The functionally gradient materials (FGMS) are important in both theory and practical applications. UP to now, almost all previous work has been concentrated on bulk materials. This paper describes the preparation of Fe-N gradient thin films by a facing targets sputtering system. Rutherford backscattering spectrometry (RBS) shows that the concentration of Fe atoms or N atoms varies gradually from the substrate to the surface throughout the whole thickness of the film. The Fe-N gradient films contain crystal phases of zeta -Fe2N, epsilon -FexN(2<x<or=3), gamma '-Fe4N, and alpha "-Fe16N2 as well.
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