Carbon nanotubes hold great promise for high-performance electronics but also face significant challenges in terms of assembly and integration. On one hand, aligned carbon nanotubes are proposed as an alternative to III-V semiconductor technologies in radio frequency (RF) applications because of their high linearity as amplifiers and compatibility with CMOS electronics. We will first report high-performance RF transistors with operation frequencies beyond 100 GHz. These devices are built upon high-density (~50 nanotubes / micron) and high semiconducting purity (> 99.99%) aligned single-wall carbon nanotube films assembled at wafer scale. With gate length ~110 nm and T-shaped gate to reduce the gate charging resistance, the devices showed an extrinsic cutoff frequency and maximum oscillation frequency of over 100 GHz. The performance surpasses the 90 GHz cutoff frequency of radio-frequency CMOS transistors with gate length of 100 nm and is close to the performance of GaAs technology. [1] On the other hand, Carbon nanotubes are ideal candidates for beyond-silicon nanoelectronics because of their high mobility and low-cost processing; however, n-type transistors based on assembled aligned nanotubes has not been reported yet. Fabrication of n-type behavior field effect transistors (FETs) based on assembled aligned CNT arrays is needed for advanced CNT electronics. We will report a scalable process to make n-type transistors based on assembled aligned CNT arrays. Air-stable and high-performance n-type CNT FETs are achieved with high yield by combining atomic layer deposition dielectric and Ti contacts with gold overcoating, which are stable in air and widely used for III-V semiconductors. We also systematically studied the contribution of metal contacts and atomic layer deposition passivation in determining the transistor polarity. [2] Based on these experimental results, we report the successful demonstration of complementary metal-oxide-semiconductor inverters with good performance, which paves the way to realizing the promising future of carbon nanotube nanoelectronics.[1] “Wafer-scalable, aligned carbon nanotube transistors operating at frequencies of over 100 GHz”, C. Rutherglen, A. A. Kane, P. F. Marsh, T. A. Cain, B. I. Hassan, M. R. AlShareef, C. Zhou and K. Galatsis, Nature Electronics, volume 2, pages 530–539, 2019.[2] “Air-Stable n-Type Transistors based on Assembled Aligned Carbon Nanotube Arrays and Their Application in CMOS Electronics”, Z. Li, K. R. Jinkins, D. Cui, M. Chen, Z. Zhao, M. S. Arnold and C. Zhou, Nano Res. (2021). https://doi.org/10.1007/s12274-021-3567-9.
Read full abstract