The capacitance diaphragm gauge (CDG) is one of the most accurate transfer standards for use in atmospheric to medium vacuum regions. Currently, it is practical to cover a wide range of measurements with the least amount of equipment possible. In this study, one CDG with a metal membrane and two CDGs with a ceramic membrane are characterized through calibrations using a reference standard, in this case a force-balanced piston gauge system, through repeated measurements ranging from about 500 Pa to 13.3 kPa, below 10% of their full capacities (133 kPa). Performance characterizations such as repeatability, long-term instability and zero-pressure instability assessments were conducted. According to repeatability and long-term instability measurements of 133 kPa CDGs tested below 10% of their full-scale (FS) capacities, the metal membrane CDG was found to be somewhat superior compared to the ceramic membrane CDG due to the inherent material stiffness of this type of CDG. However, the difference was negligible, and both membrane-type CDGs could be used at 3 kPa (about 2% of the FS). The responses to heater effects and the results of the zero-pressure instability tests were also evaluated and presented. As shown from these results, the zero-pressure instability is major concerns for the metal membrane CDG, while it has little effect for the ceramic membrane CDG. CDGs in either case have their own advantages and can be used depending on the user’s discretion.