Journal of Electronics ManufacturingVol. 01, No. 01, pp. 51-56 (1991) PapersNo AccessModeling the epitaxial growth of gallium arsenideA.K. MACPHERSON, D. BEHBOUDI, J.C.M. HWANG, and G. MICEKA.K. MACPHERSONPackard Laboratory 19, Lehigh University, Bethlehem, PA 18015, USA Search for more papers by this author , D. BEHBOUDIPackard Laboratory 19, Lehigh University, Bethlehem, PA 18015, USA Search for more papers by this author , J.C.M. HWANGPackard Laboratory 19, Lehigh University, Bethlehem, PA 18015, USA Search for more papers by this author , and G. MICEKPackard Laboratory 19, Lehigh University, Bethlehem, PA 18015, USA Search for more papers by this author https://doi.org/10.1142/S0960313191000072Cited by:1 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractA molecular dynamics model of the epitaxial growth of gallium arsenide has been written. The results from the model will be used to obtain parametric growth data including layer thickness and doping concentration. Initially it was necessary to check the potential, which was developed for bulk gallium arsenide, for its applicability to surface growth. The resultant continuum model, when integrated with Stanford University’s SUPREM 3.5 code, will simulate gallium arsenide processing based on epitaxial material.Keywords:Gallium arsenidemolecule dynamicsepitaxial growth FiguresReferencesRelatedDetailsCited By 1Some aspects of the physics of man-made semiconductor heterosystems: superlattice electronic structure and related topicsPierre Masri1 Nov 1993 | Surface Science Reports, Vol. 19, No. 1-2 Recommended Vol. 01, No. 01 Metrics History Received 1 May 1991 Accepted 1 June 1991 KeywordsGallium arsenidemolecule dynamicsepitaxial growthPDF download
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