Based on a multi-source error model, this paper discusses the principle of error element identification and uses the mirror bias method to compensate the geometric errors of a process system. Firstly, a nine-line measurement method to determine the geometric error of the linear feed axes of machine tools is introduced, and the geometric error identification model based on the “nine-line method” is established. Then, using a ballbar mounted in the axial, tangential, and radial directions of the machine, the geometric error elements of the rotation axis are identified by three simple measurements in each direction. Subsequently, for the more common flat vise clamping workpiece in actual production, the workpiece position error is identified by using the traditional process of dimensional chain, and the workpiece attitude error is identified by fitting the angle between the positioning plane and the horizontal plane by the least squares method. Finally, based on the tool position points and tool axis vectors obtained from the multi-source error model, the error compensation value is solved using inverse machine tool kinematics to offset the machining error by mirroring the error value of the same size, and based on the “S-shaped specimen” to compensate the processing experiments, after compensation, the processing error is reduced by 30~45%, verifying the effectiveness of the compensation method.