Fuzzy Proportion Integration Differentiation Control Research Articles

Modeling and control of a novel piezoelectric actuated precision fast positioningsystem

The need for a precision fast positioning technique is drawing significant attention fromoptical engineering, semiconductor industry, biotechnology, and nanotechnology, etc. Thispaper presents a novel piezoelectric (PZT) actuated precision fast positioning system(PFPS), which consists of a control module, PZT driving module, a precision fastpositioning mechanism (PFPM), and a micro-displacement measure module. It controls thetilt and piston movements quickly and precisely. The driving, mechanism and measureintegrative model of the PFPS has been built. The methods of digital proportional integraldifferential (PID) feedback control and self-tuning fuzzy PID control are studied. Simulationresults prove that the proposed self-tuning fuzzy PID controller has good dynamic andstatic performances. A dynamic performance test system has been established. Theexperimental results confirm the validity of the design and the theoretical analysis of thePFPS.