Due to its ability to absorb water molecules, graphene oxide (GO) is considered a promising material for sensitive coatings in fast surface acoustic wave (SAW) humidity sensors. In this work, we characterize GO films obtained by the SAW atomization technique. It is shown that the atomized submicroliter droplets of aqueous suspension of GO can be deposited onto the surface of Si, LiNbO3 or quartz substrates forming discrete or continuous films of nanometer thickness. The deposited films were examined using AFM and electron microscopy. We discuss the dependence of thickness and structure of the obtained GO films on the parameters of deposition: the number of atomized droplets, a volume of the initial droplet, a distance between the atomizer and the sample, etc. To evaluate the adsorption characteristics of the obtained GO films, we used them as sensitive coatings of the SAW humidity sensors. We found that the adsorption characteristics of the GO films are determined by fast adsorption on the surface of GO sheets and slow adsorption, attributed to limited penetration of water molecules between the sheets, and depend on the number of deposited layers.
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