be used for decryption. Utilizing the stored information received from the encryption stage and the electrical information from the secure site, a digital decryption unit performs a decryption algorithm. If the encryption key and the decryption key are matched, the decryption unit will decrypt the image or document faithfully. The overall cryptosystem can perform the incoherent optical processing counterpart of the well-known coherent double-random phase-encoding technique. We present computer simulations of the idea.

Dual-axes confocal microscopy with post-objective scanning and low-coherence heterodyne detection

We present a dual-axes confocal microscope that employs postobjective scanning and low-coherence heterodyne detection to collect vertical cross-sectional images from biological tissue with high axial resolution, reduced noise from scattered light, deep tissue penetration, and a large dynamic range. This architecture can be scaled down to millimeter dimensions with microelectromechanical systems technology for performance of in vivo optical biopsy.

Submicrosecond speed optical coherence tomography system design and analysis by use of acousto-optics.

A novel high-speed no-moving-parts optical coherence tomography (OCT) system is introduced that acquires sample data at less than a microsecond per data point sampling rate. The basic principle of the proposed OCT system relies on use of an acousto-optic deflector. This OCT system has the attractive features of an acousto-optic scanning heterodyne interferometer coupled with an acousto-optic (AO) variable optical delay line operating in a reflective mode. Fundamentally, OCT systems use a broadband light source for high axial resolution inside the sample or living tissue under examination. Inherently, AO devices are Bragg-mode wavelength-sensitive elements. We identify that two beams generated by a Bragg cell naturally have unbalanced and inverse spectrums with respect to each other. This mismatch in spectrums in turn violates the ideal autocorrelation condition for a high signal-to-noise ratio broadband interferometric sensor such as OCT. We solve this fundamental limitation of Bragg cell use for OCT by deploying a new interferometric architecture where the two interfering beams have the same power spectral profile over the bandwidth of the broadband source. With the proposed AO based system, high (e.g., megahertz) intermediate frequency can be generated for low 1/f noise heterodyne detection. System issues such as resolution, number of axial scans, and delay-path selection time are addressed. Experiments described demonstrate our high-speed acousto-optically tuned OCT system where optical delay lines can be selected at submicrosecond speeds.

Angstrom-range optical path-length measurement with a high-speed scanning heterodyne optical interferometer.

A highly accurate method of optical path-length measurement is introduced by use of a scanning heterodyne optical interferometer with no moving parts. The instrument has demonstrated the potential to measure optical path length at angstrom resolution over continuous thickness in the micrometer range. This optical path length can be used to calculate the thickness of any material if the refractive index is known or to measure the refractive index of the material if the thickness is known. The instrument uses a single acousto-optic device in an in-line ultra-stable reflective geometry to implement rapid scanning in the microsecond domain for thickness measurements of the test medium.

Three-dimensional point spread functions of an optical heterodyne scanning image processor.

We study the three-dimensional (3-D) imaging properties of an optical heterodyne scanning image processor. The image processor is a two-pupil optical system capable of 3-D imaging coherently or incoherently, depending on the detection scheme used. We derive the imaging properties in terms of the two pupils and then show an important 3-D imaging application in scanning holography by deriving its 3-D point spread functions and compare them with conventional 3-D imaging systems.

Characterization of MEMS transducer performance using near-field scanning interferometry

Sophisticated ultrasonic transducer microarrays based on micro-electro-mechanical-systems (MEMS) technologies are quickly becoming a reality. A current challenge for many researchers is characterizing the dynamic performance of these and other micro-mechanical devices. In this work, the performance characteristics of a MEMS ultrasonic transducer array were successfully measured using a scanning heterodyne interferometer system. The dynamic response of the entire transducer array was measured, and the results were compared with theoretical predictions. Individual elements were found to vibrate with Bessel-like displacement patterns, and they were resonant at approximately 4 MHz. The full array showed variations in peak out-of-plane displacement levels across the device of 16%, and isolated elements that were dramatically overresponsive and under-responsive. The measured variations across the array may have an undesirable impact on the performance of the transducer and its radiated field.