The Ga vacancy (VGa) defect in β‐Ga2O3, generated by proton irradiation, is studied using high‐frequency electron paramagnetic resonance (EPR) and electron‐nuclear double resonance spectroscopy. The previous X‐band EPR studies of this defect, attributed to VGa2−, are extended to higher frequencies (240 GHz) and lower temperatures (T = 6 K). The spin Hamiltonian parameters of the VGa2− center are determined: electron spin S = 1/2, g‐tensor: gb = 2.0313, gc = 2.0079, and ga = 2.0025; the hyperfine interaction parameters with 2 equivalent Ga neighbors: Ab = 14.0 G, Ac = 14.6 G, and Aa* = 12.8 G for 69Ga; the superhyperfine interaction with distant Ga neighbors ASHF(69Ga) = 11 MHz; and the quadrupole interaction Qb(69Ga) = 0.32 MHz and Qb(71Ga) = 0.22 MHz. These results shall allow to refine the assignment of this center to a split vacancy or an unrelaxed VGa2− defect.
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