A three-port electrical and optical model of LiTaO3 probes with a high-bandwidth coplanar waveguide (CPW) test structure is developed in this paper. The three-port model is constructed by combining the full wave field simulation and the neural network techniques. The three-port model has the same accuracy as the full wave modeling, but its characteristics are directly obtained from the neural network weighting parameters rather than the complicated full wave simulation. With this model, both invasiveness and waveform distortion in the external E-O sampling can be de-embedded.
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