Growth Mode Research Articles

Machine-learning-empowered identification of initial growth modes for 2D transition metal dichalcogenide thin films

In situ reflection high-energy electron diffraction (RHEED) is a powerful technique for monitoring surface states and offers invaluable insights into thin film growth. However, extracting hidden features and subtle changes from its vast data remains as a challenge. This work bridges the gap by employing machine learning (ML)-empowered RHEED analysis to elucidate the growth dynamics of two-dimensional (2D) transition metal dichalcogenide (TMDC) thin films grown under two distinct growth modes. Principal component analysis (PCA) and its modified processes were used to separate contributions of the graphene substrate and the MoSe2 film in the RHEED video. The ML-empowered RHEED analysis allowed us to effectively filter out the strong substrate signal and reconstructing RHEED videos solely for the MoSe2 films. This approach enabled detailed monitoring of film growth with unique features, and clearly distinguishing between the layer-by-layer growth mode and the island one. This work demonstrates the potentials of ML-empowered RHEED analysis for revealing complex growth dynamics of 2D TMDC materials, paving the way for advanced thin film monitoring and autonomous control in wider scope of thin film technologies.

Clonal dynamics of surface-driven growing tissues.

The self-organization of cells into complex tissues relies on a tight coordination of cell behavior. Identifying the cellular processes driving tissue growth is key to understanding the emergence of tissue forms and devising targeted therapies for aberrant growth, such as in cancer. Inferring the mode of tissue growth, whether it is driven by cells on the surface or by cells in the bulk, is possible in cell culture experiments but difficult in most tissues in living organisms (in vivo). Genetic tracing experiments, where a subset of cells is labeled with inheritable markers, have become important experimental tools to study cell fate in vivo. Here we show that the mode of tissue growth is reflected in the size distribution of the progeny of marked cells. To this end, we derive the clone size distributions using analytical calculations in the limit of negligible cell migration and cell death, and we test our predictions with an agent-based stochastic sampling technique. We show that for surface-driven growth the clone size distribution takes a characteristic power-law form with an exponent determined by fluctuations of the tissue surface. Our results propose a possible way of determining the mode of tissue growth from genetic tracing experiments.

Tracing trajectories and co-evolution of metropolitan urbanization in the United States, Europe, and China

Metropolization has emerged as a prominent feature of 21st-century urbanization. To gain a comprehensive understanding of global urbanization patterns and pathways, as well as to interpret their consequences and implications, we aimed to provide a comparative characterization on urban transformation in metropolitan areas of developed and developing countries. Here, we quantified and compared the urban growth rates, growth modes, urban landscape metrics, and the co-evolution of urban land and population in 21 representative metropolitan areas across the United States, Europe, and China from 1985 to 2020, using remotely sensed impervious-surface dynamic dataset and patch-based analyses. The results showed that each metropolitan area has experienced substantial urban expansion with different scales and growth rates. Developing China possessed a relatively lower urbanization level but urbanized faster compared to the developed counterparts. Spatially, with infilling expansion increasing and even dominating, American and European metropolitan areas developed into more compact central urban cores, demonstrating the coalesced trajectories. Chinese metropolitan areas showed point-axis urban development mainly via edge-expansion in concentric rings. Furthermore, the horizontal co-evolution of urban area and population generally showed stable economies of scale in the United States and Europe whereas transitioned from diseconomy to economy of scale in China, evidencing that the century-long urbanization journey traversed by developed countries can be completed by emerging-developing ones within several decades. Temporally, the urban expansion greatly outpaced population growth in all metropolitan areas except London, signifying that urban land use efficiency is still a grand challenge in the Metropolitan Century. Effective metropolitan governance should be tailored to spatial configuration for efficient urban land use and intercity coordinated development towards a sustainable urban future, particularly for developing countries with emerging metropolization.

Predicting rapid growth behavior in solidified eutectic ceramic composites using infrared thermal imaging and thermal field simulation during laser directed energy deposition

Cylindrical Al2O3/GdAlO3 binary in situ oxide eutectic ceramic composite, with a glossy surface and high relative density, has been fabricated using the laser directed energy deposition method (LDED) with optimized process parameters. In a novel and innovative approach, infrared thermal imaging and the finite element method (FEM) have been combined for the first time to capture the temperature field distribution across different regions of the molten pool during the LDED processing of the binary oxide eutectic ceramic composite, thereby synergistically obtaining the solidification characteristics. With an increase in the scanning rate, the temperature gradient within the molten pool decreases from 3.38 × 105 K/m to 1.62 × 105 K/m, while it shows minimal variation with fluctuations of the laser power. Under the conditions of high temperature gradients and rapid non-equilibrium solidification characteristic of LDED, the Al2O3/GdAlO3 (GAP) binary eutectic ceramic composites, which exhibit typical high melting entropy and faceted/non-faceted growth modes, exhibit complex and variable microstructure morphology. A combination of regular/irregular models, including JH (Jackson-Hunt), MK (Magnin-Kurz), GK (Guzik-Kopyciński) and TMK (Trivedi-Magnin-Kurz), is employed to investigate and predict the growth and transformation of microstructures. The JH and TMK models fairly predict the rod-like regular eutectic microstructure inside the colony and lamellar regular eutectic within adjacent layers, respectively. The “Chinese-script” irregular microstructure at the interface between the colony and the layers is consistent with the MK and GK models. The as-deposited eutectic ceramic composite presents ultra-fine microstructures, clear and strongly bonded phase interfaces with low strain energy, contributing to its microstructure stability after high temperature heat treatment at 1773 K for 200 h, and achieving a minimum microstructure coarsening rate of 0.0005 μm/h.

Change in Growth Mode of BGaN Layers Grown on GaN

A change in the growth mode from Stranski–Krastanov one, which is characteristic of MOCVD grown GaN, to the laterally grown BGaN in the Volmer–Weber growth mode is described. This change in growth is evidenced by scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images of BGaN grown on GaN at high temperatures. It is postulated on the basis of SIMS and XRD results that this change in growth is initiated by the transfer of boron atoms from gallium substitutional to interstitial. The proposed mechanism for the observed growth change is related to the generation of nitrogen interstitials and subsequent reactions with boron interstitials, which result in the formation of a BN layer at the growth front. The observed large change in the growth mode is due to a lattice mismatch between the grown BGaN and the atomic layer of BN and stays behind the change to the Volmer–Weber growth mode. The consequence of the Volmer–Weber growth mode is the textural layer of BGaN. The textural character of this material is associated with large voids between grown BGaN “plates”. These large voids are responsible for the termination of threading dislocations propagating in the c-direction. It is also postulated that the blocked threading dislocations from the GaN underlayer and laterally grown BGaN layers along the a-directions are responsible for the decrease in defect concentration within these layers.

3D vertical ultra-sodiophilic leaf-vein-like MXene/Sn@CNF array of structured sodium enabling high-rate and long-life sodium metal batteries

Uncontrolled Na dendrite growth and infinite volume change during cycling have greatly impeded the practical application of Na metal anode for high-energy-density batteries. To address these two issues simultaneously, a 3D vertical ultra-sodiophilic leaf-vein-like MXene/Sn@CNF array (VL-MXene/Sn@CNF) aerogel, integrated by 1D Sn@CNF and 2D MXene, was prepared by an ingenious hydrogen bonding self-assembly and unidirectional ice template method. The low-tortuosity and ultra-sodiophilic vertical array facilitates uniform and rapid Na+ transport along the ordered interspaces, achieving a negligible nucleation overpotential of 1.0 mV. Furthermore, experimental results and theoretical calculations revealed a unique bidirectional growth mode of Na, in which vertical leaf-vein-like lamellae and bridging fibers guided Na to be densely deposited along the vertical and horizontal directions, respectively. Benefitting from the ultra-sodiophilic vertical array of structured Na, the designed material exhibits an endurance of 1000 cycles for asymmetric cell at 3.0 mA cm−2 and 3.0 mAh cm−2, and the symmetrical cell delivers an ultra-long lifespan of 6000 h at 1.0 mA cm−2 and 3.0 mAh cm−2 with a high depth of discharge up to 50 %. Remarkably, at the high current of 15 C, the full cell based on NaTi2(PO4)3 cathode and Na@VL-MXene/Sn@CNF anode can deliver a reversible capacity of 88.94 mAh g−1 after 9200 cycles with an ultralow 0.0016 % capacity decay per cycle, which represents the most impressive full cell performance so far.

Polyethylene assisted CNTs in-situ growth on Fe-Mn-O to boost the electrochemical and electrocatalytic performance

Efficient reuse of plastic wastes is turning waste into treasure, and crucial to green and sustainable development. Herein, a flexible strategy was proposed to fabricate the composite of transition metal and carbon nanotubes (CNTs), i.e., polyethylene (PE) assisted CNTs in-situ growth on Fe-Mn-O. Mn-O and Fe-Mn-O was sequentially prepared via the coprecipitation method and impregnation method, and used for CNTs synthesis from PE via the thermo-catalytic process. It was found that PE facilitated CNTs in-situ growth on Fe-Mn-O, and CNTs yield was 456.1 mg/g, which was mostly in a hollow cylindrical structure with a heterogenous metal-particle. Based on the metal yarmulke structure, the in-situ growth of CNTs on Fe-Mn-O seemed to follow the tip growth mode. Compared with Fe-Mn-O, the in-situ growth of CNTs significantly improved the electrochemical and electrocatalytic performance. Fe-Mn-O/CNTs composite exhibited a specific capacitance of 135 F/g at 0.3 A/g in 1 M Na2SO4 electrolyte solution and an oxygen evolution reaction (OER) overpotential of 306 mV at 50 mA/cm2 in 1 M KOH electrolyte solution, which was 75 F/g higher and 59 mV lower than that of Fe-Mn-O (60 F/g and 365 mV), respectively. It was deduced that the in-situ growth of CNTs effectively reduced the electrochemical impedance and improved the charge transport, and thus promoted the electrochemical and electrocatalytic performance of Fe-Mn-based materials. This work may provide a new direction for the resource of plastic wastes and the preparation of advanced transition metal/CNTs composites in the energy conversion and storage application.

Probing microscale crystallization phenomena: Transforming waste slags into riches

Metal smelting and combustion of solid fuels produce significant quantities of waste slag, leading to issues such as land occupation and environmental pollution. Understanding and controlling the microscale crystallization phenomena of these slags during thermal treatment is crucial for transforming waste slags into materials suitable for carbon capture or glass ceramics. Previous research has primarily focused on macroscopic crystallization behaviors, significantly advancing the utilization of waste slags in cement clinker production. However, macroscopic results are inadequate for precisely controlling the microscale crystallization behaviors of waste slags. Here, we employed the single hot thermocouple technique to visually explore crystal growth modes, shapes, sizes, numbers, and translational rates of the crystal growth front in a representative blast furnace slag under various isothermal temperatures. The results revealed that crystals exhibited five modes as the isothermal temperature gradually increased, including equiaxed, equiaxed & columnar, columnar, columnar & planar, and planar. Moreover, the translational rate of the crystal growth front increased from 0.011 μm·s−1 to 43.7 μm·s−1 with an increase in the isothermal temperature. Simultaneously, the number of crystals decreased from around 104 to 100 μm−2. On this basis, correlations between microscale crystallization behaviors and isothermal temperature were established to fill the current gap.

Analysis of Policy Options Based on Data-Driven Economic Cycles and Industrial Structure Upgrading

China's economy has achieved a high growth rate of 9.8% in cyclical fluctuations, and the industrial structure has been continuously improved with growth. However, the irrationality of the tertiary industry structure and its internal structure still restricts the sustainable development. The optimization of the industrial structure depends on many factors, such as government policies, economic growth mode, resource constraints, economic development stage and economic cycle stage. Based on data-driven analysis, this paper analyzes the general path and policy choice of economic cycle to adjust China's industrial structure, and the impact of economic cycle on the upgrading of industrial structure. After the actual analysis, we found that the threshold of economic growth in economically developed regions is high, the role of financial development in stimulating industrial structure is not prominent, and industrial upgrading is relatively difficult. Industrial upgrading is difficult.

Structural and optical characterizations of cubic GaN layers grown by MOVPE on GaAs(114) substrate

GaN-based structures have been employed in a range of electronic and optoelectronic applications. Despite the extensive utilization of hexagonal GaN (h-GaN), certain devices, such as green-emitting lasers, face limitations. Conversely, cubic GaN (c-GaN) proves advantageous in addressing challenges associated with h-GaN, thanks to its reduced bandgap and being free of the strong polarization fields resulting in enhanced radiative recombination rate. Yet, c-GaN possesses a metastable phase during growth, which can negatively impact the structure of the films. Optimizing the growth conditions can significantly improve material quality and, hence, device performance. In our present work, we report the growth of cubic GaN on GaAs (114) substrates using metal-organic vapor phase epitaxy (MOVPE) with various thicknesses. Morphological analyses demonstrated a grain structure with increased surface roughness versus layer thickness. Such measurements enabled us to study the texture and growth mode evolutions. High-resolution X-ray diffraction 2 θ-ω scans showed a (002) c-GaN preferred orientation with hexagonal inclusions. The optical characteristics of the investigated layers were explored using cathodoluminescence measurements, revealing a correlation between the stress state and layer thickness.

Site-Selective Growth of fcc-2H-fcc Copper on Unconventional Phase Metal Nanomaterials for Highly Efficient Tandem CO2 Electroreduction.

Copper (Cu) nanomaterials are a unique kind of electrocatalysts for high-value multi-carbon production in carbon dioxide reduction reaction (CO2RR), which holds enormous potential in attaining carbon neutrality. However, phase engineering of Cu nanomaterials remains challenging, especially for the construction of unconventional phase Cu-based asymmetric heteronanostructures. Here the site-selective growth of Cu on unusual phase gold (Au) nanorods, obtaining three kinds of heterophase fcc-2H-fcc Au-Cu heteronanostructures is reported. Significantly, the resultant fcc-2H-fcc Au-Cu Janus nanostructures (JNSs) break the symmetric growth mode of Cu on Au. In electrocatalytic CO2RR, the fcc-2H-fcc Au-Cu JNSs exhibit excellent performance in both H-type and flow cells, with Faradaic efficiencies of 55.5% and 84.3% for ethylene and multi-carbon products, respectively. In situ characterizations and theoretical calculations reveal the co-exposure of 2H-Au and 2H-Cu domains in Au-Cu JNSs diversifies the CO* adsorption configurations and promotes the CO* spillover and subsequent C-C coupling toward ethylene generation with reduced energy barriers.

Hydrothermal Growth and Orientation of LaFeO3 Epitaxial Films.

LaFeO3 thin films were successfully epitaxially grown on single-crystalline SrTiO3 substrates by the one-step hydrothermal method at a temperature of 320 °C in a 10 mol/L KOH aqueous solution using La(NO3)3 and Fe(NO3)3 as the raw materials. The growth of the films was consistent with the island growth mode. Scanning electronic microscopy, elemental mapping, and atomic force microscopy demonstrate that the LaFeO3 thin films cover the SrTiO3 substrate thoroughly. The film subjected to hydrothermal treatment for 4 h exhibits a relatively smooth surface, with an average surface roughness of 10.1 nm. X-ray diffraction in conventional Bragg-Brentano mode shows that the LaFeO3 thin films show the same out-of-plane orientation as that of the substrate (i.e., (001)LaFeO3||(001)SrTiO3). The in-plane orientation of the films was analyzed by φ-scanning, revealing that the orientational relationship is [001]LaFeO3||[001]SrTiO3. The ω-rocking curve indicates that the prepared LaFeO3 films are of high quality with no significant mosaic defects.

A bacterial sense of touch: T4P retraction motor as a means of surface sensing by Pseudomonas aeruginosa PA14.

Most microbial cells found in nature exist in matrix-covered, surface-attached communities known as biofilms. This mode of growth is initiated by the ability of the microbe to sense a surface on which to grow. The opportunistic pathogen Pseudomonas aeruginosa (Pa) PA14 utilizes a single polar flagellum and type 4 pili (T4P) to sense surfaces. For Pa, T4P-dependent "twitching" motility is characterized by effectively pulling the cell across a surface through a complex process of cooperative binding, pulling, and unbinding. T4P retraction is powered by hexameric ATPases. Pa cells that have engaged a surface increase production of the second messenger cyclic AMP (cAMP) over multiple generations via the Pil-Chp system. This rise in cAMP allows cells and their progeny to become better adapted for surface attachment and activates virulence pathways through the cAMP-binding transcription factor Vfr. While many studies have focused on mechanisms of T4P twitching and regulation of T4P production and function by the Pil-Chp system, the mechanism by which Pa senses and relays a surface-engagement signal to the cell is still an open question. Here we review the current state of the surface sensing literature for Pa, with a focus on T4P, and propose an integrated model of surface sensing whereby the retraction motor PilT senses and relays the signal to the Pil-Chp system via PilJ to drive cAMP production and adaptation to a surface lifestyle.

Low-defect and stress-free AlN(0001) nanoprisms and microrods selectively grown on micro-patterned c-sapphire substrate by plasma-assisted molecular beam epitaxy

This paper describes different growth modes of AlN layers on micro-cone patterned c-sapphire substrates (μ-PSSs) using plasma-assisted molecular beam epitaxy. Ordered arrays of AlN nanoprisms and microrods were selectively grown on the tips of μ-PSS's microcones according to a bottom-up formation mechanism using sequential migration enhanced and metal-modulated epitaxy (MME) under metal-rich growth conditions at 820 °C. Transmission electron microscopy revealed structurally perfect AlN regions above the tips of the μ-PSSs, which initiate as inverted nanopyramids with {1011¯} side faces, evolving into hexagonal nanoprisms with orientations of {11¯00} and (0001) for side and top surfaces, respectively. The diameter and height of these ordered hexagonal nanoprisms, which have a 60% probability of nucleating, were about 1 μm. Long-term MME growth of these nanoprisms in both vertical and lateral directions led to the formation of AlN(0001) microrods with a maximum possible diameter of two micrometers and a height of up to 6 μm. Atomic force microscopy revealed a mixed step-flow and 2D nucleation growth mechanism for the flat tops of these AlN nanoprisms and microrods with an average surface roughness of 1–2 monolayers. Micro-Raman spectroscopy demonstrated narrow E2 (high) linewidths of 3.8 and 4.2 cm−1 for essentially stress-free AlN nanoprisms and microrods, respectively.

Capitalism and Governance – a Macroeconomic Overview of “Everyone’s Interest”

Abstract The macroeconomic mode of economic growth, the backward-pyramidal evolution from the capitalist structure, the emergence of the free enterprise, and the corporate form of business organizations in our system of free markets are all examined in this research. This study aims to provide insight into the particularities of the many aspects of the governance process. This study focuses on privately held businesses that are publicly held by shareholders or social part owners. It also examines the state-corporate relationship and its effects on geo-social, political, and economic spheres.

Research programs and the progress of theory in sociology: the post-positivist conception of J. Berger, M. Zelditch Jr. and D. Wagner

The article presents an explanation of the post-positivist conception of the progress of sociological theories in research programs, which was developed by J. Berger, M. Zelditch Jr. and D. Wagner. Their conception specified related types of theoretical structure and dynamics of research programs, as well as their functions in sociological theorizing. Structural and dynamic differences of research programs represent different types of conceptual connections between theories and their corresponding basic modes of theoretical growth. In particular, the elaboration of theories of certain explanatory domains by increasing their scope, rigor, precision, or empirical relevance is a mode of progress of linear programs. The proliferation of theories into new explanatory domains and the expansion of the subject range of their applicability is the mode of development of branching programs. The competition of theories in a certain explained domain for the best conceptual representation of its problems is a mode of progress of competing programs. Special types of conceptual connections and modes of theoretical progress may also emerge between theories in linear, branching, and competing research programs: variation of theories as a result of deepening them into their established subject domains due to increased conceptual insight, sophistication and detail; integration of theories. The theoretical development of research programs is provided by their functions, which are analogous to the functions of paradigms in mature sciences: determination of theoretical significance and doability of sociological problems; evaluation and cognitive-based selection of competing theoretical formulations of their solutions; ensuring synergy of the consequences of performing the above-mentioned functions.

From GaN crystallinity to device performance: Nucleation mode vs Surface energy of single-crystalline AlN template

In this paper, the surface state of the single-crystalline AlN template's impact on the epitaxial growth of gallium nitride (GaN) was studied. Subsequently, Schottky barrier devices were fabricated and analyzed. The results indicate that surface states subjected to different treatments exhibit varying epitaxial growth modes at the initial nucleation stage, which have a correlated effect on surface topography, crystalline quality, strain and other material characteristics of the epitaxial GaN. Higher surface energy leads to a reduction in screw dislocation of GaN material, but has less influence on edge dislocation. Single-crystalline AlN templates with higher surface energy are more likely to exhibit Stranski-Krastanow and Frank-van der Merwe growth model and achieve high-quality epitaxial materials. Schottky devices prepared using GaN material with lower screw dislocation density exhibit lower reverse leakage current. First-principles simulation analysis revealed that the migration barrier of gallium and nitrogen atoms on the surface can be overcome with the larger surface energy of single-crystalline AlN template. This facilitates their migration on the surface, resulting in higher quality material epitaxy. The conclusions of this work provide insights for quality control of epitaxial GaN materials on single-crystalline AlN templates, as well as for studying device leakage in the backend of the device fabrication process, or similar homogeneous compound semiconductor heteroepitaxy studies.

Effects of Polymers on Cocrystal Growth in a Drug-Drug Coamorphous System: Relations between Glass-to-Crystal Growth and Surface-Enhanced Crystal Growth.

Coamorphous and cocrystal drug delivery systems provide attractive crystal engineering strategies for improving the solubilities, dissolution rates, and oral bioavailabilities of poorly water-soluble drugs. Polymeric additives have often been used to inhibit the unwanted crystallization of amorphous drugs. However, the transformation of a coamorphous phase to a cocrystal phase in the presence of polymers has not been fully elucidated. Herein, we investigated the effects of low concentrations of the polymeric excipients poly(ethylene oxide) (PEO) and poly(vinylpyrrolidone) (PVP) on the growth of carbamazepine-celecoxib (CBZ-CEL) cocrystals from the corresponding coamorphous phase. PEO accelerated the growth rate of the cocrystals by increasing the molecular mobility of the coamorphous system, while PVP had the opposite effect. The coamorphous CBZ-CEL system exhibited two anomalously fast crystal growth modes: glass-to-crystal (GC) growth in the bulk and accelerated crystal growth at the free surface. These two fast growth modes both disappeared after doping with PEO (1-3% w/w) but were retained in the presence of PVP, indicating a potential correlation between the two fast crystal growth modes. We propose that the different effects of PEO and PVP on the crystal growth modes arose from weaker effects of the polymers on cocrystallization at the surface than in the bulk. This work provides a deep understanding of the mechanisms by which polymers influence the cocrystallization kinetics of a multicomponent amorphous phase and highlights the importance of polymer selection in stabilizing coamorphous systems or preparing cocrystals via solid-based methods.

Study on the structure, growth pattern and corrosion behavior of CoCrFeNiAl high entropy alloy coatings - base on hollow cathode effect

The surface of TC18 titanium alloy was coated with a CoCrFeNiAl HEA coating using double-glow plasma surface metallurgy. The structure, phase, and growth mode of the coating were investigated, along with its electrochemical corrosion behavior. The prepared HEA coating, under the influence of the hollow cathode effect and non-equilibrium diffusion, exhibits a composite structure consisting of a deposited layer and an interdiffused layer. It demonstrates robust metallurgical bonding with the substrate, and it exhibits a hardness of 12.66 GPa and an elastic modulus of 158.52 GPa, along with exceptional hardness and high elastic modulus. The primary phase of the coating consists of an FCC solid solution, with a minor presence of Ni3Al and Al8Cr5 phases. TEM results demonstrate that hollow cathode enhanced sputtering effectively refines the grain structure on the substrate surface. The high entropy alloy coating, characterized by a significant abundance of nanocrystalline and amorphous structures, is obtained under the bombardment of high-energy particles. Gradually increasing from the interface to the deposited layer, there is an augmentation in the content of nanocrystals. The transition from the substrate to the sedimentary layer comprises three distinct regions: a surface fine crystal region, a nanocrystalline structure region, and a nanocrystalline and amorphous precipitated phase-rich region. In 3.5 wt% NaCl solution, the electrochemical corrosion rate of the coating is 1.36 × 10−1 μm·year−1, which is about ten times lower than that of the substrate. Moreover, pre-soaking forms a stable oxide film on the coating's surface, effectively preventing corrosion and demonstrating its remarkable corrosion resistance.

Comparison of SiNx Dielectric Layer Grown by Plasma‐Enhanced Chemical Vapor Deposition, Low‐Pressure Chemical Vapor Deposition, and Metal‐Organic Chemical Vapor Deposition in Diamond‐ and GaN‐Based Integrated Devices

To address the issue of heat dissipation caused by the high output power density of gallium nitride (GaN) devices, using diamond‐integrated devices is an effective solution. Recent studies have suggested that incorporating a dielectric layer, such as silicon nitride (SiNx), between diamond and GaN can improve adhesion while also reducing thermal boundary resistance (TBR). In this study, plasma‐enhanced chemical vapor deposition (CVD), low‐pressure CVD, and metal‐organic CVD (MOCVD) techniques are utilized to grow the SiNx layer. The interface behavior of diamond/SiNx/GaN is analyzed through scanning electron microscopy, transmission electron microscopy (TEM), scanning TEM, and energy‐dispersive X‐ray spectroscopy, while time‐domain thermoreflectance measurement is used to characterize thermal properties. After analyzing the impact of the growth dielectric layer on the interface thermal resistance of the three growth modes, it is concluded that the dielectric layer produced by the MOCVD technique exhibits a smoother surface and lower TBR compared to the other two methods. Therefore, the use of the MOCVD technique is recommended to achieve optimal thermal performance in diamond/SiNx/GaN systems.