This paper presents comprehensive spectral measurements and a theoretical analysis of laser-produced germanium (Ge) plasma within the 7.5–17 nm wavelength range, with the measurements being performed using spatiotemporally-resolved emission spectroscopy. We obtained and analyzed the extreme ultraviolet (EUV) spectra and their variations meticulously at various positions adjacent to the target surface. The 3p and 3d excitations of Ge ions spanning from Ge4+ to Ge13+ were calculated using the Cowan configuration interaction codes, with particular emphasis being placed on analysis of the spectral line distributions in the 3d-np, 3d-nf, and 3p-3d, 4s, 4d transition arrays. This analysis indicated the contributions made by these transition arrays to the broadband spectral features that were observed experimentally. By using a steady-state collisional radiation model along with a normalized Boltzmann distribution assumption, we clarified the predominant contributions of the 3d-4p and 3p-3d transitions from the Ge7+ to Ge9+ ions in close proximity to the target surface, along with those from the Ge5+ and Ge6+ ions at greater distances. Furthermore, by combining the results above with a plasma dynamics evolution analysis, we gained insights into how the plasma's transient and nonuniform properties influence the analysis of complex EUV band spectral profiles and examine their implications for spectral diagnostics. These results will be useful for plasma spectral diagnosis and for application to development of pulsed short-wavelength light sources.
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