Preparation of supported metal nanoparticles for catalytic applications often relies on an assumption that the initially prepared wet-impregnated support material is covered with approximately a monolayer of adsorbed species that are shaped into the target nanoparticulate material with a desired size distribution by utilizing appropriate post-treatments that often include calcination and reduction schemes. Here, the formation and evolution of surface nanoparticles were investigated for wet-chemistry deposition of platinum from trimethyl(methylcyclopentadienyl)platinum (IV) precursor onto flat silica supports to interrogate the factors influencing the initial stages of nanoparticle formation. The deposition was performed on silicon-based substrates, including hydroxylated silica (SiO2) and boron-impregnated hydroxylated silica (B/SiO2) surfaces. The deposition resulted in the immediate formation of Pt-containing nanoparticles, as confirmed by atomic force microscopy and x-ray photoelectron spectroscopy. The prepared substrates were later reduced at 550 °C under H2 gas environment. This reduction procedure resulted in the formation of metallic Pt particles. The reactivity of the precursor and dispersion of Pt nanoparticles on the OH-terminated silica surface were compared to those on the B-impregnated surface. The size distribution of the resulting nanoparticles as a function of surface preparation was evaluated, and density functional theory calculations were used to explain the differences between the two types of surfaces investigated.