In this paper, we designed 1 chip IC for 3-axis gyroscope and 3-axis accelerometer used for various IoT/M2M mobile devices such as smartphone, wearable device and etc. We especially focused on analysis of gyroscope noise and proposed new architecture for removing various noise generated by gyroscope MEMS and IC. Gyroscope, accelerometer and geo-magnetic sensors are usually used to detect user motion or to estimate moving distance, direction and relative position. It is very important element to designing a low noise IC because very small amount of noise may be accumulated and affect the estimated position or direction. We made a mathematical model of a gyroscope sensor, analyzed the frequency characteristics of MEMS and circuit, designed a low noise, compact and low power 1 chip 6-axis inertial sensor IC including 3-axis gyroscope and 3-axis accelerometer. As a result, designed IC has 0.01dps/√Hz of gyroscope sensor noise density. 논문 15-40-02-21 The Journal of Korean Institute of Communications and Information Sciences '15-02 Vol.40 No.02 http://dx.doi.org/10.7840/kics.2015.40.2.397 397 ※ 본 연구는 2013년도 정부(교육과학기술부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업(No. 2013R1A1A2012082) 및 미래창조과학부 및 정보통신기술연구진흥센터의 정보통신·방송연구개발사업(13-911-05-002, 다양한 IoT 서비스를 위한 액세스 네트워크 제어 기술)의 일환으로 수행하였음. First Author : School of Electrical & Electronic Engineering Yonsei University, chkim318@yonsei.ac.kr, 정회원 ° Corresponding Author : School of Electrical & Electronic Engineering Yonsei University, jmc@yonsei.ac.kr, 종신회원 논문번호:KICS2014-10-419, Received October 16, 2014; Revised November 6, 2014; Accepted November 6, 2014 The Journal of Korean Institute of Communications and Information Sciences '15-02 Vol.40 No.02
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