We have studied the nanometer-scale structure of bare substrates as well as of thin films by a variety of scanning probe methods and have correlated their nanostructural and nanophysical properties. Nanomechanical properties, e.g. of thin fullerene films, have been probed by scanning and lateral force microscopy. In particular, we have addressed the question of whether the spherically shaped C60 molecules can act as molecular-scale ball bearings, thereby exhibiting exceptional lubricating behavior. Nanomagnetic properties, e.g. of magnetite, have been studied by magnetic force microscopy (MFM) and spin-polarized scanning tunneling microscopy (SPSTM) from the micrometer scale down to the atomic level. The complementary nature of the information from MFM and SPSTM data is discussed. Nanoelectronic properties, e.g. of nitride-oxide-silicon (NOS) heterostructures, have been probed by scanning capacitance microscopy (SCM). Charge storage on a submicrometer scale in NOS heterostructures has been achieved by applying voltage pulses to the SCM tip. Finally, mechanical nanofabrication based on scanning force methods has been combined with conventional photolithography to obtain superconducting micro- and nanobridges with potential applications for superconducting nanoelectronic devices.
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