Guided-mode Resonance Research Articles

An apodization method for guided-mode resonance grating with waveguide cavity

A cavity-resonator-integrated guided-mode resonance mirror (CRIGM) consisting of a small-aperture grating coupler integrated in a waveguide cavity on a high-reflection substrate reflects an incident free-space wave with reflection-phase variation of 2π in a resonance condition. CRIGM has been investigated as a key component in surface mount packaging of VCSEL for future optical interconnects but the reflectance of a fabricated CRIGM was not sufficient. Matching of electric field distribution between an incident Gaussian beam and the reflected beam from the CRIGM is discussed for improving the reflectance. A new apodization method of grating-tooth shift is proposed for the field-distribution matching. CRIGMs with the new and a well-known fill-factor apodization methods are characterized by numerical simulation. It is predicted that the previously measured reflectance will be improved by more than 1.2 dB by introducing either of the apodization methods.

Full-color reflective filter in a large area exploiting a sandwiched metasurface.

Metasurface-based color filters show great potential in imaging devices and color printing. However, it is still a great challenge to meet the high demand for large-area flexible displays with structural color filters. Here, a reflective color filter is developed with a sandwiched metasurface, where the photoresist grating, complementary silver grating and silicon nitride grating are sequentially stacked on the substrate. Analytical results show that bandpass reflective spectra can be achieved due to the combined influence of guided mode resonance and cavity resonance, and full-spectrum colors including three primary colors can be generated by merely varying the period of the metasurface. With only photolithography and deposition technology involved, large-area samples incorporating pixelated metasurfaces are easily fabricated. Metasurfaces with three periods of 540 nm, 400 nm and 320 nm are experimentally obtained having peak reflective efficiency of ∼ 60%, demonstrating red, green and blue colors as theoretical results. A stripe sample with the structural period varying from 250 nm to 550 nm is fabricated in an area of 10 mm × 30 mm, displaying full-color reflections as simulated. Finally, with metasurfaces of three structural periods, the pixelated Soochow University logo is fabricated in a larger area of ∼ 30 mm × 30 mm. Therefore, the proposed structure shows high compatible to roll-to-roll nano-imprinting for large-area flexible displays, with the photoresist film can be easily substituted by UV film in addition.

Flat-top filter using slanted guided-mode resonance gratings with bound states in the continuum

The attribute of bound states in the continuum (BICs) for highly efficient flat-top filter by using a slanted guided-mode resonance (GMR) grating is developed in this work. By introducing a slanted angle θ, the fully symmetric grating is broken to transform the dark BICs into bright quasi-BICs mode. Theoretical analysis based on the finite-different time-domain method is applied to evaluate the filtering performances. It is found that the GMR and quasi-BICs peaks combine at θ=31.4°, and the flat-top filtering response is realized at the central wavelength of 1550 nm under normal incidence. Moreover, the linewidth-tunable and central wavelength-tunable spectral response can be varied according to the change in the coupling strength of the GMR grating by changing the structural parameters such as period, fill factor and refractive index of the grating. It is the first report of a flat-top filter designed by combining GMR and quasi-BICs. The proposed structure shows promise for application in high-performance optical communication systems.

Gigahertz free-space electro-optic modulators based on Mie resonances

Electro-optic modulators are essential for sensing, metrology and telecommunications. Most target fiber applications. Instead, metasurface-based architectures that modulate free-space light at gigahertz (GHz) speeds can boost flat optics technology by microwave electronics for active optics, diffractive computing or optoelectronic control. Current realizations are bulky or have low modulation efficiencies. Here, we demonstrate a hybrid silicon-organic metasurface platform that leverages Mie resonances for efficient electro-optic modulation at GHz speeds. We exploit quasi bound states in the continuum (BIC) that provide narrow linewidth (Q = 550 at {lambda }_{{{{{{{{rm{res}}}}}}}}}=1594 nm), light confinement to the non-linear material, tunability by design and voltage and GHz-speed electrodes. Key to the achieved modulation of frac{{{Delta }}T}{{T}_{max }}=67 % are molecules with r33 = 100 pm/V and optical field optimization for low-loss. We demonstrate DC tuning of the resonant frequency of quasi-BIC by {{Delta }}{lambda }_{{{{{{{{rm{res}}}}}}}}}= 11 nm, surpassing its linewidth, and modulation up to 5 GHz (fEO,−3dB = 3 GHz). Guided mode resonances tune by {{Delta }}{lambda }_{{{{{{{{rm{res}}}}}}}}}= 20 nm. Our hybrid platform may incorporate free-space nanostructures of any geometry or material, by application of the active layer post-fabrication.

Guided-Mode-Resonance Reflectors for Performance Enhancement of Sapphire Based Fabry-Perot Sensors in Harsh Environment

This paper presents a guided-mode resonance (GMR) reflector for sapphire based Fabry-Perot (F-P) sensors that enables tunable or wideband high reflectance with high temperature resistance,which is expected to effectively regulate the performance of F-P sensors and offer a novel approach for designing F-P sensors in harsh environments. Intrinsic and extrinsic GMR gratings are proposed, and their optical and thermal properties are investigated and compared through numerical simulations, such as rigorous coupled-wave analysis and finite element analysis methods. The quantitative results indicate high feasibility for harsh environment applications and the potential for adopting different demodulation methods. Significant enhancement in the F-P sensor performance is obtained through analysis based on the F-P interference model, and the spectrum fineness and sensor sensitivity can be enhanced by at least one order of magnitude. The GMR reflector can be extended to other types of F-P sensors, demonstrating significant potential in high-temperature applications.

Guided-mode resonance sensors: different schemes for different applications

This work performs a quantitative comparison of different dielectric-based guided-mode resonance (D-GMR) sensors. To this end, diverse D-GMR structures are classified into three different classes, and their sensitivity (S) is compared to each other. For one of these classes in various schemes, the sensitivity is investigated for the TE and TM modes. Moreover, grating height effects are studied for different cases in this category, and analytical sensitivity equations are used as benchmarks. Then, the three classes are compared and, based on the numerical results and analytical equations, various applications are proposed for different structures in the refractive index (RI) of interest. Comparing our results to other recent works, we prove that the proposed classification leads to great sensing performances and the predictions are reliable. A comparison has been performed for methane as a gas sample (with RI of 1.0003) and a hemoglobin solution and toluene as two different analytes (with RIs of 1.33 and 1.4778, respectively). The results show a sensitivity of S = 1427.3 n m / r e f r a c t i v e index unit (nm/RIU) for methane with a detection precision of one to a few volume percentages in the air, which can also be calibrated to illuminate the fabrication variation errors. For hemoglobin, a sensitivity of 1073.4 nm/RIU is obtained, with a limit of detection of 116.15 mg/lit for 65-87 g/lit of hemoglobin in water; for the toluene sensor, S = 1019.7 n m / R I U is calculated. As a general result, a high figure of merit/sensitivity can be achieved over a wide range of applications, from gases to high RI analytes, using our proposed classifications.

Terahertz hybrid optical-plasmonic modes: tunable resonant frequency, narrow linewidth, and strong local field enhancement.

Hybrid optical-plasmonic modes have the characteristics of low loss and small mode volume, which will result in the strong localization and enhancement of electromagnetic field. Such advantages of hybrid optical-plasmonic mode are important for the enhancement of light-matter interactions. Here, terahertz (THz) hybrid modes of Fabry-Perot resonances (FPRs) and spoof surface plasmon polaritons (SSPPs) in the modified Otto scheme are investigated both in theoretical and experimental aspects. The device structure is composed of a metal grating silicon waveguide (MGSW) and a metal slit grating (MSG). The two components are vertically stacked with a variable air gap between them. The THz hybrid modes are originated from the far-field coupling of the FPRs and the SSPP supported by the air gap and the MSG, respectively. By changing the thickness of the air gap, the resonant frequency of the FPR-SSPP modes can be tuned in a frequency range of about 0.1 THz. An anti-crossing behavior between two reflection dips corresponding to the guided-mode resonance in the MGSW and the FPR-SSPP mode is observed, which leads to the narrowing of the reflection dips in the anti-crossing region. Numerical simulations show that at the resonant frequencies of FPR-SSPP mode, there is a huge volume-averaged electromagnetic energy enhancement of about 1600 times in the grooves of the MSG, which is around 8.7 times larger than that induced by the SSPP directly launched by free-space electromagnetic field. The hybrid FPR-SSPP modes can be used to construct THz sensors and detectors with high sensitivity.

Electrically tunable guided mode resonance grating for switchable photoluminescence

We present a guided mode resonance grating based on incorporation of an electro-optic material with monolayer WS2. The grating is designed to exhibit highly selective directional photo-luminescent emission. We study the effect of doubling the grating period via the introduction of an alternating index perturbation. Using numerical simulations, we show that period doubling leads to the formation of a photonic bandgap and spectral splitting in the absorptivity (or emissivity) spectrum. We anticipate that this effect can either be used to switch on and off the emissivity at a fixed wavelength or toggle between single- and double-wavelength emissions.

Nonreciprocal infrared absorption via resonant magneto-optical coupling to InAs.

Nonreciprocal elements are a vital building block of electrical and optical systems. In the infrared regime, there is a particular interest in structures that break reciprocity because their thermal absorptive (and emissive) properties should not obey the Kirchhoff thermal radiation law. In this work, we break time-reversal symmetry and reciprocity in n-type–doped magneto-optic InAs with a static magnetic field where light coupling is mediated by a guided-mode resonator structure, whose resonant frequency coincides with the epsilon-near-zero resonance of the doped indium arsenide. Using this structure, we observe the nonreciprocal absorptive behavior as a function of magnetic field and scattering angle in the infrared. Accounting for resonant and nonresonant optical scattering, we reliably model experimental results that break reciprocal absorption relations in the infrared. The ability to design these nonreciprocal absorbers opens an avenue to explore devices with unequal absorptivity and emissivity in specific channels.

Magnetically tunable dual-band terahertz absorption based on guided-mode resonance.

We propose a magnetically tunable dual-band terahertz (THz) absorber by using an InAs substrate with a subwavelength zero-contrast germanium grating. The results demonstrate that the absorption peaks in this absorber can be dynamically tuned by changing the intensity and the rotation angle of the applied transverse magnetic field, which is achievable at a moderate order of magnitude of 0.1 Tesla. In addition, we investigate the distribution of magnetic field intensity and find that the magnetically tunable absorption originates from the combination of the magneto-optical effect and the guided-mode resonance effect, where the absorption peaks shift in different directions at normal incidence and oblique incidence. Furthermore, the absorption intensity of the proposed structure could reach 99% with an ultra-high Q-factor of 258. This work paves the way for actively adjustable high-resolution THz absorption or a nonreciprocal thermal emitter.

Tunable ultra-high quality factor graphene absorber based on semicylindrical silica array and distributed Bragg reflector structure

We propose a tunable narrowband absorber by utilizing a graphene monolayer placed between a dielectric semicylindrical array and a multilayer silica/silicon distributed Bragg reflector (DBR) structure. The multi-band perfect absorption can be achieved due to the excitation of multiple resonant modes in the absorber, including the guided mode resonance of the dielectric silica array and BR-based guided mode resonance in the DBR structure. The ultra-high quality factor (Q) is mainly attributed to the low external leakage loss of the resonator and the low intrinsic loss of the graphene monolayer. Moreover, the Q-factor of absorption peaks can be tuned by electrically controlling the Fermi energy of graphene. The sensitivity of a spectral wavelength shift for the refractive index change of the resonator is up to 730 nm/RIU, and the figure of merit is 1043. The proposed graphene-based metamaterial offers potential applications for photodetectors, optical modulators, and sensors in the near infrared frequency regime.

Cavity resonator-integrated guided-mode resonance filters with on-chip electro- and thermo-optic tuning.

Cavity resonator grating filters (CRIGFs) integrated on lithium niobate on insulator (LNOI) with electrical tuning elements are reported. The resonance wavelength of the filters is in the 780 nm range. Integrated thermo-optical tuning range of 2.5 nm is measured using integrated resistors, whilst a 0.7 nm electro-optical tuning range using capacitive metallic pads is achieved with ±400V drive voltage.

Third harmonic generation enhancement from silicon-based multilayer guided mode resonance structures under a conical mounting condition

We experimentally demonstrate more than four-orders of magnitude enhancement in third harmonic generation from an amorphous silicon layer as thin as 10 nm deposited above silicon nitride guided mode resonance (GMR) structures under a conical mounting condition using a rectangular aperture as a pupil plane mask for the fundamental excitation. The multilayer GMR structure studied here consists of shallow etched one-dimensional silicon dioxide gratings with a silicon nitride intermediate layer and an amorphous silicon nonlinear medium. Under conical mounting, by restricting the fundamental excitation angles along the grating vector direction, while retaining the angles supported by the objective lens along the grating lines, the resonances are made angle insensitive. The forward detected THG enhancement increases from 2860 in the absence of any pupil plane mask, with a uniform fundamental excitation angular span of 2.3° to 4740 and 1.7 × 104 in the presence of rectangular apertures that selectively reduce the excitation angular span along the grating vector direction to 0.86° and 0.43°, respectively. Conical mounting using rectangular aperture pupil masks to engineer the fundamental excitation is a promising approach to enhance nonlinear optical processes from angle sensitive GMR structures.

Investigation of bound states in the continuum in dual-band perfect absorbers

Enhancing the light-matter interaction of two-dimensional materials in the visible and near-infrared regions is highly required in optical devices. In this paper, the optical bound states in the continuum (BICs) that can enhance the interaction between light and matter are observed in the grating-graphene-Bragg mirror structure. The system can generate a dual-band perfect absorption spectrum contributed by guided-mode resonance (GMR) and Tamm plasmon polarition (TPP) modes. The optical switch can also be obtained by switching the TE-TM wave. The dual-band absorption response is analyzed by numerical simulation and coupled-mode theory (CMT), with the dates of each approach displaying consistency. Research shows that the GMR mode can be turned into the Fabry-Pérot BICs through the transverse resonance principle (TRP). The band structures and field distributions of the proposed loss system can further explain the BIC mechanism. Both static (grating pitch P) and dynamic parameters (incident angle θ) can be modulated to generate the Fabry-Pérot BICs. Moreover, we explained the reason why the strong coupling between the GMR and TPPs modes does not produce the Friedrich-Wintgen BIC. Taken together, the proposed structure can not only be applied to dual-band perfect absorbers and optical switches but also provides guidance for the realization of Fabry-Pérot BICs in lossy systems.

High-performance refractive index sensor by nano-cylindrical surface structure

In this work, a two-dimensional grating structure based on the metal assisted guided-mode resonance (MAGMR) effect is proposed, which can be used for near infrared band sensing in an aqueous environment. Following optimization by the finite-difference time-domain method, the structure is able to support MAGMR well, and has an excellent reflection dip. The electromagnetic field shows that the structure not only interacts well with the sensing medium but also has a large penetration depth. Results at different refractive indices of the sensing medium confirm the high sensing performance of the proposed MAGMR sensor, which achieves a sensitivity of 852 nm/RIU. Meanwhile, the sensor has a figure of merit up to 4813 RIU−1 (55 times typical GMR sensors) because of the full width at half maximum is only 0.177 nm. Furthermore, the shape and parameters of the MAGMR sensor have been analyzed in detail in order to gain a comprehensive understanding of its performance. This MAGMR sensor is promising for future applications in biomedicine, chemical measurements and environmental monitoring due to its polarization-independent, non-specific angle of incidence, high penetration depth and high sensing performance.

Broadband Enhancement of Anti-reflectivity for a High Angle of Incidence Using Nanocone Geometry.

The broadband antireflective (AR) effect for wide incident angles has a significant effect on the photoconversion efficiency of photovoltaics and visibility of large-format display panels. The fabrication of surface nanostructures has continued to attract research interest as an effective way to provide such optical performance. However, the effects of different nanostructure geometries are not fully understood, especially for wide-angle AR effects. In this work, we conduct a systematic analysis of the effect of periodic nanostructures such as nanocones (NCs) and inverted nanocones (INCs) on anti-reflectivity at high angles of incidence (AOIs) in terms of light scattering, guided-mode resonance (GMR), and internal reflections. NCs provide good coupling of light scattering and GMR because of their protruding geometry; hence, reduced reflectance can be obtained in the short wavelength region. Further, NCs exhibit relatively weaker GMR intensities and internal reflections, resulting in low reflectance in the long wavelength region. Therefore, NCs offer a superior broadband AR effect for high AOIs compared with INCs. Based on this analysis, we demonstrate an extremely low average reflectance (5.4%) compared to that of the bare substrate (34.7%) for the entire visible range at an AOI of 75° by fabricating NCs on both sides of the substrate.

Pixel-scale miniaturization of guided mode resonance transmission filters in short wave infrared.

The effects of miniaturization on theoretically predicted performance of dual-period guided mode resonance (GMR) transmission filters, which demonstrate immense potential for multispectral imaging in short wave infrared (SWIR), have been compared with experimental findings. With reducing filter size from 112 periods (90 µm) to 12 periods (10 µm), peak transmittance (Tpeak) of simulated and measured filters reduced gradually from 84% to 55% and from 76% to 65%, respectively, with a moderate change of 1 - 3 nm in full width at half maximum (FWHM). For 6 period filters (5 µm), simulations predict drastically reduced Tpeak = 14% accompanied by increase in FWHM by 12 nm. The Tpeak value is theoretically shown to increase to 46% with FWHM reduced by 7 nm upon placing metal reflectors at the optimum positions to increase the optical path length. Our findings indicate that four 5 µm × 5 µm size filters with metal reflectors designed for different resonance wavelengths can be used to form a single, 20 µm × 20 µm mosaic pixel for SWIR multispectral imaging.

Computational design and optimization of nanostructured AlN deep-UV grating reflectors.

Deep-ultraviolet (DUV) optoelectronics require innovative light collimation and extraction schemes for wall-plug efficiency improvements. In this work, we computationally survey material limitations and opportunities for intense, wavelength-tunable DUV reflection using AlN-based periodic hole and pillar arrays. Refractive-index limitations for underlayer materials supporting reflection were identified, and MgF2 was chosen as a suitable low-index underlayer for further study. Optical resonances giving rise to intense reflection were then analyzed in AlN/MgF2 nanostructures by varying film thickness, duty cycle, and illumination incidence angle, and were categorized by the emergence of Fano modes sustained by guided mode resonances (holes) or Mie-like dipole resonances (pillars). The phase-offset conditions between complementary modes that sustain high reflectance (%R) were related to a thickness-to-pitch ratio (TPR) parameter, which depended on the geometry-specific resonant mechanism involved (e.g., guided mode vs. Mie dipole resonances) and yielded nearly wavelength-invariant behavior. A rational design space was constructed by pointwise TPR optimization for the entire DUV range (200-320 nm). As a proof of concept, this optimized phase space was used to design reflectors for key DUV wavelengths and achieved corresponding maximum %R of 85% at λ = 211 nm to >97% at λ = 320 nm.

Longwave infrared polarization independent monolithic guided-mode resonance filters with double-sided orthogonal linear gratings

We present novel polarization independent, high-quality monolithic spectral filters based on the guided-mode resonance (GMR) effect with orthogonal linear gratings on either side of the substrate operating in the longwave infrared (LWIR) spectral region. We employ high-spatial resolution e-beam lithography and reactive-ion etching (RIE) nanofabrication techniques to achieve large-area (10×10 mm2) notch filters with subwavelength features. We fabricated prototype filters and characterized their polarization independent spectral performance with both coherent and incoherent incident light using a tunable quantum cascade laser (QCL) system that spans the ∼8–12 µm spectral band as well as a Fourier transform infrared (FTIR) spectrometer with collimated incident beam.

A Theoretical Description of Node-Aligned Resonant Waveguide Gratings

Waveguide gratings are used for applications such as guided-mode resonance filters and fiber-to-chip couplers. A waveguide grating typically consists of a stack of a single-mode slab waveguide and a grating. The filling factor of the grating with respect to the mode intensity profile can be altered via changing the waveguide’s refractive index. As a result, the propagation length of the mode is slightly sensitive to refractive index changes. Here, we theoretically investigate whether this sensitivity can be increased by using alternative waveguide grating geometries. Using rigorous coupled-wave analysis (RCWA), the filling factors of the modes of waveguide gratings supporting more than one mode are simulated. It is observed that both long propagation lengths and large sensitivities with respect to refractive index changes can be achieved by using the intensity nodes of higher-order modes.