The development of high-performance H2S sensor is imperative for monitoring H2S in the living environment. Metal oxide semiconductors (MOSs) have been regarded as the strongest candidates for H2S detection due to their high sensitivity, miniaturization, and good durability. However, a single MOS-based gas sensor is unable to selectively detect gases, which limits its practical application. Functionalization of noble metal nanoparticles (e.g., Pt, Pd, and Au) on the surface of MOS can improve its selectivity. Herein, ZnO nanowires decorated with AuPt bimetallic nanoparticles are designed and fabricated on MEMS for H2S detection. The AuPt@ZnO nanowires-based sensor shows a response of 17.7–20 ppm H2S at 300 °C which is 4.0 times higher than that of pristine ZnO nanowires-based sensor. The sensor also exhibits a rapid response-recovery process, brilliant long-term stability, and excellent selectivity to H2S among various interfering gases. The remarkable improvement of the sensing performance, especially selectivity, could be ascribed to the electronic and chemical sensitization and the synergistic effect of the AuPt bimetal. Thus, the AuPt@ZnO nanowires-based sensor has a great potential application for H2S detection.
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